Metal Based Thin Films for Electronics. 2nd, Revised and Enlarged Edition

  • ID: 2183448
  • Book
  • 424 Pages
  • John Wiley and Sons Ltd
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This up–to–date handbook covers the main topics of preparation, characterization and properties of complex metal–based layer systems. The authors discuss advanced methods for structure, chemical and electronic state characterization with reference to the properties of thin functional layers, such as metallization and barrier layers for microelectronics, magnetoresistive layers for GMR and TMR, sensor and resistance layers.

This second edition is completely revised and updated and complemented by a chapter on photovoltaic.

"Through its focus on practical aspects and its didactic approach, the book is designed especially for practitioners. It can be highly recommended to materials engineers, physicists or process engineers who work or plan to work in the still exciting field of micro electronics."

Vakuum in Forschung und Praxis

A perfect introduction to the field – for professionals and students."

Angewandte Chemie 11/2004

Klaus Wetzig is Director of the Leibniz Institute of Solid State and Materials Research, Dresden. His research interests include materials analysis and microstructures, especially electron microscopy of functional materials, characterization of thin films for electronics, and nanostructural features in general.

Claus Michael Schneider is Director at the Institute of Solid State Research of the Research Center Jülich (IFF–IEE). His research interests include solid state physics, thin film systems and surface magnetism as well as the physics of nanostructures.

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Preface XI

List of Contributors XIII

1 Introduction 1Klaus Wetzig, Claus M. Schneider

1.1 Prologue 1

1.2 Organization, Aim and Content of This Book 2

2 Thin Film Systems: Basic Aspects 7

2.1 Interconnects for Microelectronics 7Ralph Spolenak, Ehrenfried Zschech

2.2 Metallization Structures in Acoustoelectronics 28Manfred Weihnacht

2.3 Silicide Layers for Electronics 48Joachim Schumann

2.4 Complex Layered Systems for Magnetoelectronics 71Claus M. Schneider

2.5 Multilayer and Single–Surface Reflectors for X–Ray Optics 103Hermann Mai, Stefan Braun

2.6 Metallic Layers for Photovoltaics 122Winfried Blau

2.7 References 129

3 Thin Film Preparation and Characterization Techniques 141

3.1 Thin Film Preparation Methods 141Christian Wenzel

3.2 Electron Microscopy and Diffraction 160Klaus Wetzig, Jürgen Thomas

3.3 X–Ray Scattering Techniques 179Michael Hecker

3.4 Spectroscopic Techniques 197Klaus Wetzig

3.5 Stress Measurement Techniques 214Winfried Brückner

3.6 References 225

4 Challenges for Thin Film Systems Characterization and Optimization 231

4.1 Electromigration in Metallization Layers 231Ralph Spolenak, Horst Wendrdock, Klaus Wetzig

4.2 Barrier and Nucleation Layers for Interconnects 248Ehrenfried Zschech

4.3 Acoustomigration in Surface Acoustic Waves Structures 261Siegfried Menzel, Klaus Wetzig

4.4 Thermal Stability of Magnetoresistive Layer Stacks 283Claus M. Schneider, Jürgen Thomas

4.5 Functional Magnetic Layers for Sensors and MRAMs 295Hartmut Vinzelberg, Dieter Elefant

4.6 Multilayers for X–Ray Optical Purposes 309Hermann Mai, Stefan Braun

4.7 Functional Electric Layers 323Joachim Schumann, Jürgen Thomas

4.8 References 340

5 Devices 349

5.1 Device Related Aspects for Si–Based Electronics 349
Ehrenfried Zschech

5.2 SAW High Frequency Filters, Resonators and Delay Lines 353
Manfred Weihnacht

5.3 Sensor Devices 362
Christoph Treutler

5.4 X–Ray Optical Systems 373
Hermann Mai, Stefan Braun

5.5 Thermoelectric Sensors and Transducers 383
Joachim Schumann

5.6 References 394

6 Outlook 399Klaus Wetzig, Claus M. Schneider

6.1 New Functionalities 399

6.2 Materials–Related Aspects 400

6.3 Microelectronics Quo Vadis? 401

6.4 What You See is What You Get 402

6.5 References 403

Index 405

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Klaus Wetzig
Claus M. Schneider
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