RF MEMS and their Applications sets out to address an increasing need for information by providing a vital overview of this emerging field.
∗ Presents an accessible review of MEMS devices and fabrication techniques.
∗ Discusses the development of RF MEMS switches and the attempts to reduce their actuation voltage.
∗ Outlines the design and development of RF MEMS based inductors, capacitors, filters and phase shifters.
∗ Covers the technology behind micromachined antennas.
∗ Describes integration and packaging techniques for RF MEMS devices.
Offering readers a guide to the development of RF MEMS components and systems, this unique reference will appeal to RF and microwave engineers and MEMS experts alike. Graduate students and researchers in the telecommunications and microelectronics field will profit from the detailed overview of current microfabrication techniques. Materials technologists and physicists working in industrial and academic research & development will also find this a valuable reference.
Microelectromechanical Systems (MEMS) and Radio Frequency MEMS.
MEMS Materials and Fabrication Techniques.
RF MEMS Switches and Micro Relays.
MEMS Inductors and Capacitors.
Micromachined RF Filters.
Micromachined Phase Shifters.
Micromachined Transmission Lines and Components.
Integration and Packaging for RF MEMS Devices.