processing. An insider′s view of industrial MEMS commercialization is followed by chapters on capacitive interfaces for MEMS, packaging issues of micro– and nanosystems, MEMS contributions to high frequency integrated resonators and filters, and the uses of MEMS in mass
data storage and electrochemical imaging by means of scanning micro– and nanoprobes.
The second section on nanodevices first tackles the emerging topic of nanofluidics with a contribution each on simulation tools and on devices and uses, followed by another two on nanosensors featuring CNT sensors and CMOS–based DNA sensor arrays, respectively.
Trends in MEMS Commercialization
Capacitive Interfaces for MEMS
Packaging of Advanced Micro– and Nanosystems
High–frequency Integrated Microelectromechanical Resonators and Filters
MEMS in Mass Storage Systems
Scanning Micro– and Nanoprobes for Electrochemical Imaging
Nanofluidic Modeling and Simulation
Structures and Devices
Carbon Nanotubes and Sensors
CMOS–based DNA Sensor Arrays