Practical Guide to RF-MEMS

  • ID: 2543143
  • Book
  • 372 Pages
  • John Wiley and Sons Ltd
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Providing researchers and engineers with invaluable practical hints on how to develop novel RF–MEMS device concepts, this book deals with modeling, design, simulation, optimization, fabrication and characterization of MEMS for radiofrequency applications.

To begin with, prototypical RF–MEMS devices, including lumped components and complex networks, are presented as reference examples, and these are then discussed from different perspectives with regard to design, simulation, packaging, testing, and post–fabrication modeling. The text explicitly treats the hard–to–predict interplay between the three–dimensional device structure and its electromagnetic functionality.
Theoretical concepts are introduced when necessary to complement the practical hints given for all RF–MEMS development stages, and simulation results are validated against experimental results.

With its design and simulation examples based on such widely–known software packages as ANSYS and the hardware description language Verilog, this guide will appeal to the practice–oriented R&D reader.

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PREFACE

RF–MEMS APPLICATIONS AND THE STATE OF THE ART

Introduction

A Brief History of MEMS and RF–MEMS from the Perspective of Technology

RF–MEMS Lumped Components

RF–MEMS Complex Networks

Modeling and Simulation of RF–MEMS Devices

Packaging of RF–MEMS

Brief Overview of Exploitation of RF–MEMS in RF Systems

Conclusions

THE BOOK IN BRIEF

Introduction

A Brief Introduction to the FBK RF–MEMS Technology

An RF–MEMS Series Ohmic Switch (Dev A)

RF–MEMS Capacitive Switches/Varactors

Conclusions

DESIGN

Introduction

Design Rules of the Fondazione Bruno Kessler RF–MEMS Technology

Design of an RF–MEMS Series Ohmic Switch (Dev A)

Generation of 3D Models Starting from the 2D Layout

Conclusions

SIMULATION TECHNIQUES (COMMERCIAL TOOLS)

Introduction

Static Coupled Electromechanical Simulation of the RF–MEMS Ohmic Switch (Dev A) in ANSYS Multiphysics

Modal Analysis of the RF–MEMS Capacitive Switch (Dev B2) in ANSYS Multiphysics

Coupled Thermoelectromechanical Simulation of the RF–MEMS Ohmic Switch with Microheaters (Dev C) in ANSYS Multiphysics

RF Simulation (S–parameters) of the RF–MEMS Variable Capacitor (Dev B1) in ANSYS HFSS?

Conclusions

ON–PURPOSE SIMULATION TOOLS

Introduction

MEMS Compact Model Library

A Hybrid RF–MEMS/CMOS VCO

Excerpts of Verilog–A Code Implemented for MEMS Models

Conclusions

PACKAGING AND INTEGRATION

Introduction

A WLP Solution for RF–MEMS Devices and Networks

Encapsulation of RF–MEMS Devices

Fabrication Run of Packaged Test Structures

Electromagnetic Characterization of the Package

Influence of Uncompressed ACA on the RF Performance of Capped MEMS Devices

Conclusions

POSTFABRICATION MODELING AND SIMULATIONS

Introduction

Electromechanical Simulation of an RF–MEMS Varactor (Dev B2) with Compact Models

RF Modeling of an RF–MEMS Varactor (Dev B2) with a Lumped Element Network

Electromechanical Modeling of an RF–MEMS Series Ohmic Switch (Dev A) with Compact Models

Electromagnetic Modeling and Simulation of an RF–MEMS Impedance– Matching Network (Dev E) for a GSM CMOS Power Amplifier

Electromagnetic Simulation of an RF–MEMS Capacitive Switch (Dev B1) in ANSYS HFSS

Electromagnetic Simulation of a MEMS–Based Reconfigurable RF Power Attenuator (Dev D) in ANSYS HFSS

Conclusions

APPENDIX A RIGID PLATE ELECTROMECHANICAL TRANSDUCER (COMPLETE MODEL)

Introduction

Mechanical Model of the Rigid Plate with Four DOFs

Extension of the Mechanical Model of the Rigid Plate to Six DOFs

Contact Model for Rigid Plates with Four and Six DOFs

Electrostatic Model of the Rigid Plate

Electrostatic Model of the Plate with Holes

Electrostatic Model of the Fringing Effect

Viscous Damping Model

Conclusions

APPENDIX B FLEXIBLE STRAIGHT BEAM (COMPLETE MODEL)

Mechanical Model of the Flexible Beam with Two Degrees of Freedom

Mechanical Model of the Flexible Beam with 12 DOFs

Complete Mechanical Model of the Euler Beam with 12 DOFs

ElectrostaticModel of the Euler Beamwith 12 DOFs

Viscous Damping Model

Conclusions

INDEX

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Jacopo Iannacci
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