New RF and microwave frequency MEMS (microelectromechanical systems) have potentially enormous and widespread applications in the telecommunications industry. Components based on this technologysuch as switches, varactors, and phase shiftersexhibit virtually no power consumption or loss, making them ideally suited for use in modern telecommunications and wireless devices.
This book sets out the basics of RF MEMS and describes how to design practical devices and circuits. As well as covering fundamentals, Gabriel Rebeiz offers expert tips for designers and presents a range of real–world applications. Throughout, the author utilizes actual engineering examples to illustrate basic principles in theory and practice. Detailed discussion of cutting–edge fabrication and packaging techniques is provided.
Suitable as a tutorial for electrical and computer engineering students, or as an up–to–date reference for practicing circuit designers, RF MEMS provides the most comprehensive available survey of this new and important technology.
Chapter 1– Introduction: RF MEMS for Microwave Applications.
Chapter 2– Mechanical Modeling of MEMS Devices: Static Analysis.
Chapter 3– Mechanical Modeling of MEMS Devices: Dynamic Analysis.
Chapter 4– Electromagnetic Modeling of MEMS Switches.
Chapter 5– MEMS Switch Library.
Chapter 6–MEMS Switch Fabrication and Packaging.
Chapter 7–MEMS Switch Reliability and Power Handling.
Chapter 8– Design of MEMS Switch Circuits.
Chapter 9–MEMS Phase Shifters.
Chapter 10– Distributed MEMS Phase Shifters and Switches.
Chapter 11– MEMS Varactors and Tunable Oscillators.
Chapter 12– Micro machined Inductors.
Chapter 13– Reconfigurable MEMS Networks, Filters, Antennas, and Subsystem.
Chapter 14– Phase Noise Analysis of MEMS Circuits, Phase Shifters, and Oscillators.
Chapter 15– Future Work in RF MEMS.
Appendix A: Detailed Analysis and Measurements of Intermodulation Distortion and Power Handling in RF MEMS Switches, Varactors, and Tunable Filters.
Appendix B: Mechanical, Electrical, and Thermal Properties of RF MEMS Materials.