Handbook of Ellipsometry

  • ID: 1779073
  • Book
  • 886 Pages
  • Elsevier Science and Technology
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The Handbook of Ellipsometry is a critical foundation text on an increasingly critical subject. Ellipsometry, a measurement technique based on phase and amplitude changes in polarized light, is becoming popular in a widening array of applications because of increasing miniaturization of integrated circuits and breakthroughs in knowledge of biological macromolecules deriving from DNA and protein surface research. Ellipsometry does not contact or damage samples, and is an ideal measurement technique for determining optical and physical properties of materials at the nano scale.

With the acceleration of new instruments and applications now occurring, this book provides an essential foundation for the current science and technology of ellipsometry for scientists and engineers in industry and academia at the forefront of nanotechnology developments in instrumentation, integrated circuits, biotechnology, and pharmaceuticals. Divided into four parts, this comprehensive handbook covers the theory of ellipsometry, instrumentation, applications, and emerging areas. Experts in the field contributed to its twelve chapters, covering various aspects of ellipsometry.

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PART 1: THEORY OF ELLIPSOMETRY
Polarized Light and Ellipsometry
Optical Physics of Materials
Data Analysis for Spectroscopic Ellipsometry
PART 2: INSTRUMENTATION
Optical Components and the Simple PCSA (polarizer, compensator, sample, analyzer) Ellipsometer
Rotating Polarizer and Analyzer Ellipsometry
Polarization Modulation Ellipsometry
Multichannel Ellipsometry
PART 3: APPLICATIONS
SiO2 Films
Theory and Application of Generalized Ellipsometry
PART 4: EMERGING AREAS
VUV Ellipsometry
Spectroscopic Infrared Ellipsometry
Ellipsometry in Life Sciences
Index
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Tompkins, Harland
Irene, Eugene A
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