MNT devices require precise measurement of multi domain and inter-related parameters. In the case of mechanical microsystems, the static and dynamic behaviour must be investigated in such a way that the measurement does not interfere with the performance of the device. Optoelectronic devices need simultaneous measurement of electrical and optical signals often with extreme demands on accuracy and resolution, whilst in fluidic devices the systems require the measurement of well defined flow rates of fluids with accurate composition. Thus, testing MNT products is much more complex than testing standard electronic components.
There is a huge potential for suppliers of specific equipment for MNT testing. Whilst this market growing and transforming itself from R&D to production, testing has been a neglected area. The current scarcity of suitable equipment suppliers is underpinned by the fact that in many companies the test equipment is built in-house. The enablingMNT review on Test and Measurement Equipment and Services for MST/MEMS provides an in-depth analysis of the state-of-the-art in MST/MEMS test and measurement technologies ranging from in situ probing of electrical and mechanical properties to the testing of functional devices, such as inertial sensors.
The report includes outlined descriptions of the basic underlying techniques and technologies and detailed information on the suppliers from across the world. The enablingMNT team has analysed the markets of equipment suppliers and companies supplying test and measurement specific equipment and services for the MST/MEMS industry.
The research culminated in this review, which incorporates an outline of the technologies and markets for MNT, a description of testing techniques and profiles of around 50 selected suppliers. The enablingMNT industry review on Test and Measurement Equipment and Services for MST/MEMS is over 100 pages including 14 Tables and 9 Figures, and 48 company profiles.
