Advanced Metallization and Interconnect Systems for ULSI Applications in 1997: Volume 13. MRS Conference Proceedings

  • ID: 2129326
  • Book
  • Cambridge University Press
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The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
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R. Cheung
J. Klein
K. Tsubouchi
M. Murakami
N. Kobayashi
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