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Indium Tin Oxide: High Temperature Ceramic Thin Film
Sensors. Edition No. 1
VDM Publishing House, Oct 2008, Pages: 72
The evolutionary development of new engine materials
and designs has allowed turbines to be operated at
much higher temperature and achieve higher
efficiencies, thus new materials have been developed
to meet these new challenges. There is a growing
need to assess the material behavior in these harsh
environments so that structural models can be
validated and engine components can be monitored
during operation. This book demonstrated a ceramic
strain sensor and temperature sensor based on
reactively sputtered indium-tin-oxide (ITO) thin
films have been developed to monitor the aerospace
propulsion systems. Ceramic ITO strain sensors were
prepared by reactive sputtering in various
nitrogen/oxygen/argon partial pressures. A robust
ceramic temperature sensor fabricated by two
different ITO elements, each with substantially
different charge carrier concentrations, was
developed to monitor the temperature of all the
static and dynamic engine components employed in
propulsion systems that operate at temperatures in
excess of 1300°C.
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