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Lithography
John Wiley and Sons Ltd, Nov 2010, Pages: 320
Increasingly faster, smaller and cheaper - these are the three key factors driving technologies that make up, and will continue to make up, the nano-world and all the products that are derived from it. Specifically, in the field of microelectronics, the self-fulfilling power of Moores Law has driven an amazing pace of technological advance in our ability to construct ever more dense patterns of circuit components and devices on computer chip wafers.
Lithography (from the Greek meaning to write with stone) was originally named for the technique of printing using stone, and then metal, plates that revolutionized modern communications. Today it is an extremely complex tool and is still based on the concept of imprinting an original template version onto mass output originally using relatively simple optical exposure, masking, and etching techniques, and now extended to include exposure to X-rays, high energy UV light, and electron beams in processes developed to manufacture everyday products including those in the realms of consumer electronics, telecommunications, entertainment, and transportation to name a few. In the last few years, using multidisciplinary techniques, researchers and engineers have pushed the envelope of fields including optics, physics, chemistry, mechanics and fluidics, and this book provides an overview and selected in-depth coverage of the most important advances and applications that make up the state of the art.
The key technologies and approaches, from masking and the use of polymer resists to exposure wavelength management and reduction and especially how mastery of the effects of diffraction phenomena has advanced the field are examined, and all the most important and up to date tools are fully covered, including remaining challenges and possible solutions. Important topics include the development of focused ion beam (FIB) technology, nano-printing, use of self-assembly techniques, and the possibilities of stacked, or 3-D lithography.
Written for engineers or researchers who may be new to the field, this book will be helpful for many readers (including students and non-specialists) in completing their knowledge on a collection of technologies in which are now in a permanent and rapid state of evolution.
Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc.
This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components.
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