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Enabling Technology for MEMS and Nanodevices. Advanced Micro and Nanosystems. Edition No. 1

  • ID: 2396613
  • Book
  • April 2013
  • 439 Pages
  • John Wiley and Sons Ltd
Microstructures, electronics, nanotechnology - these vast fields of research are growing together as the size gap narrows and many different materials are combined. Current research, engineering sucesses and newly commercialized products hint at the immense innovative potentials and future applications that open up once mankind controls shape and function from the atomic level right up to the visible world without any gaps.

Sensor systems, microreactors, nanostructures, nanomachines, functional surfaces, integrated optics, displays, communications technology, biochips, human/machine interfaces, prosthetics, miniaturized medical and surgery equipment and many more opportunities are being explored.

This new series, Advanced Micro & Nanosystems, provides cutting-edge reviews from top authors on technologies, devices and advanced systems from the micro and nano worlds.
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M3: the Third Dimension of Silicon
Trends in MEMS Commercialization
Capacitive Interfaces for MEMS
Packaging of Advanced Micro- and Nanosystems
High-frequency Integrated Microelectromechanical Resonators and Filters
MEMS in Mass Storage Systems
Scanning Micro- and Nanoprobes for Electrochemical Imaging
Nanofluidic Modeling and Simulation
Nanofluidics -
Structures and Devices
Carbon Nanotubes and Sensors
CMOS-based DNA Sensor Arrays
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Henry Baltes ETH Zurich, Zurich, Switzerland.

Oliver Brand Georgia Institute of Technology, Atlanta, USA.

Gary K. Fedder Carnegie Mellon University, Pittsburgh, USA.

Christofer Hierold ETH Zurich, Zurich, Switzerland.

Jan G. Korvink IMTEK Freiburg, Germany.

Osamu Tabata Kyoto University, Kyoto, Japan.
Note: Product cover images may vary from those shown
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