Materials Modification by Energetic Atoms and Ions: Volume 268. MRS Proceedings

  • ID: 2129130
  • Book
  • Cambridge University Press
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The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
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Kenneth S. Grabowski
Scott A. Barnett Northwestern University, Illinois.

Stephen M. Rossnagel IBM T J Watson Research Center, New York.

Kiyotaka Wasa
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