The Russian Market for Integrated Microcircuits (IMC), IMC Design and Contract Manufacturing: Part 1 - Supply Analysis in the Russian Market
- Language: English
- 182 Pages
- Published: January 2012
- Region: Russia
The fourth in a continuing series on rapid thermal processing (RTP), this volume addresses work in traditional RTP processes such as dielectric growth, annealing and silicides, as well as developments in integrated processes. The primary focus, however, is the manufacturing aspects of RTP and the successful integration of RTP into production semiconductor fabs. Emphasis is placed on process and equipment modelling and the critical aspects of RTP, such as temperature measurement, uniformity and control. Topics include: modelling, sensors and control; integrated processing and manufacturing; dielectrics; epitaxy, polysilicon and devices; and junctions, metallization and contacts.
Steven R. J. Brueck University of New Mexico.
Jeffrey C. Gelpey
Jorgé L. Regolini
James C. Sturm Princeton University, New Jersey.