Rapid Thermal Annealing/Chemical Vapor Deposition and Integrated Processing: Volume 146. MRS Proceedings

  • ID: 2129031
  • Book
  • Cambridge University Press
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The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
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David Hodul
Jeffrey C. Gelpey
Martin L. Green AT&T Bell Laboratories, New Jersey.

Thomas E. Seidel
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