Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology. Micro and Nano Technologies

  • ID: 3149014
  • Book
  • 296 Pages
  • Elsevier Science and Technology
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Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology is the first book solely dedicated to electrochemical micromachining (EMM). It begins with fundamentals, techniques, processes, and conditions, continuing with in-depth discussions of mechanisms of material removal, including an empirical model on the material removal rate for EMM (supported by experimental validation). The book moves next to construction-related features of EMM setup suitable for industrial micromachining applications, varying types of EMM, and the latest developments in the improvement of EMM setup. Further, it covers power supply, roll of electrolyte, and other major factors influencing EMM processes, and reports research findings concerning the improvement of machining accuracy and efficiency. Finally, the book devotes a chapter to the design and development of micro-tools, one of the most vital components in EMM.
  • Covers the generation of micro features used for advanced engineering of materials for fabrication of MEMS, microsystems and other micro-engineering applications
  • Explores the trend of decreasing size of fabricated devices, reflected in coverage of generation of high-precision nano-features on metal and semiconductors utilizing SPM, STM, and AFM, and nanotechnology aspects of EMM
  • Describes nanofabrication utilizing anodic dissolutions for mass manufacturing by overcoming obstacles utilizing electrochemical microsystem technology (EMST) and electrochemical nanotechnology (ENT)
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1. Introduction

2. Electrochemical Machining: Macro to Micro

3. Principle of Material Removal in EMM

4. Types of EMM

5. Electrochemical Micromachining (EMM) Setup

6. Design and Development of Micro Tools

7. Influencing Factors of EMM

8. Improvement of Machining Accuracy

9. Advantages, Applications and Limitations of EMM

10. Micro-Features Fabrication for MEMS and Other Microengineering Applications

11. Electrochemical Micro System Technology (EMST)

12. Recent Advancements in EMM for Nanofabrication

13. Nano-Features on Metals and Semiconductors for Nanotechnology Applications

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Bhattacharyya, Bijoy
Professor, Production Engineering Department, Jadavpur University, Kolkata, India

Field of Specialization: Non-Traditional Machining Processes, Micro Machining.

Advanced Manufacturing Technology (AMT), Production Management.

Principal Investigator since 1995 for seven multi-year research projects e.g. on Electrochemical Machining (ECM), Electrochemical Discharge Machining (ECDM), and Electrochemical Micromachining (EMM)

Professor, Production Engineering Department, since 2000

Head of the Department, Production Engineering Department, from 2001 to 2003

Coordinator of Quality Improvement Program (QIP), Jadavpur University, since 2002

Coordinator of Center of Advanced Study (CAS) Phase II-IV Programs consisting thrust areas: Micromachining and Nanotechnology, Micromanufacturing, sponsored by UGC, since 2003

Achieved several Certificates of Merit and Certificates of Achievement Institution Award & Gold Medal by The Institution of Engineers (India) for a research paper Keynote speaker, chair person, presenter and organizer/coordinator of several international conferences.

Visited several countries such as England, Dublin, Taiwan, Hongkong, Thailand etc. for research and academic purposes.

Board member and Fellow of several academic bodies in several institutions

Guest editor of International journals and editor of conference proceedings

Supervised several Ph.D thesis and filed several patents in his credit.

Authored and co-authored around 353+ articles

Author of 83 articles with 1352 total citations by 959 documents as listed in Scopus

H-Index of 24 per SCOPUS

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