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Semiconductor Dry Etch Systems - Global Strategic Business Report

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    Report

  • 78 Pages
  • June 2025
  • Region: Global
  • Global Industry Analysts, Inc
  • ID: 6068567
The global market for Semiconductor Dry Etch Systems was estimated at US$17.3 Billion in 2024 and is projected to reach US$24.3 Billion by 2030, growing at a CAGR of 5.9% from 2024 to 2030. This comprehensive report provides an in-depth analysis of market trends, drivers, and forecasts, helping you make informed business decisions. The report includes the most recent global tariff developments and how they impact the Semiconductor Dry Etch Systems market.

Global Semiconductor Dry Etch Systems Market - Key Trends & Drivers Summarized

Why Are Semiconductor Dry Etch Systems Essential For Advanced Chip Manufacturing?

Semiconductor dry etch systems play a critical role in the fabrication of integrated circuits (ICs) by precisely shaping and patterning semiconductor materials. As chip architectures become more complex and demand for smaller, more powerful processors increases, advanced etching techniques are essential to achieve high-resolution, high-aspect-ratio features on wafers. The proliferation of 5G technology, artificial intelligence (AI), and high-performance computing (HPC) is driving semiconductor manufacturers to adopt dry etch systems capable of delivering extreme precision and uniformity. Additionally, the rise of advanced node technologies (below 5nm) and 3D semiconductor structures, such as FinFETs and gate-all-around (GAA) transistors, is further fueling the need for next-generation dry etching solutions.

What Innovations Are Shaping The Semiconductor Dry Etch Market?

Recent technological advancements in plasma-based and atomic layer etching (ALE) systems are enhancing etching precision and material selectivity, allowing semiconductor manufacturers to create more intricate chip designs. AI-powered process control is optimizing etching uniformity, reducing defects, and improving manufacturing yield. The shift toward EUV (Extreme Ultraviolet) lithography is also necessitating advanced dry etch capabilities for patterning at smaller nodes. Additionally, environmentally sustainable etching processes are emerging to minimize the use of hazardous etching gases and reduce the overall carbon footprint of semiconductor fabrication. These innovations are crucial for the continued evolution of Moore's Law and the production of high-performance semiconductors.

Which Industries Are Driving Demand For Dry Etch Systems?

The semiconductor dry etch market is driven by industries requiring high-performance computing, including consumer electronics, automotive, telecommunications, and data centers. Smartphone manufacturers rely on advanced dry etching processes to create high-density, low-power processors for mobile devices. The automotive industry is increasingly dependent on semiconductor technology for electric vehicles (EVs), advanced driver-assistance systems (ADAS), and in-vehicle infotainment. The expansion of 5G networks and cloud computing infrastructure is also driving demand for semiconductor dry etch technology. Additionally, emerging applications such as quantum computing and neuromorphic chips are fueling innovation in dry etching processes.

What Factors Are Fueling The Growth Of The Semiconductor Dry Etch Systems Market?

The growth of the semiconductor dry etch systems market is being driven by the increasing complexity of chip designs, rising demand for smaller and more efficient processors, and the expansion of AI-driven process optimization in semiconductor manufacturing. Government initiatives to strengthen domestic semiconductor production, particularly in the U.S., China, and the EU, are also boosting investments in advanced etching equipment. The transition to 3D packaging and heterogeneous integration is further propelling the demand for precise dry etching solutions. As semiconductor technology advances toward sub-3nm nodes, the demand for high-precision dry etching systems is expected to rise significantly.

Scope of Study:

The report analyzes the Semiconductor Dry Etch Systems market in terms of units by the following Segments, and Geographic Regions/Countries:
  • Segments: Etching Technique (Reactive Ion Etching, Inductively Coupled Plasma Etching, Deep Reactive Ion Etching); Application (Logic & Memory, MEMS & Sensors, Power Devices); End-Use (Consumer Electronics, Automotive, Telecommunications)
  • Geographic Regions/Countries: World; United States; Canada; Japan; China; Europe (France; Germany; Italy; United Kingdom; and Rest of Europe); Asia-Pacific; Rest of World.

Key Insights:

  • Market Growth: Understand the significant growth trajectory of the Reactive Ion Etching segment, which is expected to reach US$15.2 Billion by 2030 with a CAGR of a 5.6%. The Inductively Coupled Plasma Etching segment is also set to grow at 6.8% CAGR over the analysis period.
  • Regional Analysis: Gain insights into the U.S. market, estimated at $4.5 Billion in 2024, and China, forecasted to grow at an impressive 5.7% CAGR to reach $3.9 Billion by 2030. Discover growth trends in other key regions, including Japan, Canada, Germany, and the Asia-Pacific.

Why You Should Buy This Report:

  • Detailed Market Analysis: Access a thorough analysis of the Global Semiconductor Dry Etch Systems Market, covering all major geographic regions and market segments.
  • Competitive Insights: Get an overview of the competitive landscape, including the market presence of major players across different geographies.
  • Future Trends and Drivers: Understand the key trends and drivers shaping the future of the Global Semiconductor Dry Etch Systems Market.
  • Actionable Insights: Benefit from actionable insights that can help you identify new revenue opportunities and make strategic business decisions.

Key Questions Answered:

  • How is the Global Semiconductor Dry Etch Systems Market expected to evolve by 2030?
  • What are the main drivers and restraints affecting the market?
  • Which market segments will grow the most over the forecast period?
  • How will market shares for different regions and segments change by 2030?
  • Who are the leading players in the market, and what are their prospects?

Report Features:

  • Comprehensive Market Data: Independent analysis of annual sales and market forecasts in US$ Million from 2024 to 2030.
  • In-Depth Regional Analysis: Detailed insights into key markets, including the U.S., China, Japan, Canada, Europe, Asia-Pacific, Latin America, Middle East, and Africa.
  • Company Profiles: Coverage of players such as ACM Research Inc., AGS Plasma Systems, Inc., AMEC (Advanced Micro-Fabrication Equipment Inc. China), Anatech USA, Applied Materials Inc. and more.
  • Complimentary Updates: Receive free report updates for one year to keep you informed of the latest market developments.

Some of the 48 companies featured in this Semiconductor Dry Etch Systems market report include:

  • ACM Research Inc.
  • AGS Plasma Systems, Inc.
  • AMEC (Advanced Micro-Fabrication Equipment Inc. China)
  • Anatech USA
  • Applied Materials Inc.
  • ASM International N.V.
  • ASML Holding N.V.
  • Canon Machinery Inc.
  • Dainippon Screen Group
  • EV Group (EVG)
  • F&K Delvotec Bondtechnik GmbH
  • Ferrotec Holdings Corporation
  • Hesse GmbH
  • Hitachi High-Tech Corporation
  • KLA Corporation
  • Lam Research Corporation
  • Mattson Technology Inc.
  • Meyer Burger Technology AG
  • Naura Technology Group Co., Ltd.
  • Oxford Instruments plc
  • Panasonic Corporation
  • Plasma-Therm LLC
  • SAMCO Inc.
  • Shibaura Mechatronics Corporation
  • SiCarrier
  • SPTS Technologies Ltd.
  • Tokyo Electron Limited
  • TPT Wire Bonder GmbH & Co. KG
  • Trion Technology, Inc.
  • ULVAC Inc.

This edition integrates the latest global trade and economic shifts as of June 2025 into comprehensive market analysis. Key updates include:

  • Tariff and Trade Impact: Insights into global tariff negotiations across 180+ countries, with analysis of supply chain turbulence, sourcing disruptions, and geographic realignment. Special focus on 2025 as a pivotal year for trade tensions, including updated perspectives on the Trump-era tariffs.
  • Adjusted Forecasts and Analytics: Revised global and regional market forecasts through 2030, incorporating tariff effects, economic uncertainty, and structural changes in globalization. Includes segmentation by product, technology, type, material, distribution channel, application, and end-use, with historical analysis since 2015.
  • Strategic Market Dynamics: Evaluation of revised market prospects, regional outlooks, and key economic indicators such as population and urbanization trends.
  • Innovation & Technology Trends: Latest developments in product and process innovation, emerging technologies, and key industry drivers shaping the competitive landscape.
  • Competitive Intelligence: Updated global market share estimates for 2025, competitive positioning of major players (Strong/Active/Niche/Trivial), and refined focus on leading global brands and core players.
  • Expert Insight & Commentary: Strategic analysis from economists, trade experts, and domain specialists to contextualize market shifts and identify emerging opportunities.
  • Complimentary Update: Buyers receive a free July 2025 update with finalized tariff impacts, new trade agreement effects, revised projections, and expanded country-level coverage.

Table of Contents

I. METHODOLOGYII. EXECUTIVE SUMMARY
1. MARKET OVERVIEW
  • Influencer Market Insights
  • Tariff Impact on Global Supply Chain Patterns
  • Semiconductor Dry Etch Systems - Global Key Competitors Percentage Market Share in 2025 (E)
  • Competitive Market Presence - Strong/Active/Niche/Trivial for Players Worldwide in 2025 (E)
2. FOCUS ON SELECT PLAYERS
3. MARKET TRENDS & DRIVERS
  • Increasing Demand for Advanced Semiconductor Devices Drives Growth in Semiconductor Dry Etch Systems
  • Surge in Semiconductor Fabrication for 5G, IoT, and AI Applications Expands Market Opportunities for Dry Etch Systems
  • Technological Advancements in Plasma Etching Techniques Propel Growth in Dry Etch Systems for Precision Semiconductor Manufacturing
  • Rising Demand for Smaller, Faster, and More Energy-Efficient Chips Accelerates the Need for Advanced Dry Etching Solutions
  • Expansion of Advanced Packaging Technologies for Consumer Electronics Drives Adoption of Semiconductor Dry Etch Systems
  • The Growth of Electric Vehicles (EVs) and Automotive Electronics Strengthens the Business Case for Dry Etch Systems
  • Rising Investment in Semiconductor Foundries and Fabrication Plants Expands the Addressable Market for Dry Etch Systems
  • Increasing Use of MEMS (Micro-Electro-Mechanical Systems) Devices in Healthcare and Consumer Electronics Drives Growth in Dry Etch Systems
  • Surge in the Production of Memory Chips and Flash Storage Drives Demand for High-Precision Dry Etching Technologies
  • Expansion of the Semiconductor Industry in Emerging Markets Strengthens the Global Adoption of Dry Etch Systems
  • The Increasing Need for High-Volume, Low-Cost Production in Semiconductor Manufacturing Creates Opportunities for Dry Etch System Adoption
4. GLOBAL MARKET PERSPECTIVE
  • TABLE 1: World Semiconductor Dry Etch Systems Market Analysis of Annual Sales in US$ Million for Years 2015 through 2030
  • TABLE 2: World Recent Past, Current & Future Analysis for Semiconductor Dry Etch Systems by Geographic Region - USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World Markets - Independent Analysis of Annual Sales in US$ Million for Years 2024 through 2030 and % CAGR
  • TABLE 3: World Historic Review for Semiconductor Dry Etch Systems by Geographic Region - USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World Markets - Independent Analysis of Annual Sales in US$ Million for Years 2015 through 2023 and % CAGR
  • TABLE 4: World 15-Year Perspective for Semiconductor Dry Etch Systems by Geographic Region - Percentage Breakdown of Value Sales for USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World Markets for Years 2015, 2025 & 2030
  • TABLE 5: World Recent Past, Current & Future Analysis for Reactive Ion Etching by Geographic Region - USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World Markets - Independent Analysis of Annual Sales in US$ Million for Years 2024 through 2030 and % CAGR
  • TABLE 6: World Historic Review for Reactive Ion Etching by Geographic Region - USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World Markets - Independent Analysis of Annual Sales in US$ Million for Years 2015 through 2023 and % CAGR
  • TABLE 7: World 15-Year Perspective for Reactive Ion Etching by Geographic Region - Percentage Breakdown of Value Sales for USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World for Years 2015, 2025 & 2030
  • TABLE 8: World Recent Past, Current & Future Analysis for Inductively Coupled Plasma Etching by Geographic Region - USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World Markets - Independent Analysis of Annual Sales in US$ Million for Years 2024 through 2030 and % CAGR
  • TABLE 9: World Historic Review for Inductively Coupled Plasma Etching by Geographic Region - USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World Markets - Independent Analysis of Annual Sales in US$ Million for Years 2015 through 2023 and % CAGR
  • TABLE 10: World 15-Year Perspective for Inductively Coupled Plasma Etching by Geographic Region - Percentage Breakdown of Value Sales for USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World for Years 2015, 2025 & 2030
  • TABLE 11: World Recent Past, Current & Future Analysis for Deep Reactive Ion Etching by Geographic Region - USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World Markets - Independent Analysis of Annual Sales in US$ Million for Years 2024 through 2030 and % CAGR
  • TABLE 12: World Historic Review for Deep Reactive Ion Etching by Geographic Region - USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World Markets - Independent Analysis of Annual Sales in US$ Million for Years 2015 through 2023 and % CAGR
  • TABLE 13: World 15-Year Perspective for Deep Reactive Ion Etching by Geographic Region - Percentage Breakdown of Value Sales for USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World for Years 2015, 2025 & 2030
  • TABLE 14: World Recent Past, Current & Future Analysis for Logic & Memory by Geographic Region - USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World Markets - Independent Analysis of Annual Sales in US$ Million for Years 2024 through 2030 and % CAGR
  • TABLE 15: World Historic Review for Logic & Memory by Geographic Region - USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World Markets - Independent Analysis of Annual Sales in US$ Million for Years 2015 through 2023 and % CAGR
  • TABLE 16: World 15-Year Perspective for Logic & Memory by Geographic Region - Percentage Breakdown of Value Sales for USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World for Years 2015, 2025 & 2030
  • TABLE 17: World Recent Past, Current & Future Analysis for MEMS & Sensors by Geographic Region - USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World Markets - Independent Analysis of Annual Sales in US$ Million for Years 2024 through 2030 and % CAGR
  • TABLE 18: World Historic Review for MEMS & Sensors by Geographic Region - USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World Markets - Independent Analysis of Annual Sales in US$ Million for Years 2015 through 2023 and % CAGR
  • TABLE 19: World 15-Year Perspective for MEMS & Sensors by Geographic Region - Percentage Breakdown of Value Sales for USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World for Years 2015, 2025 & 2030
  • TABLE 20: World Recent Past, Current & Future Analysis for Power Devices by Geographic Region - USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World Markets - Independent Analysis of Annual Sales in US$ Million for Years 2024 through 2030 and % CAGR
  • TABLE 21: World Historic Review for Power Devices by Geographic Region - USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World Markets - Independent Analysis of Annual Sales in US$ Million for Years 2015 through 2023 and % CAGR
  • TABLE 22: World 15-Year Perspective for Power Devices by Geographic Region - Percentage Breakdown of Value Sales for USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World for Years 2015, 2025 & 2030
  • TABLE 23: World Recent Past, Current & Future Analysis for Consumer Electronics by Geographic Region - USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World Markets - Independent Analysis of Annual Sales in US$ Million for Years 2024 through 2030 and % CAGR
  • TABLE 24: World Historic Review for Consumer Electronics by Geographic Region - USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World Markets - Independent Analysis of Annual Sales in US$ Million for Years 2015 through 2023 and % CAGR
  • TABLE 25: World 15-Year Perspective for Consumer Electronics by Geographic Region - Percentage Breakdown of Value Sales for USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World for Years 2015, 2025 & 2030
  • TABLE 26: World Recent Past, Current & Future Analysis for Automotive by Geographic Region - USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World Markets - Independent Analysis of Annual Sales in US$ Million for Years 2024 through 2030 and % CAGR
  • TABLE 27: World Historic Review for Automotive by Geographic Region - USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World Markets - Independent Analysis of Annual Sales in US$ Million for Years 2015 through 2023 and % CAGR
  • TABLE 28: World 15-Year Perspective for Automotive by Geographic Region - Percentage Breakdown of Value Sales for USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World for Years 2015, 2025 & 2030
  • TABLE 29: World Recent Past, Current & Future Analysis for Telecommunications by Geographic Region - USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World Markets - Independent Analysis of Annual Sales in US$ Million for Years 2024 through 2030 and % CAGR
  • TABLE 30: World Historic Review for Telecommunications by Geographic Region - USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World Markets - Independent Analysis of Annual Sales in US$ Million for Years 2015 through 2023 and % CAGR
  • TABLE 31: World 15-Year Perspective for Telecommunications by Geographic Region - Percentage Breakdown of Value Sales for USA, Canada, Japan, China, Europe, Asia-Pacific and Rest of World for Years 2015, 2025 & 2030
III. MARKET ANALYSIS
  • UNITED STATES
  • Semiconductor Dry Etch Systems Market Presence - Strong/Active/Niche/Trivial - Key Competitors in the United States for 2025 (E)
  • CANADA
  • JAPAN
  • Semiconductor Dry Etch Systems Market Presence - Strong/Active/Niche/Trivial - Key Competitors in Japan for 2025 (E)
  • CHINA
  • Semiconductor Dry Etch Systems Market Presence - Strong/Active/Niche/Trivial - Key Competitors in China for 2025 (E)
  • EUROPE
  • Semiconductor Dry Etch Systems Market Presence - Strong/Active/Niche/Trivial - Key Competitors in Europe for 2025 (E)
  • FRANCE
  • Semiconductor Dry Etch Systems Market Presence - Strong/Active/Niche/Trivial - Key Competitors in France for 2025 (E)
  • GERMANY
  • Semiconductor Dry Etch Systems Market Presence - Strong/Active/Niche/Trivial - Key Competitors in Germany for 2025 (E)
  • ITALY
  • UNITED KINGDOM
  • Semiconductor Dry Etch Systems Market Presence - Strong/Active/Niche/Trivial - Key Competitors in the United Kingdom for 2025 (E)
  • REST OF EUROPE
  • ASIA-PACIFIC
  • Semiconductor Dry Etch Systems Market Presence - Strong/Active/Niche/Trivial - Key Competitors in Asia-Pacific for 2025 (E)
  • REST OF WORLD
IV. COMPETITION

Companies Mentioned (Partial List)

A selection of companies mentioned in this report includes, but is not limited to:

  • ACM Research Inc.
  • AGS Plasma Systems, Inc.
  • AMEC (Advanced Micro-Fabrication Equipment Inc. China)
  • Anatech USA
  • Applied Materials Inc.
  • ASM International N.V.
  • ASML Holding N.V.
  • Canon Machinery Inc.
  • Dainippon Screen Group
  • EV Group (EVG)
  • F&K Delvotec Bondtechnik GmbH
  • Ferrotec Holdings Corporation
  • Hesse GmbH
  • Hitachi High-Tech Corporation
  • KLA Corporation
  • Lam Research Corporation
  • Mattson Technology Inc.
  • Meyer Burger Technology AG
  • Naura Technology Group Co., Ltd.
  • Oxford Instruments plc
  • Panasonic Corporation
  • Plasma-Therm LLC
  • SAMCO Inc.
  • Shibaura Mechatronics Corporation
  • SiCarrier
  • SPTS Technologies Ltd.
  • Tokyo Electron Limited
  • TPT Wire Bonder GmbH & Co. KG
  • Trion Technology, Inc.
  • ULVAC Inc.

Table Information