This book provides a comprehensive review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. The book also has excellent chapters on newer industrial hygiene concerns that are not specific to the semiconductor industry: ergonomics, indoor air quality, personal protective equipment, plan review, and records retention. While much of the information in these chapters can be applied to all industries, the focus and orientation is specific to issues in the semiconductor industry.
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Industrial Hygiene Monitoring
Industrial Hygiene Monitoring: Physical Agents
Personal Protective Equipment (PPE)
Indoor Air Quality (IAQ)
Industrial Hygiene Recordkeeping
Appendix A: Silicon Ingot and Wafer Manufacturing
Appendix B: Silicon Device Manufacturing Introduction
Appendix C: III-V (GaAs)
Appendix D: III-V Device: Microwave IC
Appendix E: Ion Implanter Maintenance Safety Considerations
Appendix F: Bibliography
Glossary and Acronyms