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Advanced Interconnects and Chemical Mechanical Planarization for Micro- and Nanoelectronics: Volume 1249. MRS Proceedings

  • ID: 2129694
  • Book
  • October 2010
  • Cambridge University Press
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The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
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J. W. Bartha
C. L. Borst
D. DeNardis
K. Kim
A. Naeemi
A. Nelson
S. S. Papa Rao
H. W. Ro
D. Toma
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