-
Hard Copy (Paper Back)
-
CD ROM
-
Electronic (PDF)
Micro-Nano Technology XIII
Trans Tech Publications Inc, July 2012, Pages: 470
Series: Key Engineering Materials, Volume 503
Selected, peer reviewed papers from the 13th Annual Conference of Chinese Society of Micro-Nano Technology, September 28-30, 2011, Changchow, China
These 81 papers, all written by Chinese researchers, are grouped into 8 chapters: Micro/Nano Transducer/Acutar/Robot, Microfluidic Devices and Systems, Micro/ Nano Fabrication and Measurement Technologies, Microfluidics and nano fluids, Nano Material Research/Nanotube/Nanowire Devices, MEMS/NENS and Applications, Nanometer Biological / Nano Medicine and Packaging Technology.. This work offers an excellent overview of current research on MEMS and nano-technology in China. It will be invaluable to researchers, graduate students and engineers who work in the fields of MEMS and nano technology.
Review from Book News Inc.: The 81 papers cover the micro/nano transducer/actuator/robot, microfluidic devices and systems, micro/nano fabrication and measurement technologies, microfluidics and nano fluids, nano material research/nanotube/nanowire devices, MEMS/NENS and applications, nanometer biological/nano medicine, and packaging technology. Among specific topics are micro-machined electrochemical seismic sensors with interdigital electrodes, a simple method for depositing DNA on the mica, an analytical model of a fluxgate system, analyzing broken wires during gold wire bonding process, and an integrated micro-sensor system to gather meteorological information.
Table of Contents (82 papers, 10 per page listed)
The Out-Rotator of Spin Traveling Wave Pump on Magnetic Fluid
Meng Zhao, Ji Bin Zou, Jing Shang
A Monolithic Integrated Pressure Sensor
Zheng Yuan Zhang, Cao Yang, Yong Mei, Zhi Cheng Feng, Xiao Gang Li, Jian Gen Li, Guo Xiang Hu
A High-Order Curvature-Compensated Bandgap Voltage Reference for Micro-Gyroscope
Qiang Li, Xiao Yun Tan, Guan Shi Wang
Pull-In Voltage of Parallel-Plate Capacitor Fixed to Double Elastic Supports
Wu Zhou, Bei Peng, Xiao Hong Hao
Research on Two-Dimensional Scanning Characteristics of MEMS Resonant Mirror
Chi Zhang, Yun Han Chen, Zheng You
Design and Fabrication of a MEMS Flexural Plate Wave Device Based on LTO/ZnO/LTO/Si3N4 Multilayered Composite Membrane
Ming Xin Xue, Meng Wei Liu, Xin Li, Jun Hong Li
New Isolation Optimization Method of RF MEMS Capacitive Switches
Jun Shou Chen, Zheng You, Yong Ruan, Mu Zhi Hu
Design, Fabrication and Characterization of a 5x5 Array of Piezoresistive Stress and Temperature Sensors
Chuan Guo Dou, Yan Hong Wu, Heng Yang, Xin Xin Li
MEMS Grating with Interdigitated-Comb Structure
Heng Zhang, Jun Yao, Feng Gang Tao, Xu Ye Zhuang
Low Temperature Wafer Level Adhesive Bonding Using BCB for Resonant Pressure Sensor
Yu Xin Li, De Yong Chen, Jun Bo Wang
Micro-Machined Electrochemical Seismic Sensors with Interdigital Electrodes
Guang Bei Li, De Yong Chen, Wen Tao He, Jun Bo Wang
Optimal Design of Micro Plastic Heat Radiator
Yue Han, Ya Jun Zhang, Da Ming Wu, Jian Zhuang, Kai Fang Dang
A Miniaturized Piezoelectric Wind Flutter Generator
Xing Qiang Zhao, Zhi Yu Wen, Zhi Gang Du
Low Frequency Electrochemical Accelerometer with Low Noise Based on MEMS
Wen Tao He, De Yong Chen, Guang Bei Li, Jun Bo Wang
A Flush-Mounted Resonant Ice Detection Sensor with High Sensitivity
Qiang Shi, Jun Bo Wang, De Yong Chen, Yan Long Shang
Simulation and Analysis of Cantilever-Membrane Structure for Piezoresistive Micro-Accelerometers
Yan Liu, Yu Long Zhao, Lu Sun
Simulation of Characteristic of a Thermoelectric Power Sensor Based on MEMS Technology
Tong Liu, Xiao Ping Liao
Phase Transition Characterization Dependent on Temperature and DC Electric Field for (Pb, La) (Zr, Ti)O3 Antiferroelectric Thick Films
Xiu Jian Chou, Miao Xuan Du, Yong Bo Lv, Jun Liu, Wen Dong Zhang
Heating Carve Technique for Polymer Microfluidic Microchannel
Xiao Wei Han, Wei Wang, G.H. Ye, Xiao Wei Liu, Li Tian, Zhi Gang Mao
Structure Design of a Novel Micromachinined Tuning Fork Gyroscope with High Robustness
W.P. Chen, Yi Bo Yang, Y. Yu
MEMS Bionic Vector Hydrophone
Guo Jun Zhang, Chen Yang Xue, Ji Jun Xiong, Wen Dong Zhang, Xiao Yao Wang, Lin Xian Liu, Xiao Yang Ge
Vibration Characteristic Analysis of V-Shaped Electrothermal Microactuator
Zhen Lu Wang, Xue Jin Shen, Ling Zhou, Xiao Yang Chen
Design and Analysis of a Monolithic 3-Axis Micro-Accelerometer
Xing Hua Wang, Zhi Hua Chen, Ding Bang Xiao, Xue Zhong Wu
An Interface for Low-Q Micromachined Gyroscope
Guan Shi Wang, Mu Tao, Xiao Wei Liu
A High-Performance Closed-Loop Fourth-Order Sigma-Delta Micro-Machined Accelerometer
Bing Jun Lv, Peng Fei Wang, Dong Bo Wang, Jun'an Liu, Xiao Wei Liu
Research of Coupling Structure between Photonic Crystal Waveguide and Dielectric Taper Waveguide
Xiao Yuan Ren, Li Shuang Feng, Zhen Zhou, Huai Yong Yu, Xue Wen Deng
A Simple Method for Depositing DNA on the Mica
Yu Zhang Wang, Jing Jie Sha, Lei Liu, Hong Yan Fu, Yun Fei Chen
A Silicon Micro-Accelerometer with Triangle Cross-Section Beam by Anisotropic Wet Etching in TMAH Solution
Yu Lv, Hong Juan Cui, Pei Tao Dong, Zhi Hua Chen, Xue Zhong Wu
Analysis of Polarization-Maintaining Waveguide Used in Resonance Integrated Optical Gyro
Hui Lan Liu, Ru Ya Li, Huai Yong Yu, Jun Jie Wang, Zhi Chao Jiao
Analysis and Improvement of a 3 Axis Accelerometer
Shi Tao Wang, Yu Bin Jia, Bin Zhen Zhang, Xue Song Liu, Qin Wen Huang, Yi Long Hao
A 19 Element Hexagonal Actuator Arrangement Continuous Face-Sheet MEMS Deformable Mirror
Wei Min Wang, Feng Gang Tao, Jian Fei Zhang, Jun Yao
Quadrature Error and Offset Error Suppression Methods for Micro-Gyroscopes
Bing Mo, Huo Zhou, Qi Zheng, Si Hao Chen, Chao Dong Ling
Closed-Loop Driving Circuit Based on Frequency Modulation Method for Capacitive Micromachined Gyroscope
Bing Mo, Qi Zheng, Si Hao Chen, Huo Zhou, Chao Dong Ling
Design and Simulation of Multi-Microchannel for Thermal Wind Sensor
Rong Sen Hong, Wen Zhong Lou, Hui Chao Liu, Yue Zhao
Study of High Sensitivity Sensor Based on the Principle of Photoionization
Kun Wang Niu, Ting Liang, Fang Yang, Qing Meng, Kai Wang, Ji Jun Xiong
Design and Simulation of a Capacitive Biaxial Microaccelerometer
Yu Liu, Zhi Yu Wen, Li Chen, Hong Yun Yang
Air Gap Flux Density for the Planar Motor
Xiao Hong Hao, Xue Kang Li, Wu Zhou, Bei Peng
A High-Performance Mash Fourth-Order Sigma-Delta Modulator
Wen Yan Liu, Bin Zhang, Long Chen, Chao Gao, Xiao Wei Liu
Closed-Loop Control of a SOI-MEMS Resonant Accelerometer with Electromagnetic Excitation
Yan Long Shang, Jun Bo Wang, De Yong Chen, Qiang Shi, Guang Bei Li
A Novel Preconcentration Method for Microchip Based Electrophoresis and its Numerical Simulation
Hao Yuan Cai, Xing Chen, Hui Li, Da Fu Cui
Simulation of Injection Molding of Ultra-Thin Light Guide Plate with Hemispherical Microstructures
Peng Wei Dong, Zhong Li Zhao, Da Ming Wu, Ya Yun Zhang, Jian Zhuang
Design of a MEMS Broadband Microstrip Patch Antenna Based on Minkowski Fractal Boundary
Chong Ying Lu, Li Xin Xu
Investigation on Transmittance and Uniformity of Light Diffuser Plate of Scattering Optical Transmission Polymer
Xiao Xiang He, Da Ming Wu, Ya Jun Zhang, Jian Zhuang, Xiu Ting Zheng, Yang Zhou
Analytical Model of Fluxgate System
Ming Yuan Ren, Xiao Wei Liu, Hao Ran Li, Zhi Gang Mao
Optimal Design and Simulation of a Cross-Plane Micro-Thermoelectric Generator
Xiao Liang Zhu, De Sheng Li, Ben Dong Liu, Jiang Zhe
Eliminating the External Libration Sound for the Optical Microsphere-Taper Coupling Structure
Li Wang, Peng Fei Xu, Yu Guang Zhang, Ying Zhan Yan, Shu Bin Yan
Development of a Portable Phosphate Detection System Using Cobalt Based Microelectrodes
Bei Lei Deng, Jian Hua Tong, Yin Bai, Chao Bian, Gui Li Yan, Hong Zhang, Shan Hong Xia
Effect of Micro Structures of Diffusers on Optical Properties of LED Light
Yang Zhou, Da Ming Wu, Xiu Ting Zheng, Ya Jun Zhang, Jian Zhuang, Xiao Xiang He
A Refined Arnoldi Algorithm Based Krylov Subspace Technique for MEMS Model Order Reduction
Le Guan, Jia Li Gao, Zhi Wen Wang, Guo Qing Zhang, Jin Kui Chu
A Novel Micro Mirror Spectrometer and Test Experiment
Biao Luo, Zhi Yu Wen, Hai Tao Liu, Li Chen, Rong Rong Qi
A Ground Target Positioning Method Facing Small UAVs
Qi Guo, Shao Peng Liu, Wei Xiong, Zhao Ying Zhou
Study of a MEMS Short-Circuit Fuse Based on Electro-Thermal Theory
Yue Zhao, Dong Guang Li, Wen Zhong Lou, Long Fei Zhang, Jian Hua Li, Mao Bo Fang
Simulation on S Parameter of an X-Band Wilkinson Power Divider
He Chao Liu, Xiao Ping Liao
Application of ICP Deep Trenches Etching in the Fabrication of FBAR Devices
Zheng Guo Shang, Dong Ling Li, Sheng Qiang Wang, Jian Hua Liu
Analysis of Broken Wires during Gold Wire Bonding Process
Ming Qiang Pan, Tao Chen, Li Guo Chen, Li Ning Sun
A High Performance Fourth-Order Single-Loop Sigma Delta Modulator Applied in Micro-Inertial Sensors
Peng Fei Wang, Yuan Yuan, Dong Bo Wang, Xiao Wei Liu, Jun'an Liu
An In Situ Measuring Method for Young's Modulus of a MEMS Film Base on Resonance Frequency
Han Chen, Hua Rong
Design and Simulation for Tri-Axial Piezoresistive MEMS Accelerometer
Meng Liu, Wei Zhang, Yi Long Hao
Emulated Analysis of the Preview-LQG Controller for Micromachined Tunneling Gyroscope
Yi Fang Liu, Ling Yun Wang, De Zhi Wu, Dao Heng Sun
Two Fabrication Schematics of Silicon Micro Perforated Panel Based on MEMS Technology
Shao Hua Wu, Zhan Zhao, Li Jun Guo, Li Dong Du, Li Xiao, Zhen Fang, Jun Juan Zhao, Yun Dong Xu
Research on the Hydrophobicity of Black Silicon Based on Virtual Process
Xin Li, Chen Wang, Guang Yi Sun, Xin Zhao, Hai Xia Zhang, Gui Zhang Lu
Investigation of Silicon Lapping and Polishing Technique for Micro-Inertial Device
Zhang Long, Zhu Jian
The Microfluid-Driven Control by Forced Wave
Ping Zhu
Analysis and Simulation of Micro-Fluidic Inertial Switch
Yi Lin, Tao Yang, Ting Ting Liu, Guang Yan Chen, Chao Wang
Experimental Study on a Small Flux, High Pressure Peristaltic Micropump
Min Du, Zheng Mao Lu, Xiong Ying Ye
Numerical Simulation of Multi-Physical Fields Coupling and Design of a Digital Microfluidics Chip
Tao Chen, Li Guo Chen, Ming Qiang Pan, Ming Xiang Ling, Li Ning Sun
Design and Simulation of Micro-Power Generator Based on Piezoelectric Effect for MEMS Devices Applications
Xiu Jian Chou, Ya Ting Zhang, Mao Xiang Guo, Tao Guo, Ji Jun Xiong
Structures and Dielectric Properties of (Pb, La)(Zr, Ti)O3 Antiferroelectric Thick Films Prepared by Different Sintering Procedures
Wen Ping Geng, Xiu Jian Chou, Yong Bo Lv, Ji Jun Xiong, Wen Dong Zhang
Accuracy Correction of the Measuring Method for Film Stress Gradient Based on Curvature Radius
Hua Rong, Chang Ling Yu
Boron-Doped Nanocrystalline Silicon Thin Films Prepared by PECVD
Xiu Qin Wang, Jian Ning Ding, Ning Yi Yuan, Shu Bo Wang
Design and Realization of Modular MEMS-Based Attitude Measurement and Control System Based Wireless Sensor Networks
Shao Peng Liu, Zhao Ying Zhou, Xing Yang, Qiu Sheng Liu, Qiong Wang, Qi Guo
Effects of Different Package Structures on Thermal Properties of High Power White LED
Zhe Ran Sun, Da Ming Wu, Ya Jun Zhang, Jian Zhuang, Kai Fang Dang
Design of Ethernet Interface Based on FPGA and W5300
Sheng Kun Li, Xue Song Wang
Size-Dependence on Load Properties of a Silicon Nanobeam
Jing Wang, Hong Yan Zhang
Integrated Micro-Sensor Detection System of Meteorological Information
Hui Chao Liu, Wen Zhong Lou, Rong Sen Hong, Shao Peng Zu
Design of a Digital Decimation Filter for High-Precision 4-Order Sigma-Delta ADC
Wei Ping Chen, Qiang Fu, Xiao Wei Liu, Yan Xiao, Bin Zhang, Yu Heng Yang
Detecting DNA Using a Single Graphene Pore by Molecular Dynamics Simulations
Wei Si, Jing Jie Sha, Lei Liu, Jia Peng Li, Xiao Long Wei, Yun Fei Chen
An Improved Sensitivity Non-Enzymatic Glucose Sensor Based on a Nano-Gold Modified Ag Electrode
Jia Hong He, Qiang Xu, Zhi Qiang Gao, Zhong Rong Song
Study on Anodic Bonding Process of Slender Vitreous Body
Ming Qiang Pan, Li Guo Chen, Tao Chen, Zhen Hua Wang, Li Ning Sun
Trial-Constructing a Novel Image of AAO Template
Hong Mei Zheng, Yu Cheng Wu, Xin Min Huang, Jie Wu Cui, Yan Wang
An Alignment Method for Lift-Off on Shallow Grooves in Transparent Substrates for Integrated Dual Grating Structures
Jin Yang Feng, Feng Chen, Yuan Fang Shang, Xiong Ying Ye
Composite Content Influence on Multiwall Carbon Nanotubes-SiO2 Film Humidity Sensors at AC Testing
Tuo Li, Xiao Wei Liu, Zhen Gang Zh
Product Samples
A sample for this product is available. Please Login/Register to download this sample.
Customers who bought this item also bought
All rights reserved. © Copyright 2013 Research and Markets WWW6
Terms and Conditions Privacy Policy Publishers Employment Opportunities Site Map Link to us Webmaster Affiliate Network
