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Viewing report
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Finite Element Analysis of Electrostatic
Coupled Systems. Edition No. 1
VDM Publishing House, Sep 2008, Pages: 80
Multi-physics coupled fields are often present in
MEMS. This makes the modeling and analysis of such
devices difficult and sometimes costly. The coupling
between electrostatic and mechanical fields in MEMS
is one of the most common and fundamental phenomena
in MEMS; it is this configuration that is studied in
this thesis. The following issues are addressed: 1.
The finite element method (FEM) is therefore used to
model electrostaticmechanical coupled MEMS. 2. In
order to capture the configuration of the system
accurately, with relatively little computational
effort, a geometric non-linear mixed assumed stress
element is developed and used in the FE analyses. 3.
Selected algorithms for solving highly non-linear
coupled systems are evaluated. 4.Finally, a
practical engineering MEMS problem is studied.
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