Wafer Cleaning Equipment Global Market Report 2025

The wafer cleaning equipment market size has grown strongly in recent years. It will grow from $9.16 billion in 2024 to $10.01 billion in 2025 at a compound annual growth rate (CAGR) of 9.3%. The growth during the historical period can be attributed to the miniaturization of semiconductor devices, increasing demand for consumer electronics, expansion of the semiconductor industry, the rise of high-performance computing (HPC) systems, and a growing shift toward sustainable manufacturing practices.

The wafer cleaning equipment market size is expected to see strong growth in the next few years. It will grow to $14.15 billion in 2029 at a compound annual growth rate (CAGR) of 9%. The projected growth in the forecast period can be attributed to the rising demand for 5G technology, increased production of electric vehicles (EVs), the growing adoption of artificial intelligence (AI) and machine learning, the advancement of autonomous vehicles, and the expansion of data centers and cloud computing. Key trends expected during this period include the development of next-generation dry cleaning technologies, highly automated single-wafer cleaning systems, innovations in megasonic and ultrasonic cleaning, eco-friendly and chemical-free cleaning methods, and continued miniaturization.

The growing demand for semiconductor devices is anticipated to drive the expansion of the wafer cleaning equipment market. Semiconductor devices are electronic components that leverage the properties of semiconductor materials to control, amplify, or switch electrical signals. This demand is being fueled by the rapid advancement of technologies that require highly efficient and reliable electronic components. Wafer cleaning equipment plays a crucial role in the semiconductor manufacturing process by removing contaminants from silicon wafers, ensuring defect-free surfaces essential for producing high-performance components. For example, in May 2025, The Observatory of Economic Complexity (OEC) reported that global trade in semiconductor devices reached $155 billion in 2023, reflecting a 0.5% increase over 2022. As a result, the rising demand for semiconductor devices is contributing significantly to the growth of the wafer cleaning equipment market.

Leading companies in the wafer cleaning equipment industry are focusing on technological advancements such as next-generation cleaning systems to improve efficiency and meet the demands of modern semiconductor manufacturing. These advanced systems integrate innovative technologies to enhance cleaning performance, reduce chemical usage, and support the production of increasingly compact and complex semiconductor devices. For instance, in November 2024, SCREEN Semiconductor Solutions Co. Ltd., a Japan-based producer of semiconductor manufacturing equipment, launched the SS-3200 system for 200mm wafers. This high-throughput spin scrubber can process up to 500 wafers per hour more than three times the speed of its predecessor enabling semiconductor manufacturers to boost productivity and meet growing chip demand in high-performance applications.

In November 2022, Lam Research Corporation, a U.S.-based provider of semiconductor wafer fabrication equipment and services, acquired SEMSYSCO GmbH for an undisclosed amount. The acquisition aimed to enhance Lam Research’s expertise in advanced packaging and wet processing technologies to better meet the evolving needs of the semiconductor industry. SEMSYSCO GmbH, headquartered in Austria, specializes in wet processing equipment essential for semiconductor manufacturing and advanced packaging solutions.

Major players in the wafer cleaning equipment market are Applied Materials Inc., Lam Research Corporation, Tokyo Electron Limited, Entegris Inc., SCREEN Holdings Co. Ltd., Toho Kasei Co. Ltd., Shibaura Mechatronics Corporation, Tazmo Co. Ltd., RENA Technologies GmbH, SAMCO Inc., Orbray Co. Ltd., Chemcut Corp., Cleaning Technologies Group, AP and S International GmbH, Shenzhen Kelisonic Cleaning Equipment Co. Ltd., SEMES Co. Ltd., Akrion Technologies, Ultron Systems Inc., Echo Giken Co. Ltd., Modutek Corporation.

Asia-Pacific was the largest region in the wafer cleaning equipment market in 2024. North America is expected to be the fastest-growing region in the forecast period. The regions covered in wafer cleaning equipment report are Asia-Pacific, Western Europe, Eastern Europe, North America, South America, Middle East and Africa.

The countries covered in the wafer cleaning equipment market report are Australia, Brazil, China, France, Germany, India, Indonesia, Japan, Russia, South Korea, UK, USA, Canada, Italy, Spain.

Wafer cleaning equipment refers to specialized machinery used in the semiconductor manufacturing process to eliminate contaminants from silicon wafers. This equipment ensures the wafers are clean and maintain their integrity before undergoing essential fabrication steps such as photolithography and etching. The systems include both single-wafer and advanced cleaning technologies like ultrasonic cleaning.

The primary types of wafer cleaning equipment include single-wafer cleaning systems, batch cleaning systems, ultrasonic cleaning equipment, and other variants. Single-wafer cleaning systems are designed to clean individual wafers one at a time, providing high precision and contamination-free surfaces. These systems employ various technologies such as ultrasonic cleaning, chemical cleaning, dry cleaning, and plasma cleaning. They can function in automatic, semi-automatic, or manual modes. Wafer cleaning equipment is utilized in a range of applications, including smartphones and tablets, memory devices, radio frequency (RF) devices, light-emitting diodes (LEDs), and more. Key end users of this equipment include the semiconductor industry, consumer electronics, aerospace and defense, automotive, and healthcare and pharmaceutical sectors.

The wafer cleaning equipment market research report is one of a series of new reports that provides wafer cleaning equipment market statistics, including the wafer cleaning equipment industry global market size, regional shares, competitors with the wafer cleaning equipment market share, detailed wafer cleaning equipment market segments, market trends, and opportunities, and any further data you may need to thrive in the wafer cleaning equipment industry. This wafer cleaning equipment market research report delivers a complete perspective of everything you need, with an in-depth analysis of the current and future scenarios of the industry.

The wafer cleaning equipment market consists of sales of megasonic cleaning systems, wet bench stations, scrubber systems, ozone cleaning systems, and spin rinse dryers. Values in this market are ‘factory gate’ values, that is, the value of goods sold by the manufacturers or creators of the goods, whether to other entities (including downstream manufacturers, wholesalers, distributors, and retailers) or directly to end customers. The value of goods in this market includes related services sold by the creators of the goods.

The market value is defined as the revenues that enterprises gain from the sale of goods and/or services within the specified market and geography through sales, grants, or donations in terms of the currency (in USD, unless otherwise specified).

The revenues for a specified geography are consumption values and are revenues generated by organizations in the specified geography within the market, irrespective of where they are produced. It does not include revenues from resales along the supply chain, either further along the supply chain or as part of other products.

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