Nanoscale Calibration Standards and Methods. Dimensional and Related Measurements in the Micro and Nanometer Range

  • ID: 2180190
  • Book
  • 541 Pages
  • John Wiley and Sons Ltd
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The quantitative determination of the properties of micro– and nanostructures is essential in research and development. Here, peer–reviewed papers are presented with contributions for the NanoScale 2004 seminar at the Physikalisch–Technische Bundesanstalt (PTB), Braunschweig, Germany, in March 2004. Topics include problems of quantitative measurement as well as methods of calibration, correction and instrumentation. The seminar stimulates the exchange of information between users in science and industry and manufacturers of the relevant hard– and software.
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1 INSTRUMENTATION

– Long–range Scanning Probe Microscopes

– Development of SPM and Sensors

2 CALIBRATION

– Standards for Nanometrology

– Tip shape

– Optical Methods

3 APPLICATION

– Lateral Structures

– Surfaces

– Material Properties
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"...this book is an important contribution to the field of dimensional calibration procedures in nanotechnology."

ChemPhysChem

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