Thin Films Structure and Morphology: Volume 441. MRS Proceedings

  • ID: 4425225
  • Book
  • 793 Pages
  • Cambridge University Press
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An interdisciplinary group of materials scientists, physicists, chemists and engineers come together in this book to discuss recent advances in the structure and morphology of thin films. Both scientific and technological issues are addressed. Work on thin films for a host of applications including microelectronics, optics, tribology, biomedical technologies and microelectromechanical systems (MEMS) are featured. Topics include: kinetics of growth; grain growth; instabilities, segregation and ordering; silicides; metallization; stresses in thin films; deposition and growth simulations; energetic growth processes; diamond films and carbide and nitride films.
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Robert C. Cammarata
Eric H. Chason
Theodore L. Einstein University of Maryland, College Park.

Ellen D. Williams University of Maryland, College Park.

Daryush Lla
Steven C. Moss
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