This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing, such as plasma etching and planarization, plasma enhanced chemical vapor deposition of thin films, sputtered deposition of metals and dielectrics, epitaxial growth of silicon and GaAs, and many other applications.
This is a comprehensive survey and a detailed description of most advanced high density plasma sources used in plasma processing. The book is a balanced presentation in that it gives both a theoretical treatment and practical applications. It should be of considerable interest to scientists and engineers working on plasma source design, and process development.
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Planar Inductive Sources
Electrostatically-Shielded Inductively-Coupled RF Plasma Sources
Very High Frequency Capacitive Plasma Sources
Surface Wave Plasma Sources
Microwave Plasma Disk Processing Machines
Electron Cyclotron Resonance Plasma Sources
Distributed ECR Plasma Sources