Laser and Particle-Beam Chemical Processing for Microelectronics: Volume 101. MRS Proceedings

  • ID: 2128963
  • Book
  • Cambridge University Press
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The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
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Daniel J. Ehrlich
Gregg S. Higashi AT&T Bell Laboratories, New Jersey.

Modest M. Oprysko IBM T J Watson Research Center, New York.
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