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Enabling Technology for MEMS and Nanodevices. Advanced Micro and Nanosystems

  • ID: 2396613
  • Book
  • April 2013
  • 439 Pages
  • John Wiley and Sons Ltd
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This edition of ′CMOS–MEMS′ was originally published in the successful series ′Advanced Micro & Nanosystems′. A close look at enabling technologies is taken, the first section on MEMS featuring an introduction to the challenges and benefi ts of three–dimensional silicon

processing. An insider′s view of industrial MEMS commercialization is followed by chapters on capacitive interfaces for MEMS, packaging issues of micro– and nanosystems, MEMS contributions to high frequency integrated resonators and filters, and the uses of MEMS in mass

data storage and electrochemical imaging by means of scanning micro– and nanoprobes.

The second section on nanodevices first tackles the emerging topic of nanofluidics with a contribution each on simulation tools and on devices and uses, followed by another two on nanosensors featuring CNT sensors and CMOS–based DNA sensor arrays, respectively.
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M3: the Third Dimension of Silicon

Trends in MEMS Commercialization

Capacitive Interfaces for MEMS

Packaging of Advanced Micro– and Nanosystems

High–frequency Integrated Microelectromechanical Resonators and Filters

MEMS in Mass Storage Systems

Scanning Micro– and Nanoprobes for Electrochemical Imaging

Nanofluidic Modeling and Simulation

Nanofluidics –

Structures and Devices

Carbon Nanotubes and Sensors

CMOS–based DNA Sensor Arrays
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Henry Baltes
Oliver Brand
Gary K. Fedder
Christofer Hierold
Jan G. Korvink
Osamu Tabata
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