Semiconductor Process Control Equipment Market Report 2026

The semiconductor process control equipment market size has grown strongly in recent years. It will grow from $8.29 billion in 2025 to $8.82 billion in 2026 at a compound annual growth rate (CAGR) of 6.4%. The growth in the historic period can be attributed to growing semiconductor device complexity, rise in foundry expansion activities, increasing demand for defect detection accuracy, scaling of transistor nodes below 10nm, growing adoption of optical inspection systems.

The semiconductor process control equipment market size is expected to see strong growth in the next few years. It will grow to $11.37 billion in 2030 at a compound annual growth rate (CAGR) of 6.5%. The growth in the forecast period can be attributed to expansion of AI and ml-based analytics in fabs, rising deployment of digital twin in semiconductor manufacturing, demand for advanced e-beam inspection technologies, increasing investment in 3d/advanced packaging, accelerated shift toward autonomous process control systems. Major trends in the forecast period include ai-driven semiconductor process optimization, industry 4.0-enabled process automation, cloud-based analytics for yield enhancement, iot-integrated real-time monitoring, robotics-assisted wafer handling & inspection.

The increasing demand for consumer electronics is expected to accelerate the growth of the semiconductor process control equipment market. Consumer electronics refer to personal-use electronic devices, such as smartphones, laptops, and home appliances. The rise in consumer electronics is driven by innovations in digital technology, such as AI integration and 5G connectivity, which enhance device performance, efficiency, and user experience. Semiconductor process control equipment is essential for ensuring the accuracy and high quality of semiconductor chips, which are critical components in devices such as smartphones, laptops, and televisions. For example, in May 2023, the Japan Electronics and Information Technology Industries Association, a Japan-based trade organization, reported that Japan's electronic equipment production reached 771.45 billion yen (approximately USD 5.6 billion). The output of consumer electronics increased to 32.09 billion yen (around USD 233 million), up from 25.26 billion yen (about USD 183 million) in May 2022. This growing demand for consumer electronics is fueling the expansion of the semiconductor process control equipment market.

Leading companies in the semiconductor process control equipment market are focusing on developing advanced solutions, such as AI-driven process control platforms, to enhance the precision, efficiency, and scalability of semiconductor manufacturing. AI-driven process control platforms are advanced software systems that use artificial intelligence (AI) and machine learning (ML) algorithms to monitor, analyze, and optimize manufacturing processes in real time. For example, in September 2023, Synopsys, Inc., a U.S.-based electronic design automation company, introduced Fab.da, an AI-driven process control solution designed to optimize semiconductor manufacturing. Fab.da integrates data from various sources, such as wafer, equipment, and yield data, into a unified platform, enabling advanced analytics and real-time decision-making. It uses AI and machine learning to enhance chip yield, reduce production costs, and accelerate time-to-market. The platform can be deployed on-premises or in the cloud and includes features such as fault detection, root cause analysis, and predictive analytics to streamline high-volume manufacturing processes.

In January 2025, Cohu Inc., a U.S.-based supplier of semiconductor test handlers and contactors, acquired Tignis, Inc., for an undisclosed amount. This acquisition aims to strengthen Cohu's analytics capabilities in the semiconductor process control market by integrating Tignis’s AI-driven solutions and enhancing its DI-Core software with advanced predictive and prescriptive automation. This integration will help improve manufacturing yield, quality, and productivity. Tignis Inc. specializes in AI-powered process control and monitoring, utilizing a physics and engineering foundation for its solutions.

Major companies operating in the semiconductor process control equipment market are Thermo Fisher Scientific Inc., Applied Materials Inc., ASML Holding NV, Toray Engineering Co Ltd, Lam Research Corporation, Tokyo Electron Limited, KLA Corporation, Hitachi High-Tech Corporation, Nikon Corporation, Advantest Corporation, Carl Zeiss AG, JEOL Ltd, Onto Innovation Inc., Lasertec Corporation, Veeco Instruments Inc., Nova Measuring Instruments, Camtek Ltd, Nanometrics Inc., SCREEN Semiconductor Solutions, Rudolph Technologies Inc.

Note that the outlook for this market is being affected by rapid changes in trade relations and tariffs globally. The report will be updated prior to delivery to reflect the latest status, including revised forecasts and quantified impact analysis. The report’s Recommendations and Conclusions sections will be updated to give strategies for entities dealing with the fast-moving international environment.

Tariffs are increasing costs across the semiconductor process control equipment market by disrupting global supply chains for precision components, optical systems, and advanced metrology tools. These impacts are most significant in segments such as inspection equipment, metrology equipment, and advanced process control systems, particularly affecting manufacturing-centric regions like China, Taiwan, and Southeast Asia. While tariffs elevate procurement costs and lead times, they also encourage localized manufacturing and stimulate investment in domestic semiconductor ecosystems, creating limited positive outcomes for regional capacity building.

The semiconductor process control equipment market research report is one of a series of new reports that provides semiconductor process control equipment market statistics, including semiconductor process control equipment industry global market size, regional shares, competitors with a semiconductor process control equipment market share, detailed semiconductor process control equipment market segments, market trends and opportunities, and any further data you may need to thrive in the semiconductor process control equipment industry. The semiconductor process control equipment market research report delivers a complete perspective of everything you need, with an in-depth analysis of the current and future scenario of the industry.

Semiconductor process control equipment refers to specialized tools and systems utilized in semiconductor manufacturing to monitor, measure, and regulate various aspects of the production process. These devices ensure high precision, quality, and yield by identifying defects, verifying critical dimensions, and maintaining process consistency.

The primary products in semiconductor process control equipment include inspection equipment, metrology equipment, and process control equipment. Inspection equipment is designed to detect and analyze defects or irregularities on semiconductor wafers during manufacturing. It incorporates technologies such as optical and e-beam, among others, and supports applications such as integrated defect management systems (IDMS), foundries, and memory manufacturers. This equipment caters to a wide range of end users across industries including consumer electronics, automotive, industrial, healthcare, and more.Asia-Pacific was the largest region in the semiconductor process control equipment market in 2025. The regions covered in the semiconductor process control equipment market report are Asia-Pacific, South East Asia, Western Europe, Eastern Europe, North America, South America, Middle East, Africa. The countries covered in the semiconductor process control equipment market report are Australia, Brazil, China, France, Germany, India, Indonesia, Japan, Taiwan, Russia, South Korea, UK, USA, Canada, Italy, Spain.

The semiconductor process control equipment market consists of sales defect review systems, overlay control systems, critical dimension (CD) measurement tools, in-situ process monitoring sensors, and yield management software. Values in this market are ‘factory gate’ values, that is, the value of goods sold by the manufacturers or creators of the goods, whether to other entities (including downstream manufacturers, wholesalers, distributors, and retailers) or directly to end customers. The value of goods in this market includes related services sold by the creators of the goods.

The market value is defined as the revenues that enterprises gain from the sale of goods and/or services within the specified market and geography through sales, grants, or donations in terms of the currency (in USD unless otherwise specified).

The revenues for a specified geography are consumption values that are revenues generated by organizations in the specified geography within the market, irrespective of where they are produced. It does not include revenues from resales along the supply chain, either further along the supply chain or as part of other products.

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