Semiconductor Etch Equipment Market Report 2026

The semiconductor etch equipment market size has grown strongly in recent years. It will grow from $24.37 billion in 2025 to $25.93 billion in 2026 at a compound annual growth rate (CAGR) of 6.4%. The growth in the historic period can be attributed to growth in global semiconductor fabrication, advancements in plasma etching technologies, rising demand for integrated circuits, expansion of wet and dry etching capabilities, early adoption of mems manufacturing processes.

The semiconductor etch equipment market size is expected to see strong growth in the next few years. It will grow to $33.64 billion in 2030 at a compound annual growth rate (CAGR) of 6.7%. The growth in the forecast period can be attributed to increasing production of advanced logic and memory chips, rising investments in semiconductor fabs, growing need for nanoscale patterning technologies, expansion of power electronics manufacturing, rising demand for high throughput etching systems. Major trends in the forecast period include increasing demand for advanced lithography and etching precision, growing use of high density plasma etching for complex semiconductor nodes, rising production of mems and sensor devices requiring specialized etching, expansion of semiconductor foundries and power device manufacturing, shift toward dry etching technologies for higher accuracy and uniformity.

The increasing demand for semiconductor devices is expected to drive the growth of the semiconductor etch equipment market going forward. Semiconductor devices are electronic components made from semiconductor materials that rely on the material’s electrical properties to function. Semiconductor etch equipment enables the precise fabrication of intricate patterns and structures on semiconductor substrates. As semiconductor devices become more advanced and feature sizes continue to shrink, high-performance etching equipment is essential for achieving the precision and control required in modern manufacturing processes. For example, according to the Semiconductor Industry Association, a U.S.-based semiconductor industry organization, global semiconductor sales reached $208.4 billion in the third quarter of 2025, an increase of 15.8% from Q2. Therefore, the rising demand for semiconductor devices is fueling the expansion of the semiconductor etch equipment market.

Major companies in the semiconductor etch equipment market are focusing on developing innovative technologies, such as mass production-proven bevel technology, to support advanced wafer manufacturing. Mass production-proven bevel technology involves precisely shaping and profiling the edges of semiconductor wafers during fabrication. For instance, in June 2023, Lam Research Semiconductor, a U.S.-based semiconductor company, launched Coronus DX, a bevel deposition solution designed to address manufacturing challenges in next-generation logic, 3D NAND, and advanced packaging applications. This protective layer helps prevent defects and damage, increasing yield and enabling chipmakers to adopt new leading-edge 3D NAND and packaging processes. Coronus DX features best-in-class precision wafer centering and process control, including integrated metrology, ensuring consistency and repeatability in semiconductor manufacturing.

In September 2023, Plasma-Therm, a U.S.-based manufacturer of advanced plasma-processing equipment, acquired Thin Film Equipment Srl for an undisclosed amount. This acquisition strengthens Plasma-Therm’s presence in Europe and expands its portfolio in the power device market by incorporating TFE’s range of PVD tools used for MEMS, power, RFID, and other semiconductor applications. Thin Film Equipment Srl is an Italy-based manufacturer of semiconductor etch equipment.

Major companies operating in the semiconductor etch equipment market are Panasonic Corporation, Lam Research Corporation, Tokyo Electron Limited (TEL), KLA Corporation, Hitachi High-Tech Corporation, Nikon Corporation, Nordson Corporation, SEMES Co. Ltd., Advanced Dicing Technologies (ADT), Axcelis Technologies, Veeco Instruments, Shibaura Mechatronics Corporation, Oxford Instruments, EV Group (EVG), Mattson Technology, Canon Anelva Corporation, SPTS Technologies, Advanced Micro-Fabrication Equipment Inc., Nova Measuring Instruments, ULVAC Technologies Inc., Plasma-Therm LLC, SAMCO Inc., Tegal Corporation, Plasma Systems Inc.

Note that the outlook for this market is being affected by rapid changes in trade relations and tariffs globally. The report will be updated prior to delivery to reflect the latest status, including revised forecasts and quantified impact analysis. The report’s Recommendations and Conclusions sections will be updated to give strategies for entities dealing with the fast-moving international environment.

Tariffs on semiconductor manufacturing equipment components, precision electronics, and specialty gases have increased costs for semiconductor etch equipment manufacturers, leading to higher capital expenditures for foundries and fabs in regions such as North America and Europe. These tariffs slow equipment upgrades and delay process node advancements, especially for high density etch systems. However, tariffs also encourage domestic fabrication investment, promote regional supply chain independence, and drive innovation in local etch technology capabilities.

The semiconductor etch equipment market research report is one of a series of new reports that provides semiconductor etch equipment market statistics, including semiconductor etch equipment industry global market size, regional shares, competitors with a semiconductor etch equipment market share, detailed semiconductor etch equipment market segments, market trends and opportunities, and any further data you may need to thrive in the semiconductor etch equipment industry. This semiconductor etch equipment market research report delivers a complete perspective of everything you need, with an in-depth analysis of the current and future scenario of the industry.

Semiconductor etch equipment encompasses devices utilized within the semiconductor industry to selectively remove materials from the surface of semiconductors, facilitating the creation of intricate patterns and structures. These devices are integral to the semiconductor device fabrication process, enabling the production of complex patterns and structures on semiconductor surfaces.

The primary products in semiconductor etch equipment include high-density etch equipment and low-density etch equipment. High-density etch equipment refers to specialized semiconductor etching machinery engineered to achieve heightened precision and efficiency in the etching process. The etching film comprises conductor etching, dielectric etching, and polysilicon etching, catering to applications in foundries, micro-electromechanical systems (MEMS), sensors, and power devices.Asia-Pacific was the largest region in the semiconductor etch equipment market in 2025. Asia-Pacific is expected to be the fastest-growing region in the forecast period. The regions covered in the semiconductor etch equipment market report are Asia-Pacific, South East Asia, Western Europe, Eastern Europe, North America, South America, Middle East, Africa. The countries covered in the semiconductor etch equipment market report are Australia, Brazil, China, France, Germany, India, Indonesia, Japan, Taiwan, Russia, South Korea, UK, USA, Canada, Italy, Spain.

The semiconductor etch equipment market includes revenues earned by entities by providing services such as installation and setup, maintenance and repair, training and support, and process optimization. The market value includes the value of related goods sold by the service provider or included within the service offering. Only goods and services traded between entities or sold to end consumers are included. The semiconductor etch equipment market also includes sales of plasma etching equipment, dry etch equipment, wet etch equipment, and mask etchers. Values in this market are ‘factory gate’ values, that is the value of goods sold by the manufacturers or creators of the goods, whether to other entities (including downstream manufacturers, wholesalers, distributors and retailers) or directly to end customers. The value of goods in this market includes related services sold by the creators of the goods.

The market value is defined as the revenues that enterprises gain from the sale of goods and/or services within the specified market and geography through sales, grants, or donations in terms of the currency (in USD unless otherwise specified).

The revenues for a specified geography are consumption values that are revenues generated by organizations in the specified geography within the market, irrespective of where they are produced. It does not include revenues from resales along the supply chain, either further along the supply chain or as part of other products.

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