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Smart Sensors and MEMs, Second Edition

  • ID: 3744432
  • Book
  • June 2016
  • Region: Global
  • 560 Pages
  • Elsevier Science and Technology
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Smart sensors and MEMS can include a variety of devices and systems that have a high level of functionality. They do this either by integrating multiple sensing and actuating modes into one device, or else by integrating sensing and actuating with information processing, analog-to-digital conversion and memory functions.

Part one outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, and advanced optical incremental sensors (encoders and interferometers), among other topics. The second part of the book describes the industrial applications of smart micro-electro-mechanical systems (MEMS). Some of the topics covered in this section include microfabrication technologies used for creating smart devices for industrial applications, microactuators, dynamic behaviour of smart MEMS in industrial applications, MEMS integrating motion and displacement sensors, MEMS print heads for industrial printing, Photovoltaic and fuel cells in power MEMS for smart energy management, and radio frequency (RF)-MEMS for smart communication microsystems.

Smart sensors and MEMS is invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry, and engineers looking for industrial sensing, monitoring and automation solutions.

- Outlines industrial applications for smart sensors and smart MEMS
- Covers smart sensors including capacitive, inductive, resistive and magnetic sensors and sensors to detect radiation and measure temperature
- Covers smart MEMS including power MEMS, radio frequency MEMS, optical MEMS, inertial MEMS, and microreaction chambers
Note: Product cover images may vary from those shown
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Part 1 Smart sensors for industrial applications: What makes sensor devices and microsystems 'intelligent' or 'smart'? Direct interface circuits for sensors
Capacitive sensors for displacement measurement in the sub-nanometer range
Integrated inductive displacement sensors for harsh industrial environments
Advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range
Integrated polarization analyzing CMOS image sensors for detection and signal processing
Advanced interfaces for resistive sensors
Reconfigurable ultrasonic smart sensor platform for nondestructive evaluation and imaging applications
Advanced optical incremental sensors: encoders and interferometers. Part 2 Smart micro-electro-mechanical systems (MEMS) for industrial applications: Microfabrication technologies used for creating smart devices for industrial applications
Microactuators: Design and technology
Dynamic behavior of smart MEMS in industrial applications
MEMS integrating motion and displacement sensors
MEMS print heads for industrial printing
Photovoltaic and fuel cells in power MEMS for smart energy management
Radio frequency (RF)-MEMS for smart communication microsystems
Smart acoustic sensor array (SASA) system for real-time sound processing applications.
Note: Product cover images may vary from those shown
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Nihtianov, S
Dr Stoyan Nihtianov is an Associate Professor at the Delft University of Technology, The Netherlands.
Luque, A.
Dr Antonio Luque is an Associate Professor at the University of Seville, Spain.
Note: Product cover images may vary from those shown
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