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EUV Light Sources Market - Global Forecast 2025-2030

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    Report

  • 193 Pages
  • August 2025
  • Region: Global
  • 360iResearch™
  • ID: 6122056
UP TO OFF until Jan 01st 2026
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Extreme ultraviolet (EUV) light source technology is redefining semiconductor manufacturing by enabling greater precision and innovative chip architectures. Executive leaders now face an evolving market shaped by disruptive technologies, supply chain recalibrations, and region-specific adoption challenges—all impacting strategic opportunities for forward-thinking organizations.

Market Snapshot: Extreme Ultraviolet Light Source Market

The extreme ultraviolet light source market is experiencing robust growth, driven by the push for miniaturized semiconductor geometries and increasing demand for high-performance integrated circuits. Over the past decade, refinements in plasma generation, emission intensity, and system stability have established a foundation for sub-seven-nanometer chip production. Industry participants spanning global OEMs, component suppliers, optical manufacturers, and foundries are recalibrating strategies to harness the full potential of EUV. Heightened focus on mass production and the adoption of next-generation lithography tools further accelerate market opportunities.

Scope & Segmentation

  • Light Source Types: Discharge Produced Plasma and Laser Produced Plasma technologies each present distinct operational advantages, influencing design pathways for advanced semiconductor equipment.
  • Power Output: High Power, Medium Power, and Low Power systems meet varying throughput, cost, and technical specifications across research, diagnostics, and high-volume production environments.
  • Applications: Key uses include Research and Development, Front End Lithography, and Mask Inspection & Metrology, driving both foundational innovation and manufacturing optimization.
  • End Users: Foundries, Integrated Device Manufacturers, Research Institutions, and Third-Party Service Providers benefit from customizable modules, turnkey solutions, and field services that maximize uptime.
  • Components: Core investments focus on Collector Mirrors, Source Systems, Optics (EUV Filters and Mirror Coatings), and a suite of Maintenance Services (Field Services, Technical Support, Spare Parts).
  • Deployment Stages: Market segmentation by New Installations, Replacement Systems, and Upgrades & Retrofits helps organizations tailor adoption and performance improvement strategies.
  • Regions: Coverage includes the Americas (notably California, Texas, New York, and others), Europe, Middle East & Africa (20+ countries), and Asia-Pacific (including China, Japan, South Korea, Taiwan, and more).
  • Leading Companies: Competitive landscape profiling features ASML Holding N.V., Gigaphoton Inc., Ushio Inc., Shanghai Micro Electronics Equipment Co., XTREME technologies GmbH, and Canon Electron Optics Co., Ltd.

Key Takeaways: Strategic Insights for Decision-Makers

  • Recent advances in plasma architectures and modular design enable system integrators to better tailor light sources to specialized lithography and inspection requirements.
  • Convergence of optical coatings, vacuum technology, and diagnostics has reduced failure rates and improved production cluster uptime for advanced semiconductor nodes.
  • Emerging partnerships between optics manufacturers and semiconductor fabs have driven continuous performance enhancement via feedback loops and collaborative R&D.
  • Growth in third-party maintenance services and localized engineering hubs provides predictable uptime and targeted support for rapid deployment needs.
  • Regional adoption rates show distinct patterns, with Asia-Pacific leading capacity expansions while Europe, Middle East & Africa emphasize optics innovation and collaborative consortia.
  • Competitive differentiation is achieved through proprietary vacuum sealing, advanced mirror substrates, and agile research collaborations among manufacturers, suppliers, and research institutions.

Tariff Impact: Navigating Supply Chain and Policy Shifts

Pending United States tariff measures, set for early 2025, introduce added complexity for procurement of EUV light source subsystems. Newly announced tariffs on select electronic assemblies and custom optics prompt suppliers and end users to reevaluate sourcing and logistics. Multinational vendors are diversifying manufacturing, employing tariff engineering measures such as component reclassification and localized assembly to manage costs. This has triggered new long-term supply agreements and flexible pricing models across procurement cycles, highlighting the importance of agile supply chain management in an era of dynamic trade regulations.

Methodology & Data Sources

This report uses a rigorous methodology combining primary expert interviews, comprehensive secondary research, and data triangulation from key industry sources. Feedback loops with technical panels, supply chain professionals, and validation via peer-reviewed literature ensure reliability and depth across every analytical framework.

Why This Report Matters

  • Enables leadership teams to anticipate market shifts and adapt strategies with segmented, actionable intelligence on EUV ecosystems.
  • Provides clarity on how emerging technologies, shifting policies, and regional dynamics shape operational advantages and capital allocation.
  • Supports transparent dialogue with internal stakeholders on investment, procurement, and R&D priorities, minimizing disruptive surprises.

Conclusion

This comprehensive analysis clarifies the evolving landscape of extreme ultraviolet light source technologies, guiding organizations to informed decision-making. Leaders can shape future strategies by aligning technology integration with regulatory, market, and customer realities.



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Table of Contents

1. Preface
1.1. Objectives of the Study
1.2. Market Segmentation & Coverage
1.3. Years Considered for the Study
1.4. Currency & Pricing
1.5. Language
1.6. Stakeholders
2. Research Methodology
2.1. Define: Research Objective
2.2. Determine: Research Design
2.3. Prepare: Research Instrument
2.4. Collect: Data Source
2.5. Analyze: Data Interpretation
2.6. Formulate: Data Verification
2.7. Publish: Research Report
2.8. Repeat: Report Update
3. Executive Summary
4. Market Overview
4.1. Introduction
4.2. Market Sizing & Forecasting
5. Market Dynamics
5.1. Integration of high-power laser-driven plasma EUV sources to boost throughput in next-generation lithography
5.2. Adoption of tin-based droplet generators to enhance EUV source brightness and stability at higher repetition rates
5.3. Development of advanced collector optics coatings to reduce debris impact and increase tool uptime in EUV systems
5.4. Implementation of real-time plasma diagnostic sensors for dynamic optimization of EUV source output efficiency under varying workloads
5.5. Collaboration between semiconductor manufacturers and EUV equipment suppliers on scale-up of 250-watt class light sources for high-volume manufacturing
5.6. Integration of EUV metrology techniques to monitor source spectral purity and improve process control in sub-5nm production
5.7. Research into laser-produced plasma EUV sources using alternative target materials for cost reduction and environmental sustainability
5.8. Deployment of dual-module EUV light source configurations to support continuous operation and minimize maintenance downtime
6. Market Insights
6.1. Porter’s Five Forces Analysis
6.2. PESTLE Analysis
7. Cumulative Impact of United States Tariffs 2025
8. EUV Light Sources Market, by Type
8.1. Introduction
8.2. Discharge Produced Plasma
8.3. Laser Produced Plasma
9. EUV Light Sources Market, by Power Output
9.1. Introduction
9.2. High Power
9.3. Low Power
9.4. Medium Power
10. EUV Light Sources Market, by Application
10.1. Introduction
10.2. Research and Development
10.3. Semiconductor Manufacturing
10.3.1. Front End Lithography
10.3.2. Mask Inspection and Metrology
11. EUV Light Sources Market, by End User
11.1. Introduction
11.2. Foundries
11.3. Integrated Device Manufacturers
11.4. Research Institutions
11.5. Third Party Service Providers
12. EUV Light Sources Market, by Component
12.1. Introduction
12.2. Collector Mirrors
12.3. Maintenance Services
12.3.1. Field Services and Technical Support
12.3.2. Spare Parts
12.4. Optics
12.4.1. EUV Filters
12.4.2. Mirror Coatings
12.5. Source Systems
13. EUV Light Sources Market, by Deployment Stage
13.1. Introduction
13.2. New Installations
13.3. Replacement Systems
13.4. Upgrades and Retrofits
14. Americas EUV Light Sources Market
14.1. Introduction
14.2. United States
14.3. Canada
14.4. Mexico
14.5. Brazil
14.6. Argentina
15. Europe, Middle East & Africa EUV Light Sources Market
15.1. Introduction
15.2. United Kingdom
15.3. Germany
15.4. France
15.5. Russia
15.6. Italy
15.7. Spain
15.8. United Arab Emirates
15.9. Saudi Arabia
15.10. South Africa
15.11. Denmark
15.12. Netherlands
15.13. Qatar
15.14. Finland
15.15. Sweden
15.16. Nigeria
15.17. Egypt
15.18. Turkey
15.19. Israel
15.20. Norway
15.21. Poland
15.22. Switzerland
16. Asia-Pacific EUV Light Sources Market
16.1. Introduction
16.2. China
16.3. India
16.4. Japan
16.5. Australia
16.6. South Korea
16.7. Indonesia
16.8. Thailand
16.9. Philippines
16.10. Malaysia
16.11. Singapore
16.12. Vietnam
16.13. Taiwan
17. Competitive Landscape
17.1. Market Share Analysis, 2024
17.2. FPNV Positioning Matrix, 2024
17.3. Competitive Analysis
17.3.1. ASML Holding N.V.
17.3.2. Gigaphoton Inc.
17.3.3. Ushio Inc.
17.3.4. Shanghai Micro Electronics Equipment Co., Ltd.
17.3.5. XTREME technologies GmbH
17.3.6. Canon Electron Optics Co., Ltd.
18. ResearchAI
19. ResearchStatistics
20. ResearchContacts
21. ResearchArticles
22. Appendix
List of Figures
FIGURE 1. EUV LIGHT SOURCES MARKET RESEARCH PROCESS
FIGURE 2. GLOBAL EUV LIGHT SOURCES MARKET SIZE, 2018-2030 (USD MILLION)
FIGURE 3. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY REGION, 2024 VS 2025 VS 2030 (USD MILLION)
FIGURE 4. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY COUNTRY, 2024 VS 2025 VS 2030 (USD MILLION)
FIGURE 5. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY TYPE, 2024 VS 2030 (%)
FIGURE 6. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY TYPE, 2024 VS 2025 VS 2030 (USD MILLION)
FIGURE 7. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY POWER OUTPUT, 2024 VS 2030 (%)
FIGURE 8. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY POWER OUTPUT, 2024 VS 2025 VS 2030 (USD MILLION)
FIGURE 9. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY APPLICATION, 2024 VS 2030 (%)
FIGURE 10. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY APPLICATION, 2024 VS 2025 VS 2030 (USD MILLION)
FIGURE 11. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY END USER, 2024 VS 2030 (%)
FIGURE 12. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY END USER, 2024 VS 2025 VS 2030 (USD MILLION)
FIGURE 13. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY COMPONENT, 2024 VS 2030 (%)
FIGURE 14. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY COMPONENT, 2024 VS 2025 VS 2030 (USD MILLION)
FIGURE 15. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY DEPLOYMENT STAGE, 2024 VS 2030 (%)
FIGURE 16. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY DEPLOYMENT STAGE, 2024 VS 2025 VS 2030 (USD MILLION)
FIGURE 17. AMERICAS EUV LIGHT SOURCES MARKET SIZE, BY COUNTRY, 2024 VS 2030 (%)
FIGURE 18. AMERICAS EUV LIGHT SOURCES MARKET SIZE, BY COUNTRY, 2024 VS 2025 VS 2030 (USD MILLION)
FIGURE 19. UNITED STATES EUV LIGHT SOURCES MARKET SIZE, BY STATE, 2024 VS 2030 (%)
FIGURE 20. UNITED STATES EUV LIGHT SOURCES MARKET SIZE, BY STATE, 2024 VS 2025 VS 2030 (USD MILLION)
FIGURE 21. EUROPE, MIDDLE EAST & AFRICA EUV LIGHT SOURCES MARKET SIZE, BY COUNTRY, 2024 VS 2030 (%)
FIGURE 22. EUROPE, MIDDLE EAST & AFRICA EUV LIGHT SOURCES MARKET SIZE, BY COUNTRY, 2024 VS 2025 VS 2030 (USD MILLION)
FIGURE 23. ASIA-PACIFIC EUV LIGHT SOURCES MARKET SIZE, BY COUNTRY, 2024 VS 2030 (%)
FIGURE 24. ASIA-PACIFIC EUV LIGHT SOURCES MARKET SIZE, BY COUNTRY, 2024 VS 2025 VS 2030 (USD MILLION)
FIGURE 25. EUV LIGHT SOURCES MARKET SHARE, BY KEY PLAYER, 2024
FIGURE 26. EUV LIGHT SOURCES MARKET, FPNV POSITIONING MATRIX, 2024
FIGURE 27. EUV LIGHT SOURCES MARKET: RESEARCHAI
FIGURE 28. EUV LIGHT SOURCES MARKET: RESEARCHSTATISTICS
FIGURE 29. EUV LIGHT SOURCES MARKET: RESEARCHCONTACTS
FIGURE 30. EUV LIGHT SOURCES MARKET: RESEARCHARTICLES
List of Tables
TABLE 1. EUV LIGHT SOURCES MARKET SEGMENTATION & COVERAGE
TABLE 2. UNITED STATES DOLLAR EXCHANGE RATE, 2018-2024
TABLE 3. GLOBAL EUV LIGHT SOURCES MARKET SIZE, 2018-2024 (USD MILLION)
TABLE 4. GLOBAL EUV LIGHT SOURCES MARKET SIZE, 2025-2030 (USD MILLION)
TABLE 5. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY REGION, 2018-2024 (USD MILLION)
TABLE 6. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY REGION, 2025-2030 (USD MILLION)
TABLE 7. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY COUNTRY, 2018-2024 (USD MILLION)
TABLE 8. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY COUNTRY, 2025-2030 (USD MILLION)
TABLE 9. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY TYPE, 2018-2024 (USD MILLION)
TABLE 10. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY TYPE, 2025-2030 (USD MILLION)
TABLE 11. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY DISCHARGE PRODUCED PLASMA, BY REGION, 2018-2024 (USD MILLION)
TABLE 12. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY DISCHARGE PRODUCED PLASMA, BY REGION, 2025-2030 (USD MILLION)
TABLE 13. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY LASER PRODUCED PLASMA, BY REGION, 2018-2024 (USD MILLION)
TABLE 14. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY LASER PRODUCED PLASMA, BY REGION, 2025-2030 (USD MILLION)
TABLE 15. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY POWER OUTPUT, 2018-2024 (USD MILLION)
TABLE 16. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY POWER OUTPUT, 2025-2030 (USD MILLION)
TABLE 17. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY HIGH POWER, BY REGION, 2018-2024 (USD MILLION)
TABLE 18. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY HIGH POWER, BY REGION, 2025-2030 (USD MILLION)
TABLE 19. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY LOW POWER, BY REGION, 2018-2024 (USD MILLION)
TABLE 20. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY LOW POWER, BY REGION, 2025-2030 (USD MILLION)
TABLE 21. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY MEDIUM POWER, BY REGION, 2018-2024 (USD MILLION)
TABLE 22. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY MEDIUM POWER, BY REGION, 2025-2030 (USD MILLION)
TABLE 23. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY APPLICATION, 2018-2024 (USD MILLION)
TABLE 24. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY APPLICATION, 2025-2030 (USD MILLION)
TABLE 25. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY RESEARCH AND DEVELOPMENT, BY REGION, 2018-2024 (USD MILLION)
TABLE 26. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY RESEARCH AND DEVELOPMENT, BY REGION, 2025-2030 (USD MILLION)
TABLE 27. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY SEMICONDUCTOR MANUFACTURING, BY REGION, 2018-2024 (USD MILLION)
TABLE 28. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY SEMICONDUCTOR MANUFACTURING, BY REGION, 2025-2030 (USD MILLION)
TABLE 29. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY FRONT END LITHOGRAPHY, BY REGION, 2018-2024 (USD MILLION)
TABLE 30. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY FRONT END LITHOGRAPHY, BY REGION, 2025-2030 (USD MILLION)
TABLE 31. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY MASK INSPECTION AND METROLOGY, BY REGION, 2018-2024 (USD MILLION)
TABLE 32. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY MASK INSPECTION AND METROLOGY, BY REGION, 2025-2030 (USD MILLION)
TABLE 33. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY SEMICONDUCTOR MANUFACTURING, 2018-2024 (USD MILLION)
TABLE 34. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY SEMICONDUCTOR MANUFACTURING, 2025-2030 (USD MILLION)
TABLE 35. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY END USER, 2018-2024 (USD MILLION)
TABLE 36. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY END USER, 2025-2030 (USD MILLION)
TABLE 37. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY FOUNDRIES, BY REGION, 2018-2024 (USD MILLION)
TABLE 38. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY FOUNDRIES, BY REGION, 2025-2030 (USD MILLION)
TABLE 39. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY INTEGRATED DEVICE MANUFACTURERS, BY REGION, 2018-2024 (USD MILLION)
TABLE 40. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY INTEGRATED DEVICE MANUFACTURERS, BY REGION, 2025-2030 (USD MILLION)
TABLE 41. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY RESEARCH INSTITUTIONS, BY REGION, 2018-2024 (USD MILLION)
TABLE 42. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY RESEARCH INSTITUTIONS, BY REGION, 2025-2030 (USD MILLION)
TABLE 43. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY THIRD PARTY SERVICE PROVIDERS, BY REGION, 2018-2024 (USD MILLION)
TABLE 44. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY THIRD PARTY SERVICE PROVIDERS, BY REGION, 2025-2030 (USD MILLION)
TABLE 45. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY COMPONENT, 2018-2024 (USD MILLION)
TABLE 46. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY COMPONENT, 2025-2030 (USD MILLION)
TABLE 47. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY COLLECTOR MIRRORS, BY REGION, 2018-2024 (USD MILLION)
TABLE 48. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY COLLECTOR MIRRORS, BY REGION, 2025-2030 (USD MILLION)
TABLE 49. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY MAINTENANCE SERVICES, BY REGION, 2018-2024 (USD MILLION)
TABLE 50. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY MAINTENANCE SERVICES, BY REGION, 2025-2030 (USD MILLION)
TABLE 51. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY FIELD SERVICES AND TECHNICAL SUPPORT, BY REGION, 2018-2024 (USD MILLION)
TABLE 52. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY FIELD SERVICES AND TECHNICAL SUPPORT, BY REGION, 2025-2030 (USD MILLION)
TABLE 53. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY SPARE PARTS, BY REGION, 2018-2024 (USD MILLION)
TABLE 54. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY SPARE PARTS, BY REGION, 2025-2030 (USD MILLION)
TABLE 55. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY MAINTENANCE SERVICES, 2018-2024 (USD MILLION)
TABLE 56. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY MAINTENANCE SERVICES, 2025-2030 (USD MILLION)
TABLE 57. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY OPTICS, BY REGION, 2018-2024 (USD MILLION)
TABLE 58. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY OPTICS, BY REGION, 2025-2030 (USD MILLION)
TABLE 59. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY EUV FILTERS, BY REGION, 2018-2024 (USD MILLION)
TABLE 60. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY EUV FILTERS, BY REGION, 2025-2030 (USD MILLION)
TABLE 61. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY MIRROR COATINGS, BY REGION, 2018-2024 (USD MILLION)
TABLE 62. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY MIRROR COATINGS, BY REGION, 2025-2030 (USD MILLION)
TABLE 63. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY OPTICS, 2018-2024 (USD MILLION)
TABLE 64. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY OPTICS, 2025-2030 (USD MILLION)
TABLE 65. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY SOURCE SYSTEMS, BY REGION, 2018-2024 (USD MILLION)
TABLE 66. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY SOURCE SYSTEMS, BY REGION, 2025-2030 (USD MILLION)
TABLE 67. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY DEPLOYMENT STAGE, 2018-2024 (USD MILLION)
TABLE 68. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY DEPLOYMENT STAGE, 2025-2030 (USD MILLION)
TABLE 69. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY NEW INSTALLATIONS, BY REGION, 2018-2024 (USD MILLION)
TABLE 70. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY NEW INSTALLATIONS, BY REGION, 2025-2030 (USD MILLION)
TABLE 71. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY REPLACEMENT SYSTEMS, BY REGION, 2018-2024 (USD MILLION)
TABLE 72. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY REPLACEMENT SYSTEMS, BY REGION, 2025-2030 (USD MILLION)
TABLE 73. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY UPGRADES AND RETROFITS, BY REGION, 2018-2024 (USD MILLION)
TABLE 74. GLOBAL EUV LIGHT SOURCES MARKET SIZE, BY UPGRADES AND RETROFITS, BY REGION, 2025-2030 (USD MILLION)
TABLE 75. AMERICAS EUV LIGHT SOURCES MARKET SIZE, BY TYPE, 2018-2024 (USD MILLION)
TABLE 76. AMERICAS EUV LIGHT SOURCES MARKET SIZE, BY TYPE, 2025-2030 (USD MILLION)
TABLE 77. AMERICAS EUV LIGHT SOURCES MARKET SIZE, BY POWER OUTPUT, 2018-2024 (USD MILLION)
TABLE 78. AMERICAS EUV LIGHT SOURCES MARKET SIZE, BY POWER OUTPUT, 2025-2030 (USD MILLION)
TABLE 79. AMERICAS EUV LIGHT SOURCES MARKET SIZE, BY APPLICATION, 2018-2024 (USD MILLION)
TABLE 80. AMERICAS EUV LIGHT SOURCES MARKET SIZE, BY APPLICATION, 2025-2030 (USD MILLION)
TABLE 81. AMERICAS EUV LIGHT SOURCES MARKET SIZE, BY SEMICONDUCTOR MANUFACTURING, 2018-2024 (USD MILLION)
TABLE 82. AMERICAS EUV LIGHT SOURCES MARKET SIZE, BY SEMICONDUCTOR MANUFACTURING, 2025-2030 (USD MILLION)
TABLE 83. AMERICAS EUV LIGHT SOURCES MARKET SIZE, BY END USER, 2018-2024 (USD MILLION)
TABLE 84. AMERICAS EUV LIGHT SOURCES MARKET SIZE, BY END USER, 2025-2030 (USD MILLION)
TABLE 85. AMERICAS EUV LIGHT SOURCES MARKET SIZE, BY COMPONENT, 2018-2024 (USD MILLION)
TABLE 86. AMERICAS EUV LIGHT SOURCES MARKET SIZE, BY COMPONENT, 2025-2030 (USD MILLION)
TABLE 87. AMERICAS EUV LIGHT SOURCES MARKET SIZE, BY MAINTENANCE SERVICES, 2018-2024 (USD MILLION)
TABLE 88. AMERICAS EUV LIGHT SOURCES MARKET SIZE, BY MAINTENANCE SERVICES, 2025-2030 (USD MILLION)
TABLE 89. AMERICAS EUV LIGHT SOURCES MARKET SIZE, BY OPTICS, 2018-2024 (USD MILLION)
TABLE 90. AMERICAS EUV LIGHT SOURCES MARKET SIZE, BY OPTICS, 2025-2030 (USD MILLION)
TABLE 91. AMERICAS EUV LIGHT SOURCES MARKET SIZE, BY DEPLOYMENT STAGE, 2018-2024 (USD MILLION)
TABLE 92. AMERICAS EUV LIGHT SOURCES MARKET SIZE, BY DEPLOYMENT STAGE, 2025-2030 (USD MILLION)
TABLE 93. AMERICAS EUV LIGHT SOURCES MARKET SIZE, BY COUNTRY, 2018-2024 (USD MILLION)
TABLE 94. AMERICAS EUV LIGHT SOURCES MARKET SIZE, BY COUNTRY, 2025-2030 (USD MILLION)
TABLE 95. UNITED STATES EUV LIGHT SOURCES MARKET SIZE, BY TYPE, 2018-2024 (USD MILLION)
TABLE 96. UNITED STATES EUV LIGHT SOURCES MARKET SIZE, BY TYPE, 2025-2030 (USD MILLION)
TABLE 97. UNITED STATES EUV LIGHT SOURCES MARKET SIZE, BY POWER OUTPUT, 2018-2024 (USD MILLION)
TABLE 98. UNITED STATES EUV LIGHT SOURCES MARKET SIZE, BY POWER OUTPUT, 2025-2030 (USD MILLION)
TABLE 99. UNITED STATES EUV LIGHT SOURCES MARKET SIZE, BY APPLICATION, 2018-2024 (USD MILLION)
TABLE 100. UNITED STATES EUV LIGHT SOURCES MARKET SIZE, BY APPLICATION, 2025-2030 (USD MILLION)
TABLE 101. UNITED STATES EUV LIGHT SOURCES MARKET SIZE, BY SEMICONDUCTOR MANUFACTURING, 2018-2024 (USD MILLION)
TABLE 102. UNITED STATES EUV LIGHT SOURCES MARKET SIZE, BY SEMICONDUCTOR MANUFACTURING, 2025-2030 (USD MILLION)
TABLE 103. UNITED STATES EUV LIGHT SOURCES MARKET SIZE, BY END USER, 2018-2024 (USD MILLION)
TABLE 104. UNITED STATES EUV LIGHT SOURCES MARKET SIZE, BY END USER, 2025-2030 (USD MILLION)
TABLE 105. UNITED STATES EUV LIGHT SOURCES MARKET SIZE, BY COMPONENT, 2018-2024 (USD MILLION)
TABLE 106. UNITED STATES EUV LIGHT SOURCES MARKET SIZE, BY COMPONENT, 2025-2030 (USD MILLION)
TABLE 107. UNITED STATES EUV LIGHT SOURCES MARKET SIZE, BY MAINTENANCE SERVICES, 2018-2024 (USD MILLION)
TABLE 108. UNITED STATES EUV LIGHT SOURCES MARKET SIZE, BY MAINTENANCE SERVICES, 2025-2030 (USD MILLION)
TABLE 109. UNITED STATES EUV LIGHT SOURCES MARKET SIZE, BY OPTICS, 2018-2024 (USD MILLION)
TABLE 110. UNITED STATES EUV LIGHT SOURCES MARKET SIZE, BY OPTICS, 2025-2030 (USD MILLION)
TABLE 111. UNITED STATES EUV LIGHT SOURCES MARKET SIZE, BY DEPLOYMENT STAGE, 2018-2024 (USD MILLION)
TABLE 112. UNITED STATES EUV LIGHT SOURCES MARKET SIZE, BY DEPLOYMENT STAGE, 2025-2030 (USD MILLION)
TABLE 113. UNITED STATES EUV LIGHT SOURCES MARKET SIZE, BY STATE, 2018-2024 (USD MILLION)
TABLE 114. UNITED STATES EUV LIGHT SOURCES MARKET SIZE, BY STATE, 2025-2030 (USD MILLION)
TABLE 115. CANADA EUV LIGHT SOURCES MARKET SIZE, BY TYPE, 2018-2024 (USD MILLION)
TABLE 116. CANADA EUV LIGHT SOURCES MARKET SIZE, BY TYPE, 2025-2030 (USD MILLION)
TABLE 117. CANADA EUV LIGHT SOURCES MARKET SIZE, BY POWER OUTPUT, 2018-2024 (USD MILLION)
TABLE 118. CANADA EUV LIGHT SOURCES MARKET SIZE, BY POWER OUTPUT, 2025-2030 (USD MILLION)
TABLE 119. CANADA EUV LIGHT SOURCES MARKET SIZE, BY APPLICATION, 2018-2024 (USD MILLION)
TABLE 120. CANADA EUV LIGHT SOURCES MARKET SIZE, BY APPLICATION, 2025-2030 (USD MILLION)
TABLE 121. CANADA EUV LIGHT SOURCES MARKET SIZE, BY SEMICONDUCTOR MANUFACTURING, 2018-2024 (USD MILLION)
TABLE 122. CANADA EUV LIGHT SOURCES MARKET SIZE, BY SEMICONDUCTOR MANUFACTURING, 2025-2030 (USD MILLION)
TABLE 123. CANADA EUV LIGHT SOURCES MARKET SIZE, BY END USER, 2018-2024 (USD MILLION)
TABLE 124. CANADA EUV LIGHT SOURCES MARKET SIZE, BY END USER, 2025-2030 (USD MILLION)
TABLE 125. CANADA EUV LIGHT SOURCES MARKET SIZE, BY COMPONENT, 2018-2024 (USD MILLION)
TABLE 126. CANADA EUV LIGHT SOURCES MARKET SIZE, BY COMPONENT, 2025-2030 (USD MILLION)
TABLE 127. CANADA EUV LIGHT SOURCES MARKET SIZE, BY MAINTENANCE SERVICES, 2018-2024 (USD MILLION)
TABLE 128. CANADA EUV LIGHT SOURCES MARKET SIZE, BY MAINTENANCE SERVICES, 2025-2030 (USD MILLION)
TABLE 129. CANADA EUV LIGHT SOURCES MARKET SIZE, BY OPTICS, 2018-2024 (USD MILLION)
TABLE 130. CANADA EUV LIGHT SOURCES MARKET SIZE, BY OPTICS, 2025-2030 (USD MILLION)
TABLE 131. CANADA EUV LIGHT SOURCES MARKET SIZE, BY DEPLOYMENT STAGE, 2018-2024 (USD MILLION)
TABLE 132. CANADA EUV LIGHT SOURCES MARKET SIZE, BY DEPLOYMENT STAGE, 2025-2030 (USD MILLION)
TABLE 133. MEXICO EUV LIGHT SOURCES MARKET SIZE, BY TYPE, 2018-2024 (USD MILLION)
TABLE 134. MEXICO EUV LIGHT SOURCES MARKET SIZE, BY TYPE, 2025-2030 (USD MILLION)
TABLE 135. MEXICO EUV LIGHT SOURCES MARKET SIZE, BY POWER OUTPUT, 2018-2024 (USD MILLION)
TABLE 136. MEXICO EUV LIGHT SOURCES MARKET SIZE, BY POWER OUTPUT, 2025-2030 (USD MILLION)
TABLE 137. MEXICO EUV LIGHT SOURCES MARKET SIZE, BY APPLICATION, 2018-2024 (USD MILLION)
TABLE 138. MEXICO EUV LIGHT SOURCES MARKET SIZE, BY APPLICATION, 2025-2030 (USD MILLION)
TABLE 139. MEXICO EUV LIGHT SOURCES MARKET SIZE, BY SEMICONDUCTOR MANUFACTURING, 2018-2024 (USD MILLION)
TABLE 140. MEXICO EUV LIGHT SOURCES MARKET SIZE, BY SEMICONDUCTOR MANUFACTURING, 2025-2030 (USD MILLION)
TABLE 141. MEXICO EUV LIGHT SOURCES MARKET SIZE, BY END USER, 2018-2024 (USD MILLION)
TABLE 142. MEXICO EUV LIGHT SOURCES MARKET SIZE, BY END USER, 2025-2030 (USD MILLION)
TABLE 143. MEXICO EUV LIGHT SOURCES MARKET SIZE, BY COMPONENT, 2018-2024 (USD MILLION)
TABLE 144. MEXICO EUV LIGHT SOURCES MARKET SIZE, BY COMPONENT, 2025-2030 (USD MILLION)
TABLE 145. MEXICO EUV LIGHT SOURCES MARKET SIZE, BY MAINTENANCE SERVICES, 2018-2024 (USD MILLION)
TABLE 146. MEXICO EUV LIGHT SOURCES MARKET SIZE, BY MAINTENANCE SERVICES, 2025-2030 (USD MILLION)
TABLE 147. MEXICO EUV LIGHT SOURCES MARKET SIZE, BY OPTICS, 2018-2024 (USD MILLION)
TABLE 148. MEXICO EUV LIGHT SOURCES MARKET SIZE, BY OPTICS, 2025-2030 (USD MILLION)
TABLE 149. MEXICO EUV LIGHT SOURCES MARKET SIZE, BY DEPLOYMENT STAGE, 2018-2024 (USD MILLION)
TABLE 150. MEXICO EUV LIGHT SOURCES MARKET SIZE, BY DEPLOYMENT STAGE, 2025-2030 (USD MILLION)
TABLE 151. BRAZIL EUV LIGHT SOURCES MARKET SIZE, BY TYPE, 2018-2024 (USD MILLION)
TABLE 152. BRAZIL EUV LIGHT SOURCES MARKET SIZE, BY TYPE, 2025-2030 (USD MILLION)
TABLE 153. BRAZIL EUV LIGHT SOURCES MARKET SIZE, BY POWER OUTPUT, 2018-2024 (USD MILLION)
TABLE 154. BRAZIL EUV LIGHT SOURCES MARKET SIZE, BY POWER OUTPUT, 2025-2030 (USD MILLION)
TABLE 155. BRAZIL EUV LIGHT SOURCES MARKET SIZE, BY APPLICATION, 2018-2024 (USD MILLION)
TABLE 156. BRAZIL EUV LIGHT SOURCES MARKET SIZE, BY APPLICATION, 2025-2030 (USD MILLION)
TABLE 157. BRAZIL EUV LIGHT SOURCES MARKET SIZE, BY SEMICONDUCTOR MANUFACTURING, 2018-2024 (USD MILLION)
TABLE 158. BRAZIL EUV LIGHT SOURCES MARKET SIZE, BY SEMICONDUCTOR MANUFACTURING, 2025-2030 (USD MILLION)
TABLE 159. BRAZIL EUV LIGHT SOURCES MARKET SIZE, BY END USER, 2018-2024 (USD MILLION)
TABLE 160. BRAZIL EUV LIGHT SOURCES MARKET SIZE, BY END USER, 2025-2030 (USD MILLION)
TABLE 161. BRAZIL EUV LIGHT SOURCES MARKET SIZE, BY COMPONENT, 2018-2024 (USD MILLION)
TABLE 162. BRAZIL EUV LIGHT SOURCES MARKET SIZE, BY COMPONENT, 2025-2030 (USD MILLION)
TABLE 163. BRAZIL EUV LIGHT SOURCES MARKET SIZE, BY MAINTENANCE SERVICES, 2018-2024 (USD MILLION)
TABLE 164. BRAZIL EUV LIGHT SOURCES MARKET SIZE, BY MAINTENANCE SERVICES, 2025-2030 (USD MILLION)
TABLE 165. BRAZIL EUV LIGHT SOURCES MARKET SIZE, BY OPTICS, 2018-2024 (USD MILLION)
TABLE 166. BRAZIL EUV LIGHT SOURCES MARKET SIZE, BY OPTICS, 2025-2030 (USD MILLION)
TABLE 167. BRAZIL EUV LIGHT SOURCES MARKET SIZE, BY DEPLOYMENT STAGE, 2018-2024 (USD MILLION)
TABLE 168. BRAZIL EUV LIGHT SOURCES MARKET SIZE, BY DEPLOYMENT STAGE, 2025-2030 (USD MILLION)
TABLE 169. ARGENTINA EUV LIGHT SOURCES MARKET SIZE, BY TYPE, 2018-2024 (USD MILLION)
TABLE 170. ARGENTINA EUV LIGHT SOURCES MARKET SIZE, BY TYPE, 2025-2030 (USD MILLION)
TABLE 171. ARGENTINA EUV LIGHT SOURCES MARKET SIZE, BY POWER OUTPUT, 2018-2024 (USD MILLION)
TABLE 172. ARGENTINA EUV LIGHT SOURCES MARKET SIZE, BY POWER OUTPUT, 2025-2030 (USD MILLION)
TABLE 173. ARGENTINA EUV LIGHT SOURCES MARKET SIZE, BY APPLICATION, 2018-2024 (USD MILLION)
TABLE 174. ARGENTINA EUV LIGHT SOURCES MARKET SIZE, BY APPLICATION, 2025-2030 (USD MILLION)
TABLE 175. ARGENTINA EUV LIGHT SOURCES MARKET SIZE, BY SEMICONDUCTOR MANUFACTURING, 2018-2024 (USD MILLION)
TABLE 176. ARGENTINA EUV LIGHT SOURCES MARKET SIZE, BY SEMICONDUCTOR MANUFACTURING, 2025-2030 (USD MILLION)
TABLE 177. ARGENTINA EUV LIGHT SOURCES MARKET SIZE, BY END USER, 2018-2024 (USD MILLION)
TABLE 178. ARGENTINA EUV LIGHT SOURCES MARKET SIZE, BY END USER, 2025-2030 (USD MILLION)
TABLE 179. ARGENTINA EUV LIGHT SOURCES MARKET SIZE, BY COMPONENT, 2018-2024 (USD MILLION)
TABLE 180. ARGENTINA EUV LIGHT SOURCES MARKET SIZE, BY COMPONENT, 2025-2030 (USD MILLION)
TABLE 181. ARGENTINA EUV LIGHT SOURCES MARKET SIZE, BY MAINTENANCE SERVICES, 2018-2024 (USD MILLION)
TABLE 182. ARGENTINA EUV LIGHT SOURCES MARKET SIZE, BY MAINTENANCE SERVICES, 2025-2030 (USD MILLION)
TABLE 183. ARGENTINA EUV LIGHT SOURCES MARKET SIZE, BY OPTICS, 2018-2024 (USD MILLION)
TABLE 184. ARGENTINA EUV LIGHT SOURCES MARKET SIZE, BY OPTICS, 2025-2030 (USD MILLION)
TABLE 185. ARGENTINA EUV LIGHT SOURCES MARKET SIZE, BY DEPLOYMENT STAGE, 2018-2024 (USD MILLION)
TABLE 186. ARGENTINA EUV LIGHT SOURCES MARKET SIZE, BY DEPLOYMENT STAGE, 2025-2030 (USD MILLION)
TABLE 187. EUROPE, MIDDLE EAST & AFRICA EUV LIGHT SOURCES MARKET SIZE, BY TYPE, 2018-2024 (USD MILLION)
TABLE 188. EUROPE, MIDDLE EAST & AFRICA EUV LIGHT SOURCES MARKET SIZE, BY TYPE, 2025-2030 (USD MILLION)
TABLE 189. EUROPE, MIDDLE EAST & AFRICA EUV LIGHT SOURCES MARKET SIZE, BY POWER OUTPUT, 2018-2024 (USD MILLION)
TABLE 190. EUROPE, MIDDLE EAST & AFRICA EUV LIGHT SOURCES MARKET SIZE, BY POWER OUTPUT, 2025-2030 (USD MILLION)
TABLE 191. EUROPE, MIDDLE EAST & AFRICA EUV LIGHT SOURCES MARKET SIZE, BY APPLICATION, 2018-2024 (USD MILLION)
TABLE 192. EUROPE, MIDDLE EAST & AFRICA EUV LIGHT SOURCES MARKET SIZE, BY APPLICATION, 2025-2030 (USD MILLION)
TABLE 193. EUROPE, MIDDLE EAST & AFRICA EUV LIGHT SOURCES MARKET SIZE, BY SEMICONDUCTOR MANUFACTURING, 2018-2024 (USD MILLION)
TABLE 194. EUROPE, MIDDLE EAST & AFRICA EUV LIGHT SOURCES MARKET SIZE, BY SEMICONDUCTOR MANUFACTURING, 2025-2030 (USD MILLION)
TABLE 195. EUROPE, MIDDLE EAST & AFRICA EUV LIGHT SOURCES MARKET SIZE, BY END USER, 2018-2024 (USD MILLION)
TABLE 196. EUROPE, MIDDLE EAST & AFRICA EUV LIGHT SOURCES MARKET SIZE, BY END USER, 2025-2030 (USD MILLION)
TABLE 197. EUROPE, MIDDLE EAST & AFRICA EUV LIGHT SOURCES MARKET SIZE, BY COMPONENT, 2018-2024 (USD MILLION)
TABLE 198. EUROPE, MIDDLE EAST & AFRICA EUV LIGHT SOURCES MARKET SIZE, BY COMPONENT, 2025-2030 (USD MILLION)
TABLE 199. EUROPE, MIDDLE EAST & AFRICA EUV LIGHT SOURCES MARKET SIZE, BY MAINTENANCE SERVICES, 2018-2024 (USD MILLION)
TABLE 200. EUROPE, MIDDLE EAST & AFRICA EUV LIGHT SOURCES MARKET SIZE, BY MAINTENANCE SERVICES, 2025-2030 (USD MILLION)
TABLE 201. EUROPE, MIDDLE EAST & AFRICA EUV LIGHT SOURCES MARKET SIZE, BY OPTICS, 2018-2024 (USD MILLION)
TABLE 202. EUROPE, MIDDLE EAST & AFRICA EUV LIGHT SOURCES MARKET SIZE, BY OPTICS, 2025-2030 (USD MILLION)
TABLE 203. EUROPE, MIDDLE EAST & AFRICA EUV LIGHT SOURCES MARKET SIZE, BY DEPLOYMENT STAGE, 2018-2024 (USD MILLION)
TABLE 204. EUROPE, MIDDLE EAST & AFRICA EUV LIGHT SOURCES MARKET SIZE, BY DEPLOYMENT STAGE, 2025-2030 (USD MILLION)
TABLE 205. EUROPE, MIDDLE EAST & AFRICA EUV LIGHT SOURCES MARKET SIZE, BY COUNTRY, 2018-2024 (USD MILLION)
TABLE 206. EUROPE, MIDDLE EAST & AFRICA EUV LIGHT SOURCES MARKET SIZE, BY COUNTRY, 2025-2030 (USD MILLION)
TABLE 207. UNITED KINGDOM EUV LIGHT SOURCES MARKET SIZE, BY TYPE, 2018-2024 (USD MILLION)
TABLE 208. UNITED KINGDOM EUV LIGHT SOURCES MARKET SIZE, BY TYPE, 2025-2030 (USD MILLION)
TABLE 209. UNITED KINGDOM EUV LIGHT SOURCES MARKET SIZE, BY POWER OUTPUT, 2018-2024 (USD MILLION)
TABLE 210. UNITED KINGDOM EUV LIGHT SOURCES MARKET SIZE, BY POWER OUTPUT, 2025-2030 (USD MILLION)
TABLE 211. UNITED KINGDOM EUV LIGHT SOURCES MARKET SIZE, BY APPLICATION, 2018-2024 (USD MILLION)
TABLE 212. UNITED KINGDOM EUV LIGHT SOURCES MARKET SIZE, BY APPLICATION, 2025-2030 (USD MILLION)
TABLE 213. UNITED KINGDOM EUV LIGHT SOURCES MARKET SIZE, BY SEMICONDUCTOR MANUFACTURING, 2018-2024 (USD MILLION)
TABLE 214. UNITED KINGDOM EUV LIGHT SOURCES MARKET SIZE, BY SEMICONDUCTOR MANUFACTURING, 2025-2030 (USD MILLION)
TABLE 215. UNITED KINGDOM EUV LIGHT SOURCES MARKET SIZE, BY END USER, 2018-2024 (USD MILLION)
TABLE 216. UNITED KINGDOM EUV LIGHT SOURCES MARKET SIZE, BY END USER, 2025-2030 (USD MILLION)
TABLE 217. UNITED KINGDOM EUV LIGHT SOURCES MARKET SIZE, BY COMPONENT, 2018-2024 (USD MILLION)
TABLE 218. UNITED KINGDOM EUV LIGHT SOURCES MARKET SIZE, BY COMPONENT, 2025-2030 (USD MILLION)
TABLE 219. UNITED KINGDOM EUV LIGHT SOURCES MARKET SIZE, BY MAINTENANCE SERVICES, 2018-2024 (USD MILLION)
TABLE 220. UNITED KINGDOM EUV LIGHT SOURCES MARKET SIZE, BY MAINTENANCE SERVICES, 2025-2030 (USD MILLION)
TABLE 221. UNITED KINGDOM EUV LIGHT SOURCES MARKET SIZE, BY OPTICS, 2018-2024 (USD MILLION)
TABLE 222. UNITED KINGDOM EUV LIGHT SOURCES MARKET SIZE, BY OPTICS, 2025-2030 (USD MILLION)
TABLE 223. UNITED KINGDOM EUV LIGHT SOURCES MARKET SIZE, BY DEPLOYMENT STAGE, 2018-2024 (USD MILLION)
TABLE 224. UNITED KINGDOM EUV LIGHT SOURCES MARKET SIZE, BY DEPLOYMENT STAGE, 2025-2030 (USD MILLION)
TABLE 225. GERMANY EUV LIGHT SOURCES MARKET SIZE, BY TYPE, 2018-2024 (USD MILLION)
TABLE 226. GERMANY EUV LIGHT SOURCES MARKET SIZE, BY TYPE, 2025-2030 (USD MILLION)
TABLE 227. GERMANY EUV LIGHT SOURCES MARKET SIZE, BY POWER OUTPUT, 2018-2024 (USD MILLION)
TABLE 228. GERMANY EUV LIGHT SOURCES MARKET SIZE, BY POWER OUTPUT, 2025-2030 (USD MILLION)
TABLE 229. GERMANY EUV LIGHT SOURCES MARKET SIZE, BY APPLICATION, 2018-2024 (USD MILLION)
TABLE 230. GERMANY EUV LIGHT SOURCES MARKET SIZE, BY APPLICATION, 2025-2030 (USD MILLION)
TABLE 231. GERMANY EUV LIGHT SOURCES MARKET SIZE, BY SEMICONDUCTOR MANUFACTURING, 2018-2024 (USD MILLION)
TABLE 232. GERMANY EUV LIGHT SOURCES MARKET SIZE, BY SEMICONDUCTOR MANUFACTURING, 2025-2030 (USD MILLION)
TABLE 233. GERMANY EUV LIGHT SOURCES MARKET SIZE, BY END USER, 2018-2024 (USD MILLION)
TABLE 234. GERMANY EUV LIGHT SOURCES MARKET SIZE, BY END USER, 2025-2030 (USD MILLION)
TABLE 235. GERMANY EUV LIGHT SOURCES MARKET SIZE, BY COMPONENT, 2018-2024 (USD MILLION)
TABLE 236. GERMANY EUV LIGHT SOURCES MARKET SIZE, BY COMPONENT, 2025-2030 (USD MILLION)
TABLE 237. GERMANY EUV LIGHT SOURCES MARKET SIZE, BY MAINTENANCE SERVICES, 2018-2024 (USD MILLION)
TABLE 238. GERMANY EUV LIGHT SOURCES MARKET SIZE, BY MAINTENANCE SERVICES, 2025-2030 (USD MILLION)
TABLE 239. GERMANY EUV LIGHT SOURCES MARKET SIZE, BY OPTICS, 2018-2024 (USD MILLION)
TABLE 240. GERMANY EUV LIGHT SOURCES MARKET SIZE, BY OPTICS, 2025-2030 (USD MILLION)
TABLE 241. GERMANY EUV LIGHT SOURCES MARKET SIZE, BY DEPLOYMENT STAGE, 2018-2024 (USD MILLION)
TABLE 242. GERMANY EUV LIGHT SOURCES MARKET SIZE, BY DEPLOYMENT STAGE, 2025-2030 (USD MILLION)
TABLE 243. FRANCE EUV LIGHT SOURCES MARKET SIZE, BY TYPE, 2018-2024 (USD MILLION)
TABLE 244. FRANCE EUV LIGHT SOURCES MARKET SIZE, BY TYPE, 2025-2030 (USD MILLION)
TABLE 245. FRANCE EUV LIGHT SOURCES MARKET SIZE, BY POWER OUTPUT, 2018-2024 (USD MILLION)
TABLE 246. FRANCE EUV LIGHT SOURCES MARKET SIZE, BY POWER OUTPUT, 2025-2030 (USD MILLION)
TABLE 247. FRANCE EUV LIGHT SOURCES MARKET SIZE, BY APPLICATION, 2018-2024 (USD MILLION)
TABLE 248. FRANCE EUV LIGHT SOURCES MARKET SIZE, BY APPLICATION, 2025-2030 (USD MILLION)
TABLE 249. FRANCE EUV LIGHT SOURCES MARKET SIZE, BY SEMICONDUCTOR MANUFACTURING, 2018-2024 (USD MILLION)
TABLE 250. FRANCE EUV LIGHT SOURCES MARKET SIZE, BY SEMICONDUCTOR MANUFACTURING, 2025-2030 (USD MILLION)
TABLE 251. FRANCE EUV LIGHT SOURCES MARKET SIZE, BY END USER, 2018-2024 (USD MILLION)
TABLE 252. FRANCE EUV LIGHT SOURCES MARKET SIZE, BY END USER, 2025-2030 (USD MILLION)
TABLE 253. FRANCE EUV LIGHT SOURCES MARKET SIZE, BY COMPONENT, 2018-2024 (USD MILLION)
TABLE 254. FRANCE EUV LIGHT SOURCES MARKET SIZE, BY COMPONENT, 2025-2030 (USD MILLION)
TABLE 255. FRANCE EUV LIGHT SOURCES MARKET SIZE, BY MAINTENANCE SERVICES, 2018-2024 (USD MILLION)
TABLE 256. FRANCE EUV LIGHT SOURCES MARKET SIZE, BY MAINTENANCE SERVICES, 2025-2030 (USD MILLION)
TABLE 257. FRANCE EUV LIGHT SOURCES MARKET SIZE, BY OPTICS, 2018-2024 (USD MILLION)
TABLE 258. FRANCE EUV LIGHT SOURCES MARKET SIZE, BY OPTICS, 2025-2030 (USD MILLION)
TABLE 259. FRANCE EUV LIGHT SOURCES MARKET SIZE, BY DEPLOYMENT STAGE, 2018-2024 (USD MILLION)
TABLE 260. FRANCE EUV LIGHT SOURCES MARKET SIZE, BY DEPLOYMENT STAGE, 2025-2030 (USD MILLION)
TABLE 261. RUSSIA EUV LIGHT SOURCES MARKET SIZE, BY TYPE, 2018-2024 (USD MILLION)
TABLE 262. RUSSIA EUV LIGHT SOURCES MARKET SIZE, BY TYPE, 2025-2030 (USD MILLION)
TABLE 263. RUSSIA EUV LIGHT SOURCES MARKET SIZE, BY POWER OUTPUT, 2018-2024 (USD MILLION)
TABLE 264. RUSSIA EUV LIGHT SOURCES MARKET SIZE, BY POWER OUTPUT, 2025-2030 (USD MILLION)
TABLE 265. RUSSIA EUV LIGHT SOURCES MARKET SIZE, BY APPLICATION, 2018-2024 (USD MILLION)
TABLE 266. RUSSIA EUV LIGHT SOURCES MARKET SIZE, BY APPLICATION, 2025-2030 (USD MILLION)
TABLE 267. RUSSIA EUV LIGHT SOURCES MARKET SIZE, BY SEMICONDUCTOR MANUFACTURING, 2018-2024 (USD MILLION)
TABLE 268. RUSSIA EUV LIGHT SOURCES MARKET SIZE, BY SEMICONDUCTOR MANUFACTURING, 2025-2030 (USD MILLION)
TABLE 269. RUSSIA EUV LIGHT SOURCES MARKET SIZE, BY END USER, 2018-2024 (USD MILLION)
TABLE 270. RUSSIA EUV LIGHT SOURCES MARKET SIZE, BY END USER, 2025-2030 (USD MILLION)
TABLE 271. RUSSIA EUV LIGHT SOURCES MARKET SIZE, BY COMPONENT, 2018-2024 (USD MILLION)
TABLE 272. RUSSIA EUV LIGHT SOURCES MARKET SIZE, BY COMPONENT, 2025-2030 (USD MILLION)
TABLE 273. RUSSIA EUV LIGHT SOURCES MARKET SIZE, BY MAINTENANCE SERVICES, 2018-2024 (USD MILLION)
TABLE 274. RUSSIA EUV LIGHT SOURCES MARKET SIZE, BY MAINTENANCE SERVICES, 2025-2030 (USD MILLION)
TABLE 275. RUSSIA EUV LIGHT SOURCES MARKET SIZE, BY OPTICS, 2018-2024 (USD MILLION)
TABLE 276. RUSSIA EUV LIGHT SOURCES MARKET SIZE, BY OPTICS, 2025-2030 (USD MILLION)
TABLE 277. RUSSIA EUV LIGHT SOURCES MARKET SIZE, BY DEPLOYMENT STAGE, 2018-2024 (USD MILLION)
TABLE 278. RUSSIA EUV LIGHT SOURCES MARKET SIZE, BY DEPLOYMENT STAGE, 2025-2030 (USD MILLION)
TABLE 279. ITALY EUV LIGHT SOURCES MARKET SIZE, BY TYPE, 2018-2024 (USD MILLION)
TABLE 280. ITALY EUV LIGHT SOURCES MARKET SIZE, BY TYPE, 2025-2030 (USD MILLION)
TABLE 281. ITALY EUV LIGHT SOURCES MARKET SIZE, BY POWER OUTPUT, 2018-2024 (USD MILLION)
TABLE 282. ITALY EUV LIGHT SOURCES MARKET SIZE, BY POWER OUTPUT, 2025-2030 (USD MILLION)
TABLE 283. ITALY EUV LIGHT SOURCES MARKET SIZE, BY APPLICATION, 2018-2024 (USD MILLION)
TABLE 284. ITALY EUV LIGHT SOURCES MARKET SIZE, BY APPLICATION, 2025-2030 (USD MILLION)
TABLE 285. ITALY EUV LIGHT SOURCES MARKET SIZE, BY SEMICONDUCTOR MANUFACTURING, 2018-2024 (USD MILLION)
TABLE 286. ITALY EUV LIGHT SOURCES MARKET SIZE, BY SEMICONDUCTOR MANUFACTURING, 2025-2030 (USD MILLION)
TABLE 287. ITALY EUV LIGHT SOURCES MARKET SIZE, BY END USER, 2018-2024 (USD MILLION)
TABLE 288. ITALY EUV LIGHT SOURCES MARKET SIZE, BY END USER, 2025-2030 (USD MILLION)
TABLE 289. ITALY EUV LIGHT SOURCES MARKET SIZE, BY COMPONENT, 2018-2024 (USD MILLION)
TABLE 290. ITALY EUV LIGHT SOURCES MARKET SIZE, BY COMPONENT, 2025-2030 (USD MILLION)
TABLE 291. ITALY EUV LIGHT SOURCES MARKET SIZE, BY MAINTENANCE SERVICES, 2018-2024 (USD MILLION)
TABLE 292. ITALY EUV LIGHT SOURCES MARKET SIZE, BY MAINTENANCE SERVICES, 2025-2030 (USD MILLION)
TABLE 293. ITALY EUV LIGHT SOURCES MARKET SIZE, BY OPTICS, 2018-2024 (USD MILLION)
TABLE 294. ITALY EUV LIGHT SOURCES MARKET SIZE, BY OPTICS, 2025-2030 (USD MILLION)
TABLE 295. ITALY EUV LIGHT SOURCES MARKET SIZE, BY DEPLOYMENT STAGE, 2018-2024 (USD MILLION)
TABLE 296. ITALY EUV LIGHT SOURCES MARKET SIZE, BY DEPLOYMENT STAGE, 2025-2030 (USD MILLION)
TABLE 297. SPAIN EUV LIGHT SOURCES MARKET SIZE, BY TYPE, 2018-2024 (USD MILLION)
TABLE 298. SPAIN EUV LIGHT SOURCES MARKET SIZE, BY TYPE, 2025-2030 (USD MILLION)
TABLE 299. SPAIN EUV LIGHT SOURCES MARKET SIZE, BY POWER OUTPUT, 2018-2024 (USD MILLION)
TABLE 300. SPAIN EUV LIGHT SOURCES MARKET SIZE, BY POWER OUTPUT, 2025-2030 (USD MILLION)
TABLE 301. SPAIN EUV LIGHT SOURCES MARKET SIZE, BY APPLICATION, 2018-2024 (USD MILLION)
TABLE 302. SPAIN EUV LIGHT SOURCES MARKET SIZE, BY APPLICATION, 2025-2030 (USD MILLION)
TABLE 303. SPAIN EUV LIGHT SOURCES MARKET SIZE, BY SEMICONDUCTOR MANUFACTURING, 2018-2024 (USD MILLION)
TABLE 304. SPAIN EUV LIGHT SOURCES MARKET SIZE, BY SEMICONDUCTOR MANUFACTURING, 2025-2030 (USD MILLION)
TABLE 305. SPAIN EUV LIGHT SOURCES MARKET SIZE, BY END USER, 2018-2024 (USD MILLION)
TABLE 306. SPAIN EUV LIGHT SOURCES MARKET SIZE, BY END USER, 2025-2030 (USD MILLION)
TABLE 307. SPAIN EUV LIGHT SOURCES MARKET SIZE, BY COMPONENT, 2018-2024 (USD MILLION)
TABLE 308. SPAIN EUV LIGHT SOURCES MARKET SIZE, BY COMPONENT, 2025-2030 (USD MILLION)
TABLE 309. SPAIN EUV LIGHT SOURCES MARKET SIZE, BY MAINTENANCE SERVICES, 2018-2024 (USD MILLION)
TABLE 310. SPAIN EUV LIGHT SOURCES MARKET SIZE, BY MAINTENANCE SERVICES, 2025-2030 (USD MILLION)
TABLE 311. SPAIN EUV LIGHT SOURCES MARKET SIZE, BY OPTICS, 2018-2024 (USD MILLION)
TABLE 312. SPAIN EUV LIGHT SOURCES MARKET SIZE, BY OPTICS, 2025-2030 (USD MILLION)
TABLE 313. SPAIN EUV LIGHT SOURCES MARKET SIZE, BY DEPLOYMENT STAGE, 2018-2024 (USD MILLION)
TABLE 314. SPAIN EUV LIGHT SOURCES MARKET SIZE, BY DEPLOYMENT STAGE, 2025-2030 (USD MILLION)
TABLE 315. UNITED ARAB EMIRATES EUV LIGHT SOURCES MARKET SIZE, BY TYPE, 2018-2024 (USD MILLION)
TABLE 316. UNITED ARAB EMIRATES EUV LIGHT SOURCES MARKET SIZE, BY TYPE, 2025-2030 (USD MILLION)
TABLE 317. UNITED ARAB EMIRATES EUV LIGHT SOURCES MARKET SIZE, BY POWER OUTPUT, 2018-2024 (USD MILLION)
TABLE 318. UNITED ARAB EMIRATES EUV LIGHT SOURCES MARKET SIZE, BY POWER OUTPUT, 2025-2030 (USD MILLION)
TABLE 319. UNITED ARAB EMIRATES EUV LIGHT SOURCES MARKET SIZE, BY APPLICATION, 2018-2024 (USD MILLION)
TABLE 320. UNITED ARAB EMIRATES EUV LIGHT SOURCES MARKET SIZE, BY APPLICATION, 2025-2030 (USD MILLION)
TABLE 321. UNITED ARAB EMIRATES EUV LIGHT SOURCES MARKET SIZE, BY SEMICONDUCTOR MANUFACTURING, 2018-2024 (USD MILLION)
TABLE 322. UNITED ARAB EMIRATES EUV LIGHT SOURCES MARKET SIZE, BY SEMICONDUCTOR MANUFACTURING, 2025-2030 (USD MILLION)
TABLE 323. UNITED ARAB EMIRATES EUV LIGHT SOURCES MARKET SIZE, BY END USER, 2018-2024 (USD MILLION)
TABLE 324. UNITED ARAB EMIRATES EUV LIGHT SOURCES MARKET SIZE, BY END USER, 2025-2030 (USD MILLION)
TABLE 325. UNITED ARAB EMIRATES EUV LIGHT SOURCES MARKET SIZE, BY COMPONENT, 2018-2024 (USD MILLION)
TABLE 326. UNITED ARAB EMIRATES EUV LIGHT SOURCES MARKET SIZE, BY COMPONENT, 2025-2030 (USD MILLION)
TABLE 327. UNITED ARAB EMIRATES EUV LIGHT SOURCES MARKET SIZE, BY MAINTENANCE SERVICES, 2018-2024 (USD MILLION)
TABLE 328. UNITED ARAB EMIRATES EUV LIGHT SOURCES MARKET SIZE, BY MAINTENANCE SERVICES, 2025-2030 (USD MILLION)
TABLE 329. UNITED ARAB EMIRATES EUV LIGHT SOURCES MARKET SIZE, BY OPTICS, 2018-2024 (USD MILLION)
TABLE 330. UNITED ARAB EMIRATES EUV LIGHT SOURCES MARKET SIZE, BY OPTICS, 2025-2030 (USD MILLION)
TABLE 331. UNITED ARAB EMIRATES EUV LIGHT SOURCES MARKET SIZE, BY DEPLOYMENT STAGE, 2018-2024 (USD MILLION)
TABLE 332. UNITED ARAB EMIRATES EUV LIGHT SOURCES MARKET SIZE, BY DEPLOYMENT STAGE, 2025-2030 (USD MILLION)
TABLE 333. SAUDI ARABIA EUV LIGHT SOURCES MARKET SIZE, BY TYPE, 2018-2024 (USD MILLION)
TABLE 334. SAUDI ARABIA EUV LIGHT SOURCES MARKET SIZE, BY TYPE, 2025-2030 (USD MILLION)
TABLE 335. SAUDI ARABIA EUV LIGHT SOURCES MARKET SIZE, BY POWER OUTPUT, 2018-2024 (USD MILLION)
TABLE 336. SAUDI ARABIA EUV LIGHT SOURCES MARKET SIZE, BY POWER OUTPUT, 2025-2030 (USD MILLION)
TABLE 337. SAUDI ARABIA EUV LIGHT SOURCES MARKET SIZE, BY APPLICATION, 2018-2024 (USD MILLION)
TABLE 338. SAUDI ARABIA EUV LIGHT SOURCES MARKET SIZE, BY APPLICATION, 2025-2030 (USD MILLION)
TABLE 339. SAUDI ARABIA EUV LIGHT SOURCES MARKET SIZE, BY SEMICONDUCTOR MANUFACTURING, 2018-2024 (USD MILLION)
TABLE 340. SAUDI ARABIA EUV LIGHT SOURCES MARKET SIZE, BY SEMICONDUCTOR MANUFACTURING, 2025-2030 (USD MILLION)
TABLE 341. SAUDI ARABIA EUV LIGHT SOURCES MARKET SIZE, BY END USER, 2018-2024 (USD MILLION)
TABLE 342. SAUDI ARABIA EUV LIGHT SOURCES MARKET SIZE, BY END USER, 2025-2030 (USD MILLION)
TABLE 343. SAUDI ARABIA EUV LIGHT SOURCES MARKET SIZE, BY COMPONENT, 2018-2024 (USD MILLION)
TABLE 344. SAUDI ARABIA

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Companies Mentioned

The companies profiled in this EUV Light Sources market report include:
  • ASML Holding N.V.
  • Gigaphoton Inc.
  • Ushio Inc.
  • Shanghai Micro Electronics Equipment Co., Ltd.
  • XTREME technologies GmbH
  • Canon Electron Optics Co., Ltd.