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Science and Technology of Microfabrication: Volume 76. MRS Proceedings

  • ID: 2128950
  • Book
  • April 1987
  • Region: Global
  • Cambridge University Press
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The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
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R. E. Howard AT&T Bell Laboratories, New Jersey.

E. L. Hu University of California, Santa Barbara.

S. Namba University of Osaka, Japan.

S. W. Pang Massachusetts Institute of Technology.
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