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Materials Modification by Energetic Atoms and Ions: Volume 268. MRS Proceedings

ID: 2129130
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Cambridge University Press

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The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

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Kenneth S. Grabowski
Scott A. Barnett Northwestern University, Illinois.

Stephen M. Rossnagel IBM T J Watson Research Center, New York.

Kiyotaka Wasa

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