Describes state–of–the–art resonant transistors, including a review of their potential applications
This book explains the design, analysis and application of hybrid Microelectromechanical systems (MEMS) and Complementary Metal Oxide Semiconductor (CMOS) resonator devices; currently a hot topic in the semiconductor industry. It also presents the technology, design and modelling of state–of–the–art resonant transistors and their applications as a micromechanical resonator with internal gain, with a particular focus on time and frequency reference applications.
- Includes state–of–the–art reviews and selected lists of references in each chapter.
- Provides descriptions of basic physics for Field–effect Transistor (FET) based motion detection.
- Reports existing technology solutions to implement movable FETs for in–plane and out–of–plane motion detection.
- Highlights the main differences with the existing solid–state technology and provides engineering solutions for fast and successful implementation.
- Discusses the potential of the technology compared to other known transduction principles.
This book explains the design, analysis and application of hybrid Microelectromechanical systems (MEMS) and Complementary Metal Oxide Semiconductor (CMOS) resonator devices; currently a hot topic in the semiconductor industry. It also presents the technology, design and modelling of state–of–the–art resonant transistors and their applications as a micromechanical resonator with internal gain, with a particular focus on time and frequency reference applications.
- Includes state–of–the–art reviews and selected lists of references in each chapter.
- Provides descriptions of basic physics for Field–effect Transistor (FET) based motion detection.
- Reports existing technology solutions to implement movable FETs for in–plane and out–of–plane motion detection.
- Highlights the main differences with the existing solid–state technology and provides engineering solutions for fast and successful implementation.
- Discusses the potential of the technology compared to other known transduction principles.
