Wafer Cleaning Equipment Market Report 2026

The wafer cleaning equipment market size has grown strongly in recent years. It will grow from $10.01 billion in 2025 to $10.94 billion in 2026 at a compound annual growth rate (CAGR) of 9.2%. The growth in the historic period can be attributed to growth of semiconductor manufacturing, miniaturization of integrated circuits, rising smartphone production, demand for high yield wafers, expansion of memory device fabrication.

The wafer cleaning equipment market size is expected to see strong growth in the next few years. It will grow to $15.4 billion in 2030 at a compound annual growth rate (CAGR) of 8.9%. The growth in the forecast period can be attributed to advanced node semiconductor development, growth of electric vehicles, expansion of semiconductor fabs, increasing chip complexity, rising investment in chip manufacturing. Major trends in the forecast period include rising adoption of single wafer cleaning systems, increasing demand for advanced ultrasonic cleaning, expansion of automated wafer cleaning processes, growing focus on contamination control, integration of cleaning systems with fab automation.

The growing demand for semiconductor devices is anticipated to drive the expansion of the wafer cleaning equipment market. Semiconductor devices are electronic components that leverage the properties of semiconductor materials to control, amplify, or switch electrical signals. This demand is being fueled by the rapid advancement of technologies that require highly efficient and reliable electronic components. Wafer cleaning equipment plays a crucial role in the semiconductor manufacturing process by removing contaminants from silicon wafers, ensuring defect-free surfaces essential for producing high-performance components. For example, in May 2025, The Observatory of Economic Complexity (OEC) reported that global trade in semiconductor devices reached $155 billion in 2023, reflecting a 0.5% increase over 2022. As a result, the rising demand for semiconductor devices is contributing significantly to the growth of the wafer cleaning equipment market.

Leading companies in the wafer cleaning equipment industry are focusing on technological advancements such as next-generation cleaning systems to improve efficiency and meet the demands of modern semiconductor manufacturing. These advanced systems integrate innovative technologies to enhance cleaning performance, reduce chemical usage, and support the production of increasingly compact and complex semiconductor devices. For instance, in November 2024, SCREEN Semiconductor Solutions Co. Ltd., a Japan-based producer of semiconductor manufacturing equipment, launched the SS-3200 system for 200mm wafers. This high-throughput spin scrubber can process up to 500 wafers per hour more than three times the speed of its predecessor enabling semiconductor manufacturers to boost productivity and meet growing chip demand in high-performance applications.

In January 2023, Amtech Systems Inc., a US-based manufacturer of semiconductor capital equipment, acquired Entrepix, Inc. for USD 35 million. Through this acquisition, Amtech aims to expand its front-end wafer processing presence, enhance its portfolio of chemical mechanical polishing (CMP) and wafer cleaning equipment and services, and accelerate growth in high-growth areas including silicon carbide applications. Entrepix Inc. is a US-based provider of CMP technology, wafer cleaning systems, refurbished semiconductor tools, and specialized CMP services.

Major companies operating in the wafer cleaning equipment market are Tokyo Electron Limited, Applied Materials, Inc., Lam Research Corporation, SCREEN Holdings Co., Ltd., Shibaura Mechatronics Corporation, Kokusai Electric Corporation, SEMES Co., Ltd., Akrion Technologies LLC, RENA Technologies GmbH, AP&S International GmbH, Modutek Corporation, Ultron Systems, Inc., Echo Giken Co., Ltd., Samco Inc., Tazmo Co., Ltd., Kingsemi Co., Ltd., Naura Technology Group Co., Ltd., Shanghai Sinyang Semiconductor Equipment Co., Ltd. (SSEC), Jusung Engineering Co., Ltd., Wonik IPS Co., Ltd., PSK Inc., Hwatsing Technology Co., Ltd.

Asia-Pacific was the largest region in the wafer cleaning equipment market in 2025. North America is expected to be the fastest-growing region in the forecast period. The regions covered in the wafer cleaning equipment market report are Asia-Pacific, South East Asia, Western Europe, Eastern Europe, North America, South America, Middle East, Africa. The countries covered in the wafer cleaning equipment market report are Australia, Brazil, China, France, Germany, India, Indonesia, Japan, Taiwan, Russia, South Korea, UK, USA, Canada, Italy, Spain.

The wafer cleaning equipment market consists of sales of megasonic cleaning systems, wet bench stations, scrubber systems, ozone cleaning systems, and spin rinse dryers. Values in this market are ‘factory gate’ values, that is, the value of goods sold by the manufacturers or creators of the goods, whether to other entities (including downstream manufacturers, wholesalers, distributors, and retailers) or directly to end customers. The value of goods in this market includes related services sold by the creators of the goods.

The market value is defined as the revenues that enterprises gain from the sale of goods and/or services within the specified market and geography through sales, grants, or donations in terms of the currency (in USD unless otherwise specified).

The revenues for a specified geography are consumption values that are revenues generated by organizations in the specified geography within the market, irrespective of where they are produced. It does not include revenues from resales along the supply chain, either further along the supply chain or as part of other products.

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