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NEMS/MEMS Technology and Devices 2011
Trans Tech Publications Inc, Sep 2011, Pages: 236
Series: Advanced Materials Research, Volume 254
Selected, peer reviewed papers from the International Conference on Materials for Advanced Technologies (ICMAT2011), Symposium G: NEMS/MEMS and microTAS, 26 June to 1 July 2011, Suntec, Singapore
The emphasis of this special collection of 55 peer-reviewed papers was on NEMS/MEMS and microTAS. Particular attention was paid to applications that involve MEMS design, modelling, fabrication processes, lab-on-a-chip and biophotonic medical devices. The volume also explores new devices and processes, innovations and engineering applications; especially those related to NEMS/MEMS technologies and devices. A very useful guide to this highly specialized topic.
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