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EUV Mask Defect Detection Equipment Market - Global Forecast 2026-2032- Product Image
EUV Mask Defect Detection Equipment Market - Global Forecast 2026-2032- Product Image
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EUV Mask Defect Detection Equipment Market - Global Forecast 2026-2032

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    Report

  • 193 Pages
  • January 2026
  • Region: Global
  • 360iResearch™
  • ID: 6122408
1h Free Analyst Time
Description Jump to:
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The EUV Mask Defect Detection Equipment Market is pivotal for advanced semiconductor manufacturing, serving as the foundation for yield improvement, operational precision, and informed risk management. As detection requirements intensify alongside greater process complexity, this market enables decision-makers to maintain competitive and technological advantage.

Market Snapshot: EUV Mask Defect Detection Equipment Market

The EUV Mask Defect Detection Equipment Market expanded from USD 1.66 billion in 2025 to USD 1.84 billion in 2026, and is forecast to reach USD 3.56 billion by 2032, driven by a CAGR of 11.47%. This growth reflects both demand for tighter defect control at advanced nodes and broader operational adoption across integrated device manufacturers, merchant mask suppliers, and research institutes.

Scope & Segmentation of the EUV Mask Defect Detection Equipment Market

This report comprehensively analyzes the evolving landscape and purchasing criteria shaping the EUV mask defect detection sector for senior stakeholders. Key segmentation facets include:

  • Product Types: Actinic systems (designed to mirror EUV exposure conditions) and non-actinic systems (optimized for throughput and operational convenience).
  • Inspection Techniques: Optical architectures focused on detection efficiency and cost, and e-beam approaches supporting ultra-high sensitivity levels for challenging defect scenarios.
  • Applications: Blank inspection for upstream process control, patterned mask inspection for post-fabrication review, and repair/verification steps ensuring reliability after process changes.
  • End User Types: Captive mask shops within device manufacturers, merchant mask suppliers serving multiple clients, research institutes, and pilot manufacturing facilities.
  • Deployment Models: On-premises systems for critical environments prioritizing data residency and uptime, and hybrid models featuring remote diagnostics and digital twins for maintenance optimization.
  • Regional Focus: The Americas, Europe, Middle East, Africa, and Asia-Pacific, with each region exhibiting unique adoption patterns and procurement priorities supported by distinct policy environments.
  • Component and Subsystem Focus: Emphasis on compute architecture, automation interfaces, and contamination control for effective real-world deployment.

Key Takeaways for Senior Decision-Makers

  • Sensitivity alone no longer defines competitive advantage; comprehensive solutions pair reliable detection with actionable insights, robust software, and strong integration into yield improvement programs.
  • The market is shifting from periodic inspections toward lifecycle defectivity control, prioritizing continuous data-driven detection and feedback that support rapid process stabilization and optimize cycle times.
  • Procurement decisions increasingly balance tool specifications with total lifecycle value—considering service infrastructure, upgradeability, spares access, and the vendor’s ability to support cross-functional needs.
  • Operational risk and policy trends, such as tariff-driven component sourcing and localization mandates, are prompting organizations to adopt modular upgrade strategies and diversify supplier relationships.
  • Software capabilities for defect classification and data governance, along with seamless integration into existing analytics platforms, are emerging as primary differentiators for equipment selection.

Tariff Impact: U.S. Tariffs Reshape Supply Chains and Procurement Strategies

The introduction of United States tariffs in 2025 has added new complexities to procurement and capital planning. Organizations face uncertainties in landed costs for tools, subcomponents, and spares, making rigorous contractual clarity essential. Suppliers are responding with dual-sourcing of high-risk parts, shifting assembly locations, and modularizing designs to enable phased upgrades—with the goal of minimizing supply disruptions and configuration variability.

These regional policy shifts encourage the development of local service capabilities, streamlined inventory management for spares, and contingency planning to ensure production continuity despite tariff-driven volatility. Buyers are increasingly adopting phased purchases and modular upgrades, closely managing qualification overhead and emphasizing backward compatibility.

Methodology & Data Sources: Decision-Ready Market Intelligence

Research findings are built on triangulation: structured interviews with stakeholders across mask shops, wafer fabs, process integration groups, and equipment suppliers, combined with analysis of technical documentation, standards activity, patent filings, and supplier communications. Insights are cross-validated across buyer types and regions to distill operationally relevant procurement drivers.

Why This Report Matters

  • Delivers actionable insights to help senior leaders align defect detection investments with evolving technology and risk management requirements.
  • Enables benchmarking of procurement strategies and supplier capabilities in the context of geopolitical shifts, lifecycle service needs, and supply assurance.
  • Supports informed capital allocation and organizational planning for advanced-node manufacturing success.

Conclusion

The EUV Mask Defect Detection Equipment Market is undergoing rapid evolution as technology, software, service, and policy realities converge. Leaders equipped with comprehensive segmentation and supplier insights are positioned to meet manufacturing goals amid increasing complexity and change.

Table of Contents

1. Preface
1.1. Objectives of the Study
1.2. Market Definition
1.3. Market Segmentation & Coverage
1.4. Years Considered for the Study
1.5. Currency Considered for the Study
1.6. Language Considered for the Study
1.7. Key Stakeholders
2. Research Methodology
2.1. Introduction
2.2. Research Design
2.2.1. Primary Research
2.2.2. Secondary Research
2.3. Research Framework
2.3.1. Qualitative Analysis
2.3.2. Quantitative Analysis
2.4. Market Size Estimation
2.4.1. Top-Down Approach
2.4.2. Bottom-Up Approach
2.5. Data Triangulation
2.6. Research Outcomes
2.7. Research Assumptions
2.8. Research Limitations
3. Executive Summary
3.1. Introduction
3.2. CXO Perspective
3.3. Market Size & Growth Trends
3.4. Market Share Analysis, 2025
3.5. FPNV Positioning Matrix, 2025
3.6. New Revenue Opportunities
3.7. Next-Generation Business Models
3.8. Industry Roadmap
4. Market Overview
4.1. Introduction
4.2. Industry Ecosystem & Value Chain Analysis
4.2.1. Supply-Side Analysis
4.2.2. Demand-Side Analysis
4.2.3. Stakeholder Analysis
4.3. Porter’s Five Forces Analysis
4.4. PESTLE Analysis
4.5. Market Outlook
4.5.1. Near-Term Market Outlook (0-2 Years)
4.5.2. Medium-Term Market Outlook (3-5 Years)
4.5.3. Long-Term Market Outlook (5-10 Years)
4.6. Go-to-Market Strategy
5. Market Insights
5.1. Consumer Insights & End-User Perspective
5.2. Consumer Experience Benchmarking
5.3. Opportunity Mapping
5.4. Distribution Channel Analysis
5.5. Pricing Trend Analysis
5.6. Regulatory Compliance & Standards Framework
5.7. ESG & Sustainability Analysis
5.8. Disruption & Risk Scenarios
5.9. Return on Investment & Cost-Benefit Analysis
6. Cumulative Impact of United States Tariffs 2025
7. Cumulative Impact of Artificial Intelligence 2025
8. EUV Mask Defect Detection Equipment Market, by Product
8.1. Hardware
8.2. Services
8.2.1. Maintenance
8.2.1.1. Corrective
8.2.1.2. Preventive
8.2.2. Training
8.3. Software
8.3.1. Data Analytics
8.3.2. Machine Vision
9. EUV Mask Defect Detection Equipment Market, by Tool Type
9.1. AOI
9.2. E Beam Inspection
9.3. Laser Scanning
9.4. SEM
10. EUV Mask Defect Detection Equipment Market, by Application
10.1. Logic
10.1.1. CPU
10.1.2. FPGA
10.1.3. GPU
10.2. Memory
10.2.1. DRAM
10.2.2. NAND Flash
11. EUV Mask Defect Detection Equipment Market, by Technology
11.1. Bright Field
11.2. Dark Field
12. EUV Mask Defect Detection Equipment Market, by Inspection Mode
12.1. Inline
12.1.1. In-Line Reticle
12.1.2. In-Line Wafer
12.2. Offline
12.2.1. Post-Process
12.2.2. Pre-Process
13. EUV Mask Defect Detection Equipment Market, by Mask Type
13.1. Blank
13.2. Patterned
14. EUV Mask Defect Detection Equipment Market, by Region
14.1. Americas
14.1.1. North America
14.1.2. Latin America
14.2. Europe, Middle East & Africa
14.2.1. Europe
14.2.2. Middle East
14.2.3. Africa
14.3. Asia-Pacific
15. EUV Mask Defect Detection Equipment Market, by Group
15.1. ASEAN
15.2. GCC
15.3. European Union
15.4. BRICS
15.5. G7
15.6. NATO
16. EUV Mask Defect Detection Equipment Market, by Country
16.1. United States
16.2. Canada
16.3. Mexico
16.4. Brazil
16.5. United Kingdom
16.6. Germany
16.7. France
16.8. Russia
16.9. Italy
16.10. Spain
16.11. China
16.12. India
16.13. Japan
16.14. Australia
16.15. South Korea
17. United States EUV Mask Defect Detection Equipment Market
18. China EUV Mask Defect Detection Equipment Market
19. Competitive Landscape
19.1. Market Concentration Analysis, 2025
19.1.1. Concentration Ratio (CR)
19.1.2. Herfindahl Hirschman Index (HHI)
19.2. Recent Developments & Impact Analysis, 2025
19.3. Product Portfolio Analysis, 2025
19.4. Benchmarking Analysis, 2025
19.5. Advantest Corporation
19.6. Agilent Technologies, Inc.
19.7. Anton Paar GmbH
19.8. ASML Holding N.V.
19.9. Bruker Corporation
19.10. Canon Inc.
19.11. Carl Zeiss AG
19.12. FEI Company
19.13. Hitachi High-Tech Corporation
19.14. JEOL Ltd.
19.15. KLA Corporation
19.16. Lam Research Corporation
19.17. Lasertec Corporation
19.18. Malvern Panalytical Ltd.
19.19. Mettler-Toledo International Inc.
19.20. Nanometrics Incorporated
19.21. Nikon Corporation
19.22. Nova Measuring Instruments Ltd.
19.23. PerkinElmer, Inc.
19.24. Rudolph Technologies, Inc.
19.25. Shimadzu Corporation
19.26. Thermo Fisher Scientific Inc.
19.27. Tokyo Electron Limited
19.28. Waters Corporation
List of Figures
FIGURE 1. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, 2018-2032 (USD MILLION)
FIGURE 2. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SHARE, BY KEY PLAYER, 2025
FIGURE 3. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET, FPNV POSITIONING MATRIX, 2025
FIGURE 4. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY PRODUCT, 2025 VS 2026 VS 2032 (USD MILLION)
FIGURE 5. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TOOL TYPE, 2025 VS 2026 VS 2032 (USD MILLION)
FIGURE 6. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY APPLICATION, 2025 VS 2026 VS 2032 (USD MILLION)
FIGURE 7. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TECHNOLOGY, 2025 VS 2026 VS 2032 (USD MILLION)
FIGURE 8. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INSPECTION MODE, 2025 VS 2026 VS 2032 (USD MILLION)
FIGURE 9. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MASK TYPE, 2025 VS 2026 VS 2032 (USD MILLION)
FIGURE 10. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY REGION, 2025 VS 2026 VS 2032 (USD MILLION)
FIGURE 11. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY GROUP, 2025 VS 2026 VS 2032 (USD MILLION)
FIGURE 12. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY COUNTRY, 2025 VS 2026 VS 2032 (USD MILLION)
FIGURE 13. UNITED STATES EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, 2018-2032 (USD MILLION)
FIGURE 14. CHINA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, 2018-2032 (USD MILLION)
List of Tables
TABLE 1. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, 2018-2032 (USD MILLION)
TABLE 2. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY PRODUCT, 2018-2032 (USD MILLION)
TABLE 3. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY HARDWARE, BY REGION, 2018-2032 (USD MILLION)
TABLE 4. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY HARDWARE, BY GROUP, 2018-2032 (USD MILLION)
TABLE 5. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY HARDWARE, BY COUNTRY, 2018-2032 (USD MILLION)
TABLE 6. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SERVICES, BY REGION, 2018-2032 (USD MILLION)
TABLE 7. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SERVICES, BY GROUP, 2018-2032 (USD MILLION)
TABLE 8. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SERVICES, BY COUNTRY, 2018-2032 (USD MILLION)
TABLE 9. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SERVICES, 2018-2032 (USD MILLION)
TABLE 10. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MAINTENANCE, BY REGION, 2018-2032 (USD MILLION)
TABLE 11. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MAINTENANCE, BY GROUP, 2018-2032 (USD MILLION)
TABLE 12. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MAINTENANCE, BY COUNTRY, 2018-2032 (USD MILLION)
TABLE 13. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MAINTENANCE, 2018-2032 (USD MILLION)
TABLE 14. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY CORRECTIVE, BY REGION, 2018-2032 (USD MILLION)
TABLE 15. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY CORRECTIVE, BY GROUP, 2018-2032 (USD MILLION)
TABLE 16. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY CORRECTIVE, BY COUNTRY, 2018-2032 (USD MILLION)
TABLE 17. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY PREVENTIVE, BY REGION, 2018-2032 (USD MILLION)
TABLE 18. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY PREVENTIVE, BY GROUP, 2018-2032 (USD MILLION)
TABLE 19. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY PREVENTIVE, BY COUNTRY, 2018-2032 (USD MILLION)
TABLE 20. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TRAINING, BY REGION, 2018-2032 (USD MILLION)
TABLE 21. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TRAINING, BY GROUP, 2018-2032 (USD MILLION)
TABLE 22. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TRAINING, BY COUNTRY, 2018-2032 (USD MILLION)
TABLE 23. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SOFTWARE, BY REGION, 2018-2032 (USD MILLION)
TABLE 24. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SOFTWARE, BY GROUP, 2018-2032 (USD MILLION)
TABLE 25. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SOFTWARE, BY COUNTRY, 2018-2032 (USD MILLION)
TABLE 26. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SOFTWARE, 2018-2032 (USD MILLION)
TABLE 27. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY DATA ANALYTICS, BY REGION, 2018-2032 (USD MILLION)
TABLE 28. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY DATA ANALYTICS, BY GROUP, 2018-2032 (USD MILLION)
TABLE 29. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY DATA ANALYTICS, BY COUNTRY, 2018-2032 (USD MILLION)
TABLE 30. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MACHINE VISION, BY REGION, 2018-2032 (USD MILLION)
TABLE 31. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MACHINE VISION, BY GROUP, 2018-2032 (USD MILLION)
TABLE 32. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MACHINE VISION, BY COUNTRY, 2018-2032 (USD MILLION)
TABLE 33. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TOOL TYPE, 2018-2032 (USD MILLION)
TABLE 34. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY AOI, BY REGION, 2018-2032 (USD MILLION)
TABLE 35. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY AOI, BY GROUP, 2018-2032 (USD MILLION)
TABLE 36. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY AOI, BY COUNTRY, 2018-2032 (USD MILLION)
TABLE 37. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY E BEAM INSPECTION, BY REGION, 2018-2032 (USD MILLION)
TABLE 38. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY E BEAM INSPECTION, BY GROUP, 2018-2032 (USD MILLION)
TABLE 39. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY E BEAM INSPECTION, BY COUNTRY, 2018-2032 (USD MILLION)
TABLE 40. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY LASER SCANNING, BY REGION, 2018-2032 (USD MILLION)
TABLE 41. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY LASER SCANNING, BY GROUP, 2018-2032 (USD MILLION)
TABLE 42. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY LASER SCANNING, BY COUNTRY, 2018-2032 (USD MILLION)
TABLE 43. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SEM, BY REGION, 2018-2032 (USD MILLION)
TABLE 44. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SEM, BY GROUP, 2018-2032 (USD MILLION)
TABLE 45. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SEM, BY COUNTRY, 2018-2032 (USD MILLION)
TABLE 46. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY APPLICATION, 2018-2032 (USD MILLION)
TABLE 47. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY LOGIC, BY REGION, 2018-2032 (USD MILLION)
TABLE 48. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY LOGIC, BY GROUP, 2018-2032 (USD MILLION)
TABLE 49. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY LOGIC, BY COUNTRY, 2018-2032 (USD MILLION)
TABLE 50. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY LOGIC, 2018-2032 (USD MILLION)
TABLE 51. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY CPU, BY REGION, 2018-2032 (USD MILLION)
TABLE 52. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY CPU, BY GROUP, 2018-2032 (USD MILLION)
TABLE 53. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY CPU, BY COUNTRY, 2018-2032 (USD MILLION)
TABLE 54. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY FPGA, BY REGION, 2018-2032 (USD MILLION)
TABLE 55. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY FPGA, BY GROUP, 2018-2032 (USD MILLION)
TABLE 56. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY FPGA, BY COUNTRY, 2018-2032 (USD MILLION)
TABLE 57. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY GPU, BY REGION, 2018-2032 (USD MILLION)
TABLE 58. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY GPU, BY GROUP, 2018-2032 (USD MILLION)
TABLE 59. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY GPU, BY COUNTRY, 2018-2032 (USD MILLION)
TABLE 60. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MEMORY, BY REGION, 2018-2032 (USD MILLION)
TABLE 61. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MEMORY, BY GROUP, 2018-2032 (USD MILLION)
TABLE 62. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MEMORY, BY COUNTRY, 2018-2032 (USD MILLION)
TABLE 63. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MEMORY, 2018-2032 (USD MILLION)
TABLE 64. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY DRAM, BY REGION, 2018-2032 (USD MILLION)
TABLE 65. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY DRAM, BY GROUP, 2018-2032 (USD MILLION)
TABLE 66. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY DRAM, BY COUNTRY, 2018-2032 (USD MILLION)
TABLE 67. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY NAND FLASH, BY REGION, 2018-2032 (USD MILLION)
TABLE 68. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY NAND FLASH, BY GROUP, 2018-2032 (USD MILLION)
TABLE 69. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY NAND FLASH, BY COUNTRY, 2018-2032 (USD MILLION)
TABLE 70. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TECHNOLOGY, 2018-2032 (USD MILLION)
TABLE 71. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY BRIGHT FIELD, BY REGION, 2018-2032 (USD MILLION)
TABLE 72. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY BRIGHT FIELD, BY GROUP, 2018-2032 (USD MILLION)
TABLE 73. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY BRIGHT FIELD, BY COUNTRY, 2018-2032 (USD MILLION)
TABLE 74. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY DARK FIELD, BY REGION, 2018-2032 (USD MILLION)
TABLE 75. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY DARK FIELD, BY GROUP, 2018-2032 (USD MILLION)
TABLE 76. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY DARK FIELD, BY COUNTRY, 2018-2032 (USD MILLION)
TABLE 77. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INSPECTION MODE, 2018-2032 (USD MILLION)
TABLE 78. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INLINE, BY REGION, 2018-2032 (USD MILLION)
TABLE 79. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INLINE, BY GROUP, 2018-2032 (USD MILLION)
TABLE 80. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INLINE, BY COUNTRY, 2018-2032 (USD MILLION)
TABLE 81. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INLINE, 2018-2032 (USD MILLION)
TABLE 82. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY IN-LINE RETICLE, BY REGION, 2018-2032 (USD MILLION)
TABLE 83. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY IN-LINE RETICLE, BY GROUP, 2018-2032 (USD MILLION)
TABLE 84. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY IN-LINE RETICLE, BY COUNTRY, 2018-2032 (USD MILLION)
TABLE 85. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY IN-LINE WAFER, BY REGION, 2018-2032 (USD MILLION)
TABLE 86. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY IN-LINE WAFER, BY GROUP, 2018-2032 (USD MILLION)
TABLE 87. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY IN-LINE WAFER, BY COUNTRY, 2018-2032 (USD MILLION)
TABLE 88. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY OFFLINE, BY REGION, 2018-2032 (USD MILLION)
TABLE 89. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY OFFLINE, BY GROUP, 2018-2032 (USD MILLION)
TABLE 90. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY OFFLINE, BY COUNTRY, 2018-2032 (USD MILLION)
TABLE 91. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY OFFLINE, 2018-2032 (USD MILLION)
TABLE 92. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY POST-PROCESS, BY REGION, 2018-2032 (USD MILLION)
TABLE 93. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY POST-PROCESS, BY GROUP, 2018-2032 (USD MILLION)
TABLE 94. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY POST-PROCESS, BY COUNTRY, 2018-2032 (USD MILLION)
TABLE 95. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY PRE-PROCESS, BY REGION, 2018-2032 (USD MILLION)
TABLE 96. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY PRE-PROCESS, BY GROUP, 2018-2032 (USD MILLION)
TABLE 97. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY PRE-PROCESS, BY COUNTRY, 2018-2032 (USD MILLION)
TABLE 98. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MASK TYPE, 2018-2032 (USD MILLION)
TABLE 99. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY BLANK, BY REGION, 2018-2032 (USD MILLION)
TABLE 100. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY BLANK, BY GROUP, 2018-2032 (USD MILLION)
TABLE 101. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY BLANK, BY COUNTRY, 2018-2032 (USD MILLION)
TABLE 102. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY PATTERNED, BY REGION, 2018-2032 (USD MILLION)
TABLE 103. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY PATTERNED, BY GROUP, 2018-2032 (USD MILLION)
TABLE 104. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY PATTERNED, BY COUNTRY, 2018-2032 (USD MILLION)
TABLE 105. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY REGION, 2018-2032 (USD MILLION)
TABLE 106. AMERICAS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SUBREGION, 2018-2032 (USD MILLION)
TABLE 107. AMERICAS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY PRODUCT, 2018-2032 (USD MILLION)
TABLE 108. AMERICAS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SERVICES, 2018-2032 (USD MILLION)
TABLE 109. AMERICAS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MAINTENANCE, 2018-2032 (USD MILLION)
TABLE 110. AMERICAS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SOFTWARE, 2018-2032 (USD MILLION)
TABLE 111. AMERICAS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TOOL TYPE, 2018-2032 (USD MILLION)
TABLE 112. AMERICAS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY APPLICATION, 2018-2032 (USD MILLION)
TABLE 113. AMERICAS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY LOGIC, 2018-2032 (USD MILLION)
TABLE 114. AMERICAS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MEMORY, 2018-2032 (USD MILLION)
TABLE 115. AMERICAS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TECHNOLOGY, 2018-2032 (USD MILLION)
TABLE 116. AMERICAS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INSPECTION MODE, 2018-2032 (USD MILLION)
TABLE 117. AMERICAS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INLINE, 2018-2032 (USD MILLION)
TABLE 118. AMERICAS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY OFFLINE, 2018-2032 (USD MILLION)
TABLE 119. AMERICAS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MASK TYPE, 2018-2032 (USD MILLION)
TABLE 120. NORTH AMERICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY COUNTRY, 2018-2032 (USD MILLION)
TABLE 121. NORTH AMERICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY PRODUCT, 2018-2032 (USD MILLION)
TABLE 122. NORTH AMERICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SERVICES, 2018-2032 (USD MILLION)
TABLE 123. NORTH AMERICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MAINTENANCE, 2018-2032 (USD MILLION)
TABLE 124. NORTH AMERICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SOFTWARE, 2018-2032 (USD MILLION)
TABLE 125. NORTH AMERICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TOOL TYPE, 2018-2032 (USD MILLION)
TABLE 126. NORTH AMERICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY APPLICATION, 2018-2032 (USD MILLION)
TABLE 127. NORTH AMERICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY LOGIC, 2018-2032 (USD MILLION)
TABLE 128. NORTH AMERICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MEMORY, 2018-2032 (USD MILLION)
TABLE 129. NORTH AMERICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TECHNOLOGY, 2018-2032 (USD MILLION)
TABLE 130. NORTH AMERICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INSPECTION MODE, 2018-2032 (USD MILLION)
TABLE 131. NORTH AMERICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INLINE, 2018-2032 (USD MILLION)
TABLE 132. NORTH AMERICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY OFFLINE, 2018-2032 (USD MILLION)
TABLE 133. NORTH AMERICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MASK TYPE, 2018-2032 (USD MILLION)
TABLE 134. LATIN AMERICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY COUNTRY, 2018-2032 (USD MILLION)
TABLE 135. LATIN AMERICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY PRODUCT, 2018-2032 (USD MILLION)
TABLE 136. LATIN AMERICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SERVICES, 2018-2032 (USD MILLION)
TABLE 137. LATIN AMERICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MAINTENANCE, 2018-2032 (USD MILLION)
TABLE 138. LATIN AMERICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SOFTWARE, 2018-2032 (USD MILLION)
TABLE 139. LATIN AMERICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TOOL TYPE, 2018-2032 (USD MILLION)
TABLE 140. LATIN AMERICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY APPLICATION, 2018-2032 (USD MILLION)
TABLE 141. LATIN AMERICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY LOGIC, 2018-2032 (USD MILLION)
TABLE 142. LATIN AMERICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MEMORY, 2018-2032 (USD MILLION)
TABLE 143. LATIN AMERICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TECHNOLOGY, 2018-2032 (USD MILLION)
TABLE 144. LATIN AMERICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INSPECTION MODE, 2018-2032 (USD MILLION)
TABLE 145. LATIN AMERICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INLINE, 2018-2032 (USD MILLION)
TABLE 146. LATIN AMERICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY OFFLINE, 2018-2032 (USD MILLION)
TABLE 147. LATIN AMERICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MASK TYPE, 2018-2032 (USD MILLION)
TABLE 148. EUROPE, MIDDLE EAST & AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SUBREGION, 2018-2032 (USD MILLION)
TABLE 149. EUROPE, MIDDLE EAST & AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY PRODUCT, 2018-2032 (USD MILLION)
TABLE 150. EUROPE, MIDDLE EAST & AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SERVICES, 2018-2032 (USD MILLION)
TABLE 151. EUROPE, MIDDLE EAST & AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MAINTENANCE, 2018-2032 (USD MILLION)
TABLE 152. EUROPE, MIDDLE EAST & AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SOFTWARE, 2018-2032 (USD MILLION)
TABLE 153. EUROPE, MIDDLE EAST & AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TOOL TYPE, 2018-2032 (USD MILLION)
TABLE 154. EUROPE, MIDDLE EAST & AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY APPLICATION, 2018-2032 (USD MILLION)
TABLE 155. EUROPE, MIDDLE EAST & AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY LOGIC, 2018-2032 (USD MILLION)
TABLE 156. EUROPE, MIDDLE EAST & AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MEMORY, 2018-2032 (USD MILLION)
TABLE 157. EUROPE, MIDDLE EAST & AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TECHNOLOGY, 2018-2032 (USD MILLION)
TABLE 158. EUROPE, MIDDLE EAST & AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INSPECTION MODE, 2018-2032 (USD MILLION)
TABLE 159. EUROPE, MIDDLE EAST & AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INLINE, 2018-2032 (USD MILLION)
TABLE 160. EUROPE, MIDDLE EAST & AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY OFFLINE, 2018-2032 (USD MILLION)
TABLE 161. EUROPE, MIDDLE EAST & AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MASK TYPE, 2018-2032 (USD MILLION)
TABLE 162. EUROPE EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY COUNTRY, 2018-2032 (USD MILLION)
TABLE 163. EUROPE EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY PRODUCT, 2018-2032 (USD MILLION)
TABLE 164. EUROPE EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SERVICES, 2018-2032 (USD MILLION)
TABLE 165. EUROPE EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MAINTENANCE, 2018-2032 (USD MILLION)
TABLE 166. EUROPE EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SOFTWARE, 2018-2032 (USD MILLION)
TABLE 167. EUROPE EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TOOL TYPE, 2018-2032 (USD MILLION)
TABLE 168. EUROPE EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY APPLICATION, 2018-2032 (USD MILLION)
TABLE 169. EUROPE EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY LOGIC, 2018-2032 (USD MILLION)
TABLE 170. EUROPE EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MEMORY, 2018-2032 (USD MILLION)
TABLE 171. EUROPE EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TECHNOLOGY, 2018-2032 (USD MILLION)
TABLE 172. EUROPE EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INSPECTION MODE, 2018-2032 (USD MILLION)
TABLE 173. EUROPE EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INLINE, 2018-2032 (USD MILLION)
TABLE 174. EUROPE EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY OFFLINE, 2018-2032 (USD MILLION)
TABLE 175. EUROPE EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MASK TYPE, 2018-2032 (USD MILLION)
TABLE 176. MIDDLE EAST EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY COUNTRY, 2018-2032 (USD MILLION)
TABLE 177. MIDDLE EAST EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY PRODUCT, 2018-2032 (USD MILLION)
TABLE 178. MIDDLE EAST EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SERVICES, 2018-2032 (USD MILLION)
TABLE 179. MIDDLE EAST EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MAINTENANCE, 2018-2032 (USD MILLION)
TABLE 180. MIDDLE EAST EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SOFTWARE, 2018-2032 (USD MILLION)
TABLE 181. MIDDLE EAST EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TOOL TYPE, 2018-2032 (USD MILLION)
TABLE 182. MIDDLE EAST EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY APPLICATION, 2018-2032 (USD MILLION)
TABLE 183. MIDDLE EAST EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY LOGIC, 2018-2032 (USD MILLION)
TABLE 184. MIDDLE EAST EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MEMORY, 2018-2032 (USD MILLION)
TABLE 185. MIDDLE EAST EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TECHNOLOGY, 2018-2032 (USD MILLION)
TABLE 186. MIDDLE EAST EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INSPECTION MODE, 2018-2032 (USD MILLION)
TABLE 187. MIDDLE EAST EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INLINE, 2018-2032 (USD MILLION)
TABLE 188. MIDDLE EAST EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY OFFLINE, 2018-2032 (USD MILLION)
TABLE 189. MIDDLE EAST EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MASK TYPE, 2018-2032 (USD MILLION)
TABLE 190. AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY COUNTRY, 2018-2032 (USD MILLION)
TABLE 191. AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY PRODUCT, 2018-2032 (USD MILLION)
TABLE 192. AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SERVICES, 2018-2032 (USD MILLION)
TABLE 193. AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MAINTENANCE, 2018-2032 (USD MILLION)
TABLE 194. AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SOFTWARE, 2018-2032 (USD MILLION)
TABLE 195. AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TOOL TYPE, 2018-2032 (USD MILLION)
TABLE 196. AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY APPLICATION, 2018-2032 (USD MILLION)
TABLE 197. AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY LOGIC, 2018-2032 (USD MILLION)
TABLE 198. AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MEMORY, 2018-2032 (USD MILLION)
TABLE 199. AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TECHNOLOGY, 2018-2032 (USD MILLION)
TABLE 200. AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INSPECTION MODE, 2018-2032 (USD MILLION)
TABLE 201. AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INLINE, 2018-2032 (USD MILLION)
TABLE 202. AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY OFFLINE, 2018-2032 (USD MILLION)
TABLE 203. AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MASK TYPE, 2018-2032 (USD MILLION)
TABLE 204. ASIA-PACIFIC EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY COUNTRY, 2018-2032 (USD MILLION)
TABLE 205. ASIA-PACIFIC EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY PRODUCT, 2018-2032 (USD MILLION)
TABLE 206. ASIA-PACIFIC EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SERVICES, 2018-2032 (USD MILLION)
TABLE 207. ASIA-PACIFIC EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MAINTENANCE, 2018-2032 (USD MILLION)
TABLE 208. ASIA-PACIFIC EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SOFTWARE, 2018-2032 (USD MILLION)
TABLE 209. ASIA-PACIFIC EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TOOL TYPE, 2018-2032 (USD MILLION)
TABLE 210. ASIA-PACIFIC EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY APPLICATION, 2018-2032 (USD MILLION)
TABLE 211. ASIA-PACIFIC EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY LOGIC, 2018-2032 (USD MILLION)
TABLE 212. ASIA-PACIFIC EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MEMORY, 2018-2032 (USD MILLION)
TABLE 213. ASIA-PACIFIC EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TECHNOLOGY, 2018-2032 (USD MILLION)
TABLE 214. ASIA-PACIFIC EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INSPECTION MODE, 2018-2032 (USD MILLION)
TABLE 215. ASIA-PACIFIC EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INLINE, 2018-2032 (USD MILLION)
TABLE 216. ASIA-PACIFIC EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY OFFLINE, 2018-2032 (USD MILLION)
TABLE 217. ASIA-PACIFIC EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MASK TYPE, 2018-2032 (USD MILLION)
TABLE 218. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY GROUP, 2018-2032 (USD MILLION)
TABLE 219. ASEAN EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY COUNTRY, 2018-2032 (USD MILLION)
TABLE 220. ASEAN EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY PRODUCT, 2018-2032 (USD MILLION)
TABLE 221. ASEAN EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SERVICES, 2018-2032 (USD MILLION)
TABLE 222. ASEAN EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MAINTENANCE, 2018-2032 (USD MILLION)
TABLE 223. ASEAN EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SOFTWARE, 2018-2032 (USD MILLION)
TABLE 224. ASEAN EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TOOL TYPE, 2018-2032 (USD MILLION)
TABLE 225. ASEAN EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY APPLICATION, 2018-2032 (USD MILLION)
TABLE 226. ASEAN EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY LOGIC, 2018-2032 (USD MILLION)
TABLE 227. ASEAN EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MEMORY, 2018-2032 (USD MILLION)
TABLE 228. ASEAN EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TECHNOLOGY, 2018-2032 (USD MILLION)
TABLE 229. ASEAN EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INSPECTION MODE, 2018-2032 (USD MILLION)
TABLE 230. ASEAN EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INLINE, 2018-2032 (USD MILLION)
TABLE 231. ASEAN EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY OFFLINE, 2018-2032 (USD MILLION)
TABLE 232. ASEAN EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MASK TYPE, 2018-2032 (USD MILLION)
TABLE 233. GCC EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY COUNTRY, 2018-2032 (USD MILLION)
TABLE 234. GCC EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY PRODUCT, 2018-2032 (USD MILLION)
TABLE 235. GCC EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SERVICES, 2018-2032 (USD MILLION)
TABLE 236. GCC EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MAINTENANCE, 2018-2032 (USD MILLION)
TABLE 237. GCC EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SOFTWARE, 2018-2032 (USD MILLION)
TABLE 238. GCC EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TOOL TYPE, 2018-2032 (USD MILLION)
TABLE 239. GCC EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY APPLICATION, 2018-2032 (USD MILLION)
TABLE 240. GCC EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY LOGIC, 2018-2032 (USD MILLION)
TABLE 241. GCC EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MEMORY, 2018-2032 (USD MILLION)
TABLE 242. GCC EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TECHNOLOGY, 2018-2032 (USD MILLION)
TABLE 243. GCC EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INSPECTION MODE, 2018-2032 (USD MILLION)
TABLE 244. GCC EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INLINE, 2018-2032 (USD MILLION)
TABLE 245. GCC EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY OFFLINE, 2018-2032 (USD MILLION)
TABLE 246. GCC EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MASK TYPE, 2018-2032 (USD MILLION)
TABLE 247. EUROPEAN UNION EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY COUNTRY, 2018-2032 (USD MILLION)
TABLE 248. EUROPEAN UNION EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY PRODUCT, 2018-2032 (USD MILLION)
TABLE 249. EUROPEAN UNION EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SERVICES, 2018-2032 (USD MILLION)
TABLE 250. EUROPEAN UNION EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MAINTENANCE, 2018-2032 (USD MILLION)
TABLE 251. EUROPEAN UNION EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SOFTWARE, 2018-2032 (USD MILLION)
TABLE 252. EUROPEAN UNION EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TOOL TYPE, 2018-2032 (USD MILLION)
TABLE 253. EUROPEAN UNION EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY APPLICATION, 2018-2032 (USD MILLION)
TABLE 254. EUROPEAN UNION EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY LOGIC, 2018-2032 (USD MILLION)
TABLE 255. EUROPEAN UNION EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MEMORY, 2018-2032 (USD MILLION)
TABLE 256. EUROPEAN UNION EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TECHNOLOGY, 2018-2032 (USD MILLION)
TABLE 257. EUROPEAN UNION EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INSPECTION MODE, 2018-2032 (USD MILLION)
TABLE 258. EUROPEAN UNION EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INLINE, 2018-2032 (USD MILLION)
TABLE 259. EUROPEAN UNION EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY OFFLINE, 2018-2032 (USD MILLION)
TABLE 260. EUROPEAN UNION EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MASK TYPE, 2018-2032 (USD MILLION)
TABLE 261. BRICS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY COUNTRY, 2018-2032 (USD MILLION)
TABLE 262. BRICS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY PRODUCT, 2018-2032 (USD MILLION)
TABLE 263. BRICS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SERVICES, 2018-2032 (USD MILLION)
TABLE 264. BRICS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MAINTENANCE, 2018-2032 (USD MILLION)
TABLE 265. BRICS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SOFTWARE, 2018-2032 (USD MILLION)
TABLE 266. BRICS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TOOL TYPE, 2018-2032 (USD MILLION)
TABLE 267. BRICS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY APPLICATION, 2018-2032 (USD MILLION)
TABLE 268. BRICS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY LOGIC, 2018-2032 (USD MILLION)
TABLE 269. BRICS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MEMORY, 2018-2032 (USD MILLION)
TABLE 270. BRICS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TECHNOLOGY, 2018-2032 (USD MILLION)
TABLE 271. BRICS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INSPECTION MODE, 2018-2032 (USD MILLION)
TABLE 272. BRICS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INLINE, 2018-2032 (USD MILLION)
TABLE 273. BRICS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY OFFLINE, 2018-2032 (USD MILLION)
TABLE 274. BRICS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MASK TYPE, 2018-2032 (USD MILLION)
TABLE 275. G7 EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY COUNTRY, 2018-2032 (USD MILLION)
TABLE 276. G7 EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY PRODUCT, 2018-2032 (USD MILLION)
TABLE 277. G7 EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SERVICES, 2018-2032 (USD MILLION)
TABLE 278. G7 EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MAINTENANCE, 2018-2032 (USD MILLION)
TABLE 279. G7 EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SOFTWARE, 2018-2032 (USD MILLION)
TABLE 280. G7 EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TOOL TYPE, 2018-2032 (USD MILLION)
TABLE 281. G7 EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY APPLICATION, 2018-2032 (USD MILLION)
TABLE 282. G7 EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY LOGIC, 2018-2032 (USD MILLION)
TABLE 283. G7 EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MEMORY, 2018-2032 (USD MILLION)
TABLE 284. G7 EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TECHNOLOGY, 2018-2032 (USD MILLION)
TABLE 285. G7 EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INSPECTION MODE, 2018-2032 (USD MILLION)
TABLE 286. G7 EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INLINE, 2018-2032 (USD MILLION)
TABLE 287. G7 EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY OFFLINE, 2018-2032 (USD MILLION)
TABLE 288. G7 EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MASK TYPE, 2018-2032 (USD MILLION)
TABLE 289. NATO EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY COUNTRY, 2018-2032 (USD MILLION)
TABLE 290. NATO EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY PRODUCT, 2018-2032 (USD MILLION)
TABLE 291. NATO EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SERVICES, 2018-2032 (USD MILLION)
TABLE 292. NATO EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MAINTENANCE, 2018-2032 (USD MILLION)
TABLE 293. NATO EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SOFTWARE, 2018-2032 (USD MILLION)
TABLE 294. NATO EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TOOL TYPE, 2018-2032 (USD MILLION)
TABLE 295. NATO EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY APPLICATION, 2018-2032 (USD MILLION)
TABLE 296. NATO EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY LOGIC, 2018-2032 (USD MILLION)
TABLE 297. NATO EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MEMORY, 2018-2032 (USD MILLION)
TABLE 298. NATO EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TECHNOLOGY, 2018-2032 (USD MILLION)
TABLE 299. NATO EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INSPECTION MODE

Companies Mentioned

The key companies profiled in this EUV Mask Defect Detection Equipment market report include:
  • Advantest Corporation
  • Agilent Technologies, Inc.
  • Anton Paar GmbH
  • ASML Holding N.V.
  • Bruker Corporation
  • Canon Inc.
  • Carl Zeiss AG
  • FEI Company
  • Hitachi High-Tech Corporation
  • JEOL Ltd.
  • KLA Corporation
  • Lam Research Corporation
  • Lasertec Corporation
  • Malvern Panalytical Ltd.
  • Mettler-Toledo International Inc.
  • Nanometrics Incorporated
  • Nikon Corporation
  • Nova Measuring Instruments Ltd.
  • PerkinElmer, Inc.
  • Rudolph Technologies, Inc.
  • Shimadzu Corporation
  • Thermo Fisher Scientific Inc.
  • Tokyo Electron Limited
  • Waters Corporation

Table Information

Report AttributeDetails
No. of Pages193
PublishedJanuary 2026
Forecast Period2026 - 2032
Estimated Market Value ( USD ) in 2026 $ 1.84 Billion
Forecasted Market Value ( USD ) by 2032 $ 3.56 Billion
Compound Annual Growth Rate11.4%
Regions CoveredGlobal
No. of Companies Mentioned25

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