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Development and Assessment of Wafer Transport Sequencing Rules for Clustertools. Edition No. 1

VDM Publishing House, June 2008, Pages: 104

Cluster tools have become an important tool type in the semiconductor industry during
the last decade. They integrate several process chambers into a tool and enable
sequential process steps within one tool and/or increase capacity and availability by
using several chambers in parallel for the same step. In these cluster tools, several
chambers are usually served by one robot. Different process times and the parallelism
of the chambers lead to practically random and competing transport tasks and
therefore to a dynamic sequence of events. Therefore a static capacity analysis is often
insufficient and the deduction of improvement potentials requires complex analysis
of the sequence of transport job executions. Besides external influences like the instant
of the next delivery of a lot can change the ranking of different optimization
criteria and temporarily favor a different sequencing rule. Commercially available
simulation programs for semiconductor cluster tools are limited in the variety of sequencing
rules and do not support such an analysis to the necessary extent.

Yi, Chen.
Yi Chen, PhD, Lecturer in Multidisciplinary Design and Optimisation at University of Electronic Science and Technology of China.