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Film Synthesis and Growth using Energetic Beams: Volume 388. MRS Proceedings

  • ID: 2129219
  • Book
  • October 1995
  • Region: Global
  • 446 Pages
  • Cambridge University Press
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With over 16 countries represented, this book represents international developments in the field of film synthesis and growth using energetic beams. It focuses on pulsed-laser deposition. Fundamental issues pertaining to the generation of laser ablation plumes, temperature distributions and collisional effects are described. Ion-assisted pulsed-laser deposition, pulsed-ion deposition, applications of hyperthermal beams and aspects of surface dynamics are discussed. The inclusion of an ion beam with the ablation process leads to some unique modifications in the thin-film growth mechanisms, and hence, film properties. Likewise, the collision of high-mass metal cluster ions with substrates shows promise for growth of novel structures. Also featured are new developments of optoelectronic materials, nitrides and carbon films using a variety of techniques. The effects of beam-induced defects on growth and surface morphology, chemical effects during growth, and characterization of film growth and film properties are addressed.
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H. A. Atwater California Institute of Technology.

J. T. Dickinson Washington State University.

D. H. Lowndes
A. Polman
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