The wafer cleaning equipment market size has grown strongly in recent years. It will grow from $9.16 billion in 2024 to $10.01 billion in 2025 at a compound annual growth rate (CAGR) of 9.3%. The growth during the historical period can be attributed to the miniaturization of semiconductor devices, increasing demand for consumer electronics, expansion of the semiconductor industry, the rise of high-performance computing (HPC) systems, and a growing shift toward sustainable manufacturing practices.
The wafer cleaning equipment market size is expected to see strong growth in the next few years. It will grow to $14.15 billion in 2029 at a compound annual growth rate (CAGR) of 9%. The projected growth in the forecast period can be attributed to the rising demand for 5G technology, increased production of electric vehicles (EVs), the growing adoption of artificial intelligence (AI) and machine learning, the advancement of autonomous vehicles, and the expansion of data centers and cloud computing. Key trends expected during this period include the development of next-generation dry cleaning technologies, highly automated single-wafer cleaning systems, innovations in megasonic and ultrasonic cleaning, eco-friendly and chemical-free cleaning methods, and continued miniaturization.
The growing demand for semiconductor devices is anticipated to drive the expansion of the wafer cleaning equipment market. Semiconductor devices are electronic components that leverage the properties of semiconductor materials to control, amplify, or switch electrical signals. This demand is being fueled by the rapid advancement of technologies that require highly efficient and reliable electronic components. Wafer cleaning equipment plays a crucial role in the semiconductor manufacturing process by removing contaminants from silicon wafers, ensuring defect-free surfaces essential for producing high-performance components. For example, in May 2025, The Observatory of Economic Complexity (OEC) reported that global trade in semiconductor devices reached $155 billion in 2023, reflecting a 0.5% increase over 2022. As a result, the rising demand for semiconductor devices is contributing significantly to the growth of the wafer cleaning equipment market.
Leading companies in the wafer cleaning equipment industry are focusing on technological advancements such as next-generation cleaning systems to improve efficiency and meet the demands of modern semiconductor manufacturing. These advanced systems integrate innovative technologies to enhance cleaning performance, reduce chemical usage, and support the production of increasingly compact and complex semiconductor devices. For instance, in November 2024, SCREEN Semiconductor Solutions Co. Ltd., a Japan-based producer of semiconductor manufacturing equipment, launched the SS-3200 system for 200mm wafers. This high-throughput spin scrubber can process up to 500 wafers per hour more than three times the speed of its predecessor enabling semiconductor manufacturers to boost productivity and meet growing chip demand in high-performance applications.
In November 2022, Lam Research Corporation, a U.S.-based provider of semiconductor wafer fabrication equipment and services, acquired SEMSYSCO GmbH for an undisclosed amount. The acquisition aimed to enhance Lam Research’s expertise in advanced packaging and wet processing technologies to better meet the evolving needs of the semiconductor industry. SEMSYSCO GmbH, headquartered in Austria, specializes in wet processing equipment essential for semiconductor manufacturing and advanced packaging solutions.
Major players in the wafer cleaning equipment market are Applied Materials Inc., Lam Research Corporation, Tokyo Electron Limited, Entegris Inc., SCREEN Holdings Co. Ltd., Toho Kasei Co. Ltd., Shibaura Mechatronics Corporation, Tazmo Co. Ltd., RENA Technologies GmbH, SAMCO Inc., Orbray Co. Ltd., Chemcut Corp., Cleaning Technologies Group, AP and S International GmbH, Shenzhen Kelisonic Cleaning Equipment Co. Ltd., SEMES Co. Ltd., Akrion Technologies, Ultron Systems Inc., Echo Giken Co. Ltd., Modutek Corporation.
Asia-Pacific was the largest region in the wafer cleaning equipment market in 2024. North America is expected to be the fastest-growing region in the forecast period. The regions covered in wafer cleaning equipment report are Asia-Pacific, Western Europe, Eastern Europe, North America, South America, Middle East and Africa.
The countries covered in the wafer cleaning equipment market report are Australia, Brazil, China, France, Germany, India, Indonesia, Japan, Russia, South Korea, UK, USA, Canada, Italy, Spain.
Wafer cleaning equipment refers to specialized machinery used in the semiconductor manufacturing process to eliminate contaminants from silicon wafers. This equipment ensures the wafers are clean and maintain their integrity before undergoing essential fabrication steps such as photolithography and etching. The systems include both single-wafer and advanced cleaning technologies like ultrasonic cleaning.
The primary types of wafer cleaning equipment include single-wafer cleaning systems, batch cleaning systems, ultrasonic cleaning equipment, and other variants. Single-wafer cleaning systems are designed to clean individual wafers one at a time, providing high precision and contamination-free surfaces. These systems employ various technologies such as ultrasonic cleaning, chemical cleaning, dry cleaning, and plasma cleaning. They can function in automatic, semi-automatic, or manual modes. Wafer cleaning equipment is utilized in a range of applications, including smartphones and tablets, memory devices, radio frequency (RF) devices, light-emitting diodes (LEDs), and more. Key end users of this equipment include the semiconductor industry, consumer electronics, aerospace and defense, automotive, and healthcare and pharmaceutical sectors.
The wafer cleaning equipment market research report is one of a series of new reports that provides wafer cleaning equipment market statistics, including the wafer cleaning equipment industry global market size, regional shares, competitors with the wafer cleaning equipment market share, detailed wafer cleaning equipment market segments, market trends, and opportunities, and any further data you may need to thrive in the wafer cleaning equipment industry. This wafer cleaning equipment market research report delivers a complete perspective of everything you need, with an in-depth analysis of the current and future scenarios of the industry.
The wafer cleaning equipment market consists of sales of megasonic cleaning systems, wet bench stations, scrubber systems, ozone cleaning systems, and spin rinse dryers. Values in this market are ‘factory gate’ values, that is, the value of goods sold by the manufacturers or creators of the goods, whether to other entities (including downstream manufacturers, wholesalers, distributors, and retailers) or directly to end customers. The value of goods in this market includes related services sold by the creators of the goods.
The market value is defined as the revenues that enterprises gain from the sale of goods and/or services within the specified market and geography through sales, grants, or donations in terms of the currency (in USD, unless otherwise specified).
The revenues for a specified geography are consumption values and are revenues generated by organizations in the specified geography within the market, irrespective of where they are produced. It does not include revenues from resales along the supply chain, either further along the supply chain or as part of other products.
This product will be delivered within 3-5 business days.
The wafer cleaning equipment market size is expected to see strong growth in the next few years. It will grow to $14.15 billion in 2029 at a compound annual growth rate (CAGR) of 9%. The projected growth in the forecast period can be attributed to the rising demand for 5G technology, increased production of electric vehicles (EVs), the growing adoption of artificial intelligence (AI) and machine learning, the advancement of autonomous vehicles, and the expansion of data centers and cloud computing. Key trends expected during this period include the development of next-generation dry cleaning technologies, highly automated single-wafer cleaning systems, innovations in megasonic and ultrasonic cleaning, eco-friendly and chemical-free cleaning methods, and continued miniaturization.
The growing demand for semiconductor devices is anticipated to drive the expansion of the wafer cleaning equipment market. Semiconductor devices are electronic components that leverage the properties of semiconductor materials to control, amplify, or switch electrical signals. This demand is being fueled by the rapid advancement of technologies that require highly efficient and reliable electronic components. Wafer cleaning equipment plays a crucial role in the semiconductor manufacturing process by removing contaminants from silicon wafers, ensuring defect-free surfaces essential for producing high-performance components. For example, in May 2025, The Observatory of Economic Complexity (OEC) reported that global trade in semiconductor devices reached $155 billion in 2023, reflecting a 0.5% increase over 2022. As a result, the rising demand for semiconductor devices is contributing significantly to the growth of the wafer cleaning equipment market.
Leading companies in the wafer cleaning equipment industry are focusing on technological advancements such as next-generation cleaning systems to improve efficiency and meet the demands of modern semiconductor manufacturing. These advanced systems integrate innovative technologies to enhance cleaning performance, reduce chemical usage, and support the production of increasingly compact and complex semiconductor devices. For instance, in November 2024, SCREEN Semiconductor Solutions Co. Ltd., a Japan-based producer of semiconductor manufacturing equipment, launched the SS-3200 system for 200mm wafers. This high-throughput spin scrubber can process up to 500 wafers per hour more than three times the speed of its predecessor enabling semiconductor manufacturers to boost productivity and meet growing chip demand in high-performance applications.
In November 2022, Lam Research Corporation, a U.S.-based provider of semiconductor wafer fabrication equipment and services, acquired SEMSYSCO GmbH for an undisclosed amount. The acquisition aimed to enhance Lam Research’s expertise in advanced packaging and wet processing technologies to better meet the evolving needs of the semiconductor industry. SEMSYSCO GmbH, headquartered in Austria, specializes in wet processing equipment essential for semiconductor manufacturing and advanced packaging solutions.
Major players in the wafer cleaning equipment market are Applied Materials Inc., Lam Research Corporation, Tokyo Electron Limited, Entegris Inc., SCREEN Holdings Co. Ltd., Toho Kasei Co. Ltd., Shibaura Mechatronics Corporation, Tazmo Co. Ltd., RENA Technologies GmbH, SAMCO Inc., Orbray Co. Ltd., Chemcut Corp., Cleaning Technologies Group, AP and S International GmbH, Shenzhen Kelisonic Cleaning Equipment Co. Ltd., SEMES Co. Ltd., Akrion Technologies, Ultron Systems Inc., Echo Giken Co. Ltd., Modutek Corporation.
Asia-Pacific was the largest region in the wafer cleaning equipment market in 2024. North America is expected to be the fastest-growing region in the forecast period. The regions covered in wafer cleaning equipment report are Asia-Pacific, Western Europe, Eastern Europe, North America, South America, Middle East and Africa.
The countries covered in the wafer cleaning equipment market report are Australia, Brazil, China, France, Germany, India, Indonesia, Japan, Russia, South Korea, UK, USA, Canada, Italy, Spain.
Wafer cleaning equipment refers to specialized machinery used in the semiconductor manufacturing process to eliminate contaminants from silicon wafers. This equipment ensures the wafers are clean and maintain their integrity before undergoing essential fabrication steps such as photolithography and etching. The systems include both single-wafer and advanced cleaning technologies like ultrasonic cleaning.
The primary types of wafer cleaning equipment include single-wafer cleaning systems, batch cleaning systems, ultrasonic cleaning equipment, and other variants. Single-wafer cleaning systems are designed to clean individual wafers one at a time, providing high precision and contamination-free surfaces. These systems employ various technologies such as ultrasonic cleaning, chemical cleaning, dry cleaning, and plasma cleaning. They can function in automatic, semi-automatic, or manual modes. Wafer cleaning equipment is utilized in a range of applications, including smartphones and tablets, memory devices, radio frequency (RF) devices, light-emitting diodes (LEDs), and more. Key end users of this equipment include the semiconductor industry, consumer electronics, aerospace and defense, automotive, and healthcare and pharmaceutical sectors.
The wafer cleaning equipment market research report is one of a series of new reports that provides wafer cleaning equipment market statistics, including the wafer cleaning equipment industry global market size, regional shares, competitors with the wafer cleaning equipment market share, detailed wafer cleaning equipment market segments, market trends, and opportunities, and any further data you may need to thrive in the wafer cleaning equipment industry. This wafer cleaning equipment market research report delivers a complete perspective of everything you need, with an in-depth analysis of the current and future scenarios of the industry.
The wafer cleaning equipment market consists of sales of megasonic cleaning systems, wet bench stations, scrubber systems, ozone cleaning systems, and spin rinse dryers. Values in this market are ‘factory gate’ values, that is, the value of goods sold by the manufacturers or creators of the goods, whether to other entities (including downstream manufacturers, wholesalers, distributors, and retailers) or directly to end customers. The value of goods in this market includes related services sold by the creators of the goods.
The market value is defined as the revenues that enterprises gain from the sale of goods and/or services within the specified market and geography through sales, grants, or donations in terms of the currency (in USD, unless otherwise specified).
The revenues for a specified geography are consumption values and are revenues generated by organizations in the specified geography within the market, irrespective of where they are produced. It does not include revenues from resales along the supply chain, either further along the supply chain or as part of other products.
This product will be delivered within 3-5 business days.
Table of Contents
1. Executive Summary2. Wafer Cleaning Equipment Market Characteristics3. Wafer Cleaning Equipment Market Trends And Strategies4. Wafer Cleaning Equipment Market - Macro Economic Scenario Including The Impact Of Interest Rates, Inflation, Geopolitics, Trade Wars and Tariffs, And Covid And Recovery On The Market32. Global Wafer Cleaning Equipment Market Competitive Benchmarking And Dashboard33. Key Mergers And Acquisitions In The Wafer Cleaning Equipment Market34. Recent Developments In The Wafer Cleaning Equipment Market
5. Global Wafer Cleaning Equipment Growth Analysis And Strategic Analysis Framework
6. Wafer Cleaning Equipment Market Segmentation
7. Wafer Cleaning Equipment Market Regional And Country Analysis
8. Asia-Pacific Wafer Cleaning Equipment Market
9. China Wafer Cleaning Equipment Market
10. India Wafer Cleaning Equipment Market
11. Japan Wafer Cleaning Equipment Market
12. Australia Wafer Cleaning Equipment Market
13. Indonesia Wafer Cleaning Equipment Market
14. South Korea Wafer Cleaning Equipment Market
15. Western Europe Wafer Cleaning Equipment Market
16. UK Wafer Cleaning Equipment Market
17. Germany Wafer Cleaning Equipment Market
18. France Wafer Cleaning Equipment Market
19. Italy Wafer Cleaning Equipment Market
20. Spain Wafer Cleaning Equipment Market
21. Eastern Europe Wafer Cleaning Equipment Market
22. Russia Wafer Cleaning Equipment Market
23. North America Wafer Cleaning Equipment Market
24. USA Wafer Cleaning Equipment Market
25. Canada Wafer Cleaning Equipment Market
26. South America Wafer Cleaning Equipment Market
27. Brazil Wafer Cleaning Equipment Market
28. Middle East Wafer Cleaning Equipment Market
29. Africa Wafer Cleaning Equipment Market
30. Wafer Cleaning Equipment Market Competitive Landscape And Company Profiles
31. Wafer Cleaning Equipment Market Other Major And Innovative Companies
35. Wafer Cleaning Equipment Market High Potential Countries, Segments and Strategies
36. Appendix
Executive Summary
Wafer Cleaning Equipment Global Market Report 2025 provides strategists, marketers and senior management with the critical information they need to assess the market.This report focuses on wafer cleaning equipment market which is experiencing strong growth. The report gives a guide to the trends which will be shaping the market over the next ten years and beyond.
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Description
Where is the largest and fastest growing market for wafer cleaning equipment ? How does the market relate to the overall economy, demography and other similar markets? What forces will shape the market going forward? The wafer cleaning equipment market global report answers all these questions and many more.The report covers market characteristics, size and growth, segmentation, regional and country breakdowns, competitive landscape, market shares, trends and strategies for this market. It traces the market’s historic and forecast market growth by geography.
- The market characteristics section of the report defines and explains the market.
- The market size section gives the market size ($b) covering both the historic growth of the market, and forecasting its development.
- The forecasts are made after considering the major factors currently impacting the market. These include:
- The forecasts are made after considering the major factors currently impacting the market. These include the Russia-Ukraine war, rising inflation, higher interest rates, and the legacy of the COVID-19 pandemic.
- Market segmentations break down the market into sub markets.
- The regional and country breakdowns section gives an analysis of the market in each geography and the size of the market by geography and compares their historic and forecast growth. It covers the growth trajectory of COVID-19 for all regions, key developed countries and major emerging markets.
- The competitive landscape chapter gives a description of the competitive nature of the market, market shares, and a description of the leading companies. Key financial deals which have shaped the market in recent years are identified.
- The trends and strategies section analyses the shape of the market as it emerges from the crisis and suggests how companies can grow as the market recovers.
Scope
Markets Covered:
1) By Type: Single-Wafer Cleaning Systems; Batch Cleaning Systems; Ultrasonic Cleaning Equipment; Other Types2) By Technology: Ultrasonic Cleaning; Chemical Cleaning; Dry Cleaning; Plasma Cleaning
3) By Operating Mode: Automatic; Semi-Automatic; Manual
4) By Application: Smartphones And Tablets; Memory Devices; Radio Frequency (RF) Device; Light Emitting Diode (LED); Other Applications
5) By End User: Semiconductor Industry; Consumer Electronics; Aerospace and Defense; Automotive Industry; Healthcare And Pharmaceutical
Subsegment:
1) By Single-Wafer Cleaning Systems: Spin Scrubber Cleaning, Spray Cleaning, Plasma Cleaning, Brush Cleaning, Dry Cleaning2) By Batch Cleaning Systems: Wet Bench Cleaning, Spray Tank Cleaning, Agitation Cleaning, Spray Scrubber Cleaning
3) By Ultrasonic Cleaning Equipment: Single Frequency Ultrasonic Cleaning, Multi-Frequency Ultrasonic Cleaning, Megasonic Cleaning
4) By Other Types: Cryogenic Cleaning Systems, Vapor Phase Cleaning Systems, Laser Cleaning Systems, Plasma Ashing Systems
Key Companies Profiled: Applied Materials Inc.; Lam Research Corporation; Tokyo Electron Limited; Entegris Inc.; SCREEN Holdings Co. Ltd.
Countries: Australia; Brazil; China; France; Germany; India; Indonesia; Japan; Russia; South Korea; UK; USA; Canada; Italy; Spain
Regions: Asia-Pacific; Western Europe; Eastern Europe; North America; South America; Middle East; Africa
Time Series: Five years historic and ten years forecast.
Data: Ratios of market size and growth to related markets, GDP proportions, expenditure per capita.
Data Segmentation: Country and regional historic and forecast data, market share of competitors, market segments.
Sourcing and Referencing: Data and analysis throughout the report is sourced using end notes.
Delivery Format: PDF, Word and Excel Data Dashboard.
Companies Mentioned
- Applied Materials Inc.
- Lam Research Corporation
- Tokyo Electron Limited
- Entegris Inc.
- SCREEN Holdings Co. Ltd.
- Toho Kasei Co. Ltd.
- Shibaura Mechatronics Corporation
- Tazmo Co. Ltd.
- RENA Technologies GmbH
- SAMCO Inc.
- Orbray Co. Ltd.
- Chemcut Corp.
- Cleaning Technologies Group
- AP and S International GmbH
- Shenzhen Kelisonic Cleaning Equipment Co. Ltd.
- SEMES Co. Ltd.
- Akrion Technologies
- Ultron Systems Inc.
- Echo Giken Co. Ltd.
- Modutek Corporation