Dry vacuum pumps are advanced industrial devices designed to create vacuum conditions without the use of oil or lubricants, ensuring clean, efficient, and environmentally sustainable operations. These pumps are critical in industries requiring high-purity, contamination-free environments, such as semiconductor manufacturing, flat panel displays (FPDs), light-emitting diodes (LEDs), and solar energy production. The dry vacuum pump industry is characterized by its emphasis on energy efficiency, reduced environmental impact, and high-performance solutions tailored to advanced manufacturing processes. Key trends include the adoption of oil-free technologies, integration of IoT-enabled sensors for predictive maintenance, and the development of compact, high-capacity pumps to support next-generation applications. The market is driven by the rapid growth of the semiconductor industry, increasing demand for renewable energy solutions, and stringent regulations promoting sustainable industrial practices. Innovations in pump design, such as air-cooled systems and modular configurations, are further shaping the industry’s trajectory, enabling manufacturers to meet the evolving needs of high-tech sectors.
Atlas Copco, based in Stockholm, Sweden, specializes in oil-free vacuum pumps for FPDs and LEDs, integrating smart sensors to enhance operational efficiency and predictive maintenance.
Osaka Vacuum, located in Osaka, Japan, produces high-performance dry vacuum pumps for semiconductor manufacturing, focusing on precision and reliability in cleanroom environments.
Leybold, headquartered in Cologne, Germany, provides vacuum solutions for solar and semiconductor industries, emphasizing sustainable innovations and modular pump designs.
ULVAC, based in Chigasaki, Japan, offers dry vacuum pumps for FPD and LED applications, known for its compact and high-capacity systems.
Pfeiffer Vacuum, headquartered in Asslar, Germany, specializes in vacuum technologies for high-tech industries, focusing on energy-efficient and durable pump solutions.
LOT Vacuum Co. Ltd., based in Osan, South Korea, provides vacuum pumps for semiconductor and solar applications, emphasizing scalability and cost-effective production.
KASHIYAMA, headquartered in Tokyo, Japan, produces dry vacuum pumps for electronics manufacturing, focusing on high-purity and low-maintenance designs.
HANBELL, based in Taoyuan, Taiwan, offers vacuum pumps for industrial applications, known for its robust and efficient systems.
SKY Technology Development Co. Ltd., based in Shenyang, China, provides vacuum solutions for solar and semiconductor sectors, focusing on cost-competitive innovations.
This product will be delivered within 1-3 business days.
Market Size and Growth Forecast
The global Dry Vacuum Pump market was valued at USD 1.9-3.6 billion in 2024, with an estimated CAGR of 5.5%-7.5% from 2025 to 2030, driven by rising demand in semiconductor and solar applications.Regional Analysis
North America is projected to grow at a CAGR of 5.2%-7.2%, with the U.S. leading due to its dominant semiconductor and electronics industries. The region is focusing on adopting energy-efficient vacuum systems to meet stringent environmental standards and support advanced manufacturing.- Europe is expected to achieve a CAGR of 5.0%-7.0%, with Germany and the Netherlands driving demand. These countries emphasize sustainable manufacturing practices, particularly in FPD and LED production, with a shift toward eco-friendly vacuum technologies.
- Rest of the World, particularly Brazil and India, is expected to grow at 4.8%-6.8%. These regions are seeing increased adoption of dry vacuum pumps in solar energy applications, supported by investments in renewable energy infrastructure.
Application Analysis
Semiconductor applications are estimated to grow at a CAGR of 6.0%-8.0%, driven by the need for ultra-clean vacuum environments in wafer fabrication and chip production. Trends include the adoption of high-capacity pumps to support advanced nodes in semiconductor manufacturing, such as 3nm and 2nm processes.- FPD applications are projected to expand at 5.8%-7.8%, supported by demand for large-scale displays in consumer electronics, particularly OLED and LCD screens. Innovations in high-throughput vacuum systems are enhancing production efficiency.
- LED applications are expected to grow at 5.5%-7.5%, driven by the increasing use of energy-efficient lighting solutions. Trends include the development of compact pumps to support high-volume LED manufacturing.
- Solar applications are anticipated to rise at 5.7%-7.7%, fueled by the global push for photovoltaic cell production. Trends emphasize sustainable vacuum technologies to reduce energy consumption in solar panel manufacturing.
Key Market Players
EBARA, headquartered in Tokyo, Japan, is a global leader in dry vacuum pump manufacturing, offering solutions tailored for semiconductor and solar applications. The company is renowned for its energy-efficient designs and advanced vacuum technologies.Atlas Copco, based in Stockholm, Sweden, specializes in oil-free vacuum pumps for FPDs and LEDs, integrating smart sensors to enhance operational efficiency and predictive maintenance.
Osaka Vacuum, located in Osaka, Japan, produces high-performance dry vacuum pumps for semiconductor manufacturing, focusing on precision and reliability in cleanroom environments.
Leybold, headquartered in Cologne, Germany, provides vacuum solutions for solar and semiconductor industries, emphasizing sustainable innovations and modular pump designs.
ULVAC, based in Chigasaki, Japan, offers dry vacuum pumps for FPD and LED applications, known for its compact and high-capacity systems.
Pfeiffer Vacuum, headquartered in Asslar, Germany, specializes in vacuum technologies for high-tech industries, focusing on energy-efficient and durable pump solutions.
LOT Vacuum Co. Ltd., based in Osan, South Korea, provides vacuum pumps for semiconductor and solar applications, emphasizing scalability and cost-effective production.
KASHIYAMA, headquartered in Tokyo, Japan, produces dry vacuum pumps for electronics manufacturing, focusing on high-purity and low-maintenance designs.
HANBELL, based in Taoyuan, Taiwan, offers vacuum pumps for industrial applications, known for its robust and efficient systems.
SKY Technology Development Co. Ltd., based in Shenyang, China, provides vacuum solutions for solar and semiconductor sectors, focusing on cost-competitive innovations.
Porter’s Five Forces Analysis
- The threat of new entrants is moderate; high capital investment and technical expertise required for dry vacuum pump production create significant barriers, though growing demand in high-tech industries attracts niche players.
- The threat of substitutes is low; oil-free dry vacuum pumps are preferred in cleanroom applications due to their contamination-free operation, limiting competition from oil-based or liquid ring pumps.
- Buyer power is moderate; large semiconductor and solar manufacturers negotiate pricing due to high order volumes, but the specialized nature of dry vacuum pumps limits buyer leverage.
- Supplier power is moderate; critical components like precision bearings and advanced electronics face supply constraints, giving suppliers some influence over pricing and availability.
- Competitive rivalry is high; key players differentiate through innovations in energy efficiency, smart technology integration, and application-specific pump designs, intensifying competition.
Market Opportunities and Challenges
Opportunities
- Rising demand for semiconductors in AI, 5G, and IoT applications drives adoption of dry vacuum pumps in wafer fabrication.
- Growth in solar energy production creates opportunities for vacuum pumps in photovoltaic cell manufacturing, supported by global renewable energy initiatives.
- Emerging markets in Asia Pacific, particularly China and India, offer expansion potential due to rapid industrialization and government support for high-tech manufacturing.
Challenges
- High production and R&D costs limit adoption in cost-sensitive markets, particularly in smaller-scale applications.
- Stringent environmental regulations on energy consumption and emissions increase compliance costs for manufacturers.
- Supply chain disruptions for critical components, such as semiconductors and precision parts, impact production scalability and delivery timelines.
Growth Trend Analysis
The Dry Vacuum Pump market is experiencing robust growth, driven by the expansion of high-tech industries and the global push for sustainable manufacturing. On October 15, 2024, Flowserve Corporation completed the acquisition of MOGAS Industries, strengthening its portfolio in mission-critical valve technologies that complement vacuum pump applications in industrial settings. On June 24, 2025, PSG acquired ipp Pump Products GmbH, a German manufacturer specializing in sanitary pump technologies, enhancing its offerings in hygienic processing applications that align with cleanroom vacuum requirements. On July 2, 2025, Ingersoll Rand Inc. acquired Termomeccanica Industrial Compressors S.p.A. and Adicomp S.p.A. for €160 million, expanding its industrial pump and compressor portfolio, which supports vacuum pump applications in high-tech industries. On July 8, 2025, Alfa Laval acquired Fives Energy Cryogenics, a leader in cryogenic pump technologies, bolstering its portfolio in energy-efficient solutions that complement dry vacuum pump advancements. On the same day, Busch Vacuum Solutions launched the air-cooled COBRA NC 2500 C dry screw vacuum pump, the world’s largest air-cooled dry vacuum pump, designed for high-capacity applications in semiconductor and solar manufacturing. These developments align with a projected CAGR of 5.5%-7.5% through 2030, underscoring the market’s critical role in supporting advanced manufacturing processes.This product will be delivered within 1-3 business days.
Table of Contents
Chapter 1 Executive SummaryChapter 2 Abbreviation and Acronyms
Chapter 3 Preface
Chapter 4 Market Landscape
Chapter 5 Market Trend Analysis
Chapter 6 Industry Chain Analysis
Chapter 7 Latest Market Dynamics
Chapter 8 Trading Analysis
Chapter 9 Historical and Forecast Dry Vacuum Pump Market in North America (2020-2030)
Chapter 10 Historical and Forecast Dry Vacuum Pump Market in South America (2020-2030)
Chapter 11 Historical and Forecast Dry Vacuum Pump Market in Asia & Pacific (2020-2030)
Chapter 12 Historical and Forecast Dry Vacuum Pump Market in Europe (2020-2030)
Chapter 13 Historical and Forecast Dry Vacuum Pump Market in MEA (2020-2030)
Chapter 14 Summary For Global Dry Vacuum Pump Market (2020-2025)
Chapter 15 Global Dry Vacuum Pump Market Forecast (2025-2030)
Chapter 16 Analysis of Global Key Vendors
Tables and Figures
Companies Mentioned
- EBARA
- Atlas Copco
- Osaka Vacuum
- Leybold
- ULVAC
- Pfeiffer Vacuum
- LOT Vacuum Co. Ltd.
- KASHIYAMA
- HANBELL
- SKY Technology Development Co. Ltd
