The text covers the existing knowledge on all aspects of vacuum science and technology, ranging from fundamentals to components and operating systems. It features many numerical examples and illustrations to help visualize the theoretical issues, while the chapters are carefully cross–linked and coherent symbols and notations are used throughout the book. The whole is rounded off by a user–friendly appendix of conversion tables, mathematical tools, material related data, overviews of processes and techniques, equipment–related data, national and international standards, guidelines, and much more.
As a result, engineers, technicians, and scientists will be able to develop and work successfully with the equipment and environment found in a vacuum.
Applications and Scope of Vacuum Technology
Gas Laws and Kinetic Theory of Gases
Analytical and Numerical Calculations of Rarefied Gas Flows
Sorption and Diffusion
Positive Displacement Pumps
Jet and Diffusion Pumps
Molecular and Turbomolecular Pumps
Cryotechnology and Cryopumps
Total Pressure Vacuum Gauges
Partial Pressure Vacuum Gauges and Leak Detectors
Calibrations and Standards
Vacuum Components, Seals and Joints
Operating Vacuum Systems
Methods of Leak Detection