Anisotrophy and the Micromachining of SiliconA. Campbell, et al.
Etch StopsS. Collins
Photonic Integrated Circuits, Technology and ConceptsR. Matz
Monolithically Integrated Sensors for Mechanical Quantities in Standard CMOS ProcessingH. Offereins, et al.
Silicon on InsulatorsC. Harendt and G. Roos
Integrated Sensors and ActuatorsN. Najaft
Smart SensorsN. Najaft and J. Moyne
Anodic Oxidation of Silicon as a Low–Temperature Passivation TechniqueG. Mende
Micromachined Optoelectronic Structures and DevicesP. Deimel
Wet and Dry Etching: A Comparison in the Context of Solid State Electronics ApplicationsK. Bachmann