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EUV Mask Defect Detection Equipment Market - Global Forecast 2025-2030- Product Image
EUV Mask Defect Detection Equipment Market - Global Forecast 2025-2030- Product Image
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EUV Mask Defect Detection Equipment Market - Global Forecast 2025-2030

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    Report

  • 188 Pages
  • August 2025
  • Region: Global
  • 360iResearch™
  • ID: 6122408
UP TO OFF until Jan 01st 2026
1h Free Analyst Time
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The semiconductor industry faces a pivotal transformation as extreme ultraviolet (EUV) lithography progresses from advanced trials to mainstream application in advanced node manufacturing. Senior leaders must closely monitor the EUV mask defect detection equipment market as a foundation for operational stability and future growth.

Market Snapshot: EUV Mask Defect Detection Equipment

The EUV mask defect detection equipment market is evolving in response to accelerating adoption of EUV technology, increasing operational complexity, and precise quality standards. Market growth is fueled by advanced manufacturing needs, global supply chain adjustments, and stringent regulatory environments. As investment in next-generation fabrication rises and manufacturers target increasingly small nodes, demand intensifies for sophisticated mask inspection solutions that mitigate costly wafer defects and maintain yield reliability. Industry participants span established equipment suppliers, specialist technology innovators, and strategic collaborators seeking competitive advantage.

Scope & Segmentation

This report delivers structured insight into the scope and segmentation of the EUV mask defect detection equipment ecosystem, enabling targeted decision-making across the following:

  • Product: Hardware, Services (Maintenance - Corrective, Preventive; Training), Software (Data Analytics, Machine Vision)
  • Tool Type: AOI, E Beam Inspection, Laser Scanning, SEM
  • Application: Logic (CPU, FPGA, GPU), Memory (DRAM, NAND Flash)
  • Technology: Bright Field, Dark Field
  • Inspection Mode: Inline (In-Line Reticle, In-Line Wafer), Offline (Post-Process, Pre-Process)
  • Mask Type: Blank, Patterned
  • Region: Americas (United States - California, Texas, New York, Florida, Illinois, Pennsylvania, Ohio; Canada; Mexico; Brazil; Argentina), Europe, Middle East & Africa (including United Kingdom, Germany, France, and key emerging markets), and Asia-Pacific (spanning China, India, Japan, South Korea, Taiwan, and other regional markets)
  • Companies: KLA Corporation, Applied Materials, Onto Innovation, ASML, Nikon, Hitachi High-Technologies, Canon, JEOL, Carl Zeiss SMT, Vistec Electron Beam

Key Takeaways

  • Technological advancements in EUV mask defect detection equipment, including AI and machine learning, are driving improved defect prediction and classification accuracy, shaping next-generation fabrication workflows.
  • Integration of cloud-native and data-driven platforms is fostering real-time collaboration among fabs, mask shops, and equipment vendors, strengthening manufacturing agility and reducing time to resolution.
  • Regional factors, from on-shore localization in response to supply chain risk to public-private partnerships, are influencing strategic investment and shaping competitive imperatives, especially in the Asia-Pacific region.
  • Emerging commercial models now emphasize subscription-based maintenance, remote diagnostics, and bundled services, reflecting a market shift toward operational reliability and outcome-based agreements.
  • Collaborative industry consortia and mergers are creating synergies in defect detection methodologies, data library sharing, and technology platform interoperability, driving faster innovation cycles.

Tariff Impact

The 2025 United States tariff measures have prompted stakeholders to reevaluate cost structures, accelerate assembly localization, and renegotiate component sourcing, introducing new constraints and opportunities across the EUV mask defect detection market. Procurement strategies now factor in extended lead times and pricing variability, while collaborative R&D programs adapt to changing cross-border intellectual property arrangements.

Methodology & Data Sources

Our analysis builds on in-depth executive interviews and structured surveys with key market participants, supported by peer-reviewed technical literature, patent filings, and regulatory documents. Both quantitative and qualitative frameworks are employed, ensuring a comprehensive and validated perspective.

Primary Keyword: EUV Mask Defect Detection Equipment

Secondary keywords—EUV lithography, photomask quality, semiconductor fabs, machine vision, inspection systems—have each been strategically integrated in context. This ensures optimized discoverability while aligning with the terminology used by senior decision-makers.

Why This Report Matters

  • Enables C-suite and strategic leaders to validate market direction, benchmark competitors, and inform capital allocation for mission-critical inspection technology.
  • Supports procurement and operations teams with actionable analysis of segment-specific opportunities, technology trends, and regionally driven regulatory impacts.

Conclusion

The EUV mask defect detection equipment market presents new challenges and opportunities as technology and regulatory frameworks evolve. Stakeholders positioned for methodological, collaborative, and supply chain agility will shape the next wave of industry advancement.



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Table of Contents

1. Preface
1.1. Objectives of the Study
1.2. Market Segmentation & Coverage
1.3. Years Considered for the Study
1.4. Currency & Pricing
1.5. Language
1.6. Stakeholders
2. Research Methodology
2.1. Define: Research Objective
2.2. Determine: Research Design
2.3. Prepare: Research Instrument
2.4. Collect: Data Source
2.5. Analyze: Data Interpretation
2.6. Formulate: Data Verification
2.7. Publish: Research Report
2.8. Repeat: Report Update
3. Executive Summary
4. Market Overview
4.1. Introduction
4.2. Market Sizing & Forecasting
5. Market Dynamics
5.1. Deployment of high numerical aperture EUV inspection tools to improve defect detection sensitivity
5.2. Integration of machine learning algorithms for automated EUV mask defect classification and prioritization
5.3. Development of ultra-high resolution electron beam scanners for sub-nanometer EUV mask defect mapping
5.4. Implementation of real-time in-line EUV mask inspection to minimize wafer yield loss during production
5.5. Adoption of advanced pellicle materials to reduce contamination and enhance EUV mask inspection throughput
5.6. Collaboration between mask blank suppliers and equipment vendors for improved defect inspection standards
5.7. Expansion of vacuum-based optical metrology systems to support high-volume EUV mask defect analysis
6. Market Insights
6.1. Porter’s Five Forces Analysis
6.2. PESTLE Analysis
7. Cumulative Impact of United States Tariffs 2025
8. EUV Mask Defect Detection Equipment Market, by Product
8.1. Introduction
8.2. Hardware
8.3. Services
8.3.1. Maintenance
8.3.1.1. Corrective
8.3.1.2. Preventive
8.3.2. Training
8.4. Software
8.4.1. Data Analytics
8.4.2. Machine Vision
9. EUV Mask Defect Detection Equipment Market, by Tool Type
9.1. Introduction
9.2. AOI
9.3. E Beam Inspection
9.4. Laser Scanning
9.5. SEM
10. EUV Mask Defect Detection Equipment Market, by Application
10.1. Introduction
10.2. Logic
10.2.1. CPU
10.2.2. FPGA
10.2.3. GPU
10.3. Memory
10.3.1. DRAM
10.3.2. NAND Flash
11. EUV Mask Defect Detection Equipment Market, by Technology
11.1. Introduction
11.2. Bright Field
11.3. Dark Field
12. EUV Mask Defect Detection Equipment Market, by Inspection Mode
12.1. Introduction
12.2. Inline
12.2.1. In-Line Reticle
12.2.2. In-Line Wafer
12.3. Offline
12.3.1. Post-Process
12.3.2. Pre-Process
13. EUV Mask Defect Detection Equipment Market, by Mask Type
13.1. Introduction
13.2. Blank
13.3. Patterned
14. Americas EUV Mask Defect Detection Equipment Market
14.1. Introduction
14.2. United States
14.3. Canada
14.4. Mexico
14.5. Brazil
14.6. Argentina
15. Europe, Middle East & Africa EUV Mask Defect Detection Equipment Market
15.1. Introduction
15.2. United Kingdom
15.3. Germany
15.4. France
15.5. Russia
15.6. Italy
15.7. Spain
15.8. United Arab Emirates
15.9. Saudi Arabia
15.10. South Africa
15.11. Denmark
15.12. Netherlands
15.13. Qatar
15.14. Finland
15.15. Sweden
15.16. Nigeria
15.17. Egypt
15.18. Turkey
15.19. Israel
15.20. Norway
15.21. Poland
15.22. Switzerland
16. Asia-Pacific EUV Mask Defect Detection Equipment Market
16.1. Introduction
16.2. China
16.3. India
16.4. Japan
16.5. Australia
16.6. South Korea
16.7. Indonesia
16.8. Thailand
16.9. Philippines
16.10. Malaysia
16.11. Singapore
16.12. Vietnam
16.13. Taiwan
17. Competitive Landscape
17.1. Market Share Analysis, 2024
17.2. FPNV Positioning Matrix, 2024
17.3. Competitive Analysis
17.3.1. KLA Corporation
17.3.2. Applied Materials, Inc.
17.3.3. Onto Innovation Inc.
17.3.4. ASML Holding N.V.
17.3.5. Nikon Corporation
17.3.6. Hitachi High-Technologies Corporation
17.3.7. Canon Inc.
17.3.8. JEOL Ltd.
17.3.9. Carl Zeiss SMT GmbH
17.3.10. Vistec Electron Beam GmbH
18. ResearchAI
19. ResearchStatistics
20. ResearchContacts
21. ResearchArticles
22. Appendix
List of Figures
FIGURE 1. EUV MASK DEFECT DETECTION EQUIPMENT MARKET RESEARCH PROCESS
FIGURE 2. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, 2018-2030 (USD MILLION)
FIGURE 3. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY REGION, 2024 VS 2025 VS 2030 (USD MILLION)
FIGURE 4. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY COUNTRY, 2024 VS 2025 VS 2030 (USD MILLION)
FIGURE 5. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY PRODUCT, 2024 VS 2030 (%)
FIGURE 6. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY PRODUCT, 2024 VS 2025 VS 2030 (USD MILLION)
FIGURE 7. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TOOL TYPE, 2024 VS 2030 (%)
FIGURE 8. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TOOL TYPE, 2024 VS 2025 VS 2030 (USD MILLION)
FIGURE 9. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY APPLICATION, 2024 VS 2030 (%)
FIGURE 10. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY APPLICATION, 2024 VS 2025 VS 2030 (USD MILLION)
FIGURE 11. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TECHNOLOGY, 2024 VS 2030 (%)
FIGURE 12. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TECHNOLOGY, 2024 VS 2025 VS 2030 (USD MILLION)
FIGURE 13. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INSPECTION MODE, 2024 VS 2030 (%)
FIGURE 14. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INSPECTION MODE, 2024 VS 2025 VS 2030 (USD MILLION)
FIGURE 15. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MASK TYPE, 2024 VS 2030 (%)
FIGURE 16. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MASK TYPE, 2024 VS 2025 VS 2030 (USD MILLION)
FIGURE 17. AMERICAS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY COUNTRY, 2024 VS 2030 (%)
FIGURE 18. AMERICAS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY COUNTRY, 2024 VS 2025 VS 2030 (USD MILLION)
FIGURE 19. UNITED STATES EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY STATE, 2024 VS 2030 (%)
FIGURE 20. UNITED STATES EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY STATE, 2024 VS 2025 VS 2030 (USD MILLION)
FIGURE 21. EUROPE, MIDDLE EAST & AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY COUNTRY, 2024 VS 2030 (%)
FIGURE 22. EUROPE, MIDDLE EAST & AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY COUNTRY, 2024 VS 2025 VS 2030 (USD MILLION)
FIGURE 23. ASIA-PACIFIC EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY COUNTRY, 2024 VS 2030 (%)
FIGURE 24. ASIA-PACIFIC EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY COUNTRY, 2024 VS 2025 VS 2030 (USD MILLION)
FIGURE 25. EUV MASK DEFECT DETECTION EQUIPMENT MARKET SHARE, BY KEY PLAYER, 2024
FIGURE 26. EUV MASK DEFECT DETECTION EQUIPMENT MARKET, FPNV POSITIONING MATRIX, 2024
FIGURE 27. EUV MASK DEFECT DETECTION EQUIPMENT MARKET: RESEARCHAI
FIGURE 28. EUV MASK DEFECT DETECTION EQUIPMENT MARKET: RESEARCHSTATISTICS
FIGURE 29. EUV MASK DEFECT DETECTION EQUIPMENT MARKET: RESEARCHCONTACTS
FIGURE 30. EUV MASK DEFECT DETECTION EQUIPMENT MARKET: RESEARCHARTICLES
List of Tables
TABLE 1. EUV MASK DEFECT DETECTION EQUIPMENT MARKET SEGMENTATION & COVERAGE
TABLE 2. UNITED STATES DOLLAR EXCHANGE RATE, 2018-2024
TABLE 3. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, 2018-2024 (USD MILLION)
TABLE 4. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, 2025-2030 (USD MILLION)
TABLE 5. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY REGION, 2018-2024 (USD MILLION)
TABLE 6. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY REGION, 2025-2030 (USD MILLION)
TABLE 7. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY COUNTRY, 2018-2024 (USD MILLION)
TABLE 8. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY COUNTRY, 2025-2030 (USD MILLION)
TABLE 9. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY PRODUCT, 2018-2024 (USD MILLION)
TABLE 10. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY PRODUCT, 2025-2030 (USD MILLION)
TABLE 11. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY HARDWARE, BY REGION, 2018-2024 (USD MILLION)
TABLE 12. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY HARDWARE, BY REGION, 2025-2030 (USD MILLION)
TABLE 13. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SERVICES, BY REGION, 2018-2024 (USD MILLION)
TABLE 14. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SERVICES, BY REGION, 2025-2030 (USD MILLION)
TABLE 15. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MAINTENANCE, BY REGION, 2018-2024 (USD MILLION)
TABLE 16. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MAINTENANCE, BY REGION, 2025-2030 (USD MILLION)
TABLE 17. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY CORRECTIVE, BY REGION, 2018-2024 (USD MILLION)
TABLE 18. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY CORRECTIVE, BY REGION, 2025-2030 (USD MILLION)
TABLE 19. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY PREVENTIVE, BY REGION, 2018-2024 (USD MILLION)
TABLE 20. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY PREVENTIVE, BY REGION, 2025-2030 (USD MILLION)
TABLE 21. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MAINTENANCE, 2018-2024 (USD MILLION)
TABLE 22. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MAINTENANCE, 2025-2030 (USD MILLION)
TABLE 23. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TRAINING, BY REGION, 2018-2024 (USD MILLION)
TABLE 24. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TRAINING, BY REGION, 2025-2030 (USD MILLION)
TABLE 25. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SERVICES, 2018-2024 (USD MILLION)
TABLE 26. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SERVICES, 2025-2030 (USD MILLION)
TABLE 27. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SOFTWARE, BY REGION, 2018-2024 (USD MILLION)
TABLE 28. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SOFTWARE, BY REGION, 2025-2030 (USD MILLION)
TABLE 29. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY DATA ANALYTICS, BY REGION, 2018-2024 (USD MILLION)
TABLE 30. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY DATA ANALYTICS, BY REGION, 2025-2030 (USD MILLION)
TABLE 31. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MACHINE VISION, BY REGION, 2018-2024 (USD MILLION)
TABLE 32. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MACHINE VISION, BY REGION, 2025-2030 (USD MILLION)
TABLE 33. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SOFTWARE, 2018-2024 (USD MILLION)
TABLE 34. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SOFTWARE, 2025-2030 (USD MILLION)
TABLE 35. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TOOL TYPE, 2018-2024 (USD MILLION)
TABLE 36. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TOOL TYPE, 2025-2030 (USD MILLION)
TABLE 37. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY AOI, BY REGION, 2018-2024 (USD MILLION)
TABLE 38. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY AOI, BY REGION, 2025-2030 (USD MILLION)
TABLE 39. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY E BEAM INSPECTION, BY REGION, 2018-2024 (USD MILLION)
TABLE 40. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY E BEAM INSPECTION, BY REGION, 2025-2030 (USD MILLION)
TABLE 41. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY LASER SCANNING, BY REGION, 2018-2024 (USD MILLION)
TABLE 42. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY LASER SCANNING, BY REGION, 2025-2030 (USD MILLION)
TABLE 43. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SEM, BY REGION, 2018-2024 (USD MILLION)
TABLE 44. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SEM, BY REGION, 2025-2030 (USD MILLION)
TABLE 45. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY APPLICATION, 2018-2024 (USD MILLION)
TABLE 46. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY APPLICATION, 2025-2030 (USD MILLION)
TABLE 47. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY LOGIC, BY REGION, 2018-2024 (USD MILLION)
TABLE 48. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY LOGIC, BY REGION, 2025-2030 (USD MILLION)
TABLE 49. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY CPU, BY REGION, 2018-2024 (USD MILLION)
TABLE 50. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY CPU, BY REGION, 2025-2030 (USD MILLION)
TABLE 51. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY FPGA, BY REGION, 2018-2024 (USD MILLION)
TABLE 52. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY FPGA, BY REGION, 2025-2030 (USD MILLION)
TABLE 53. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY GPU, BY REGION, 2018-2024 (USD MILLION)
TABLE 54. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY GPU, BY REGION, 2025-2030 (USD MILLION)
TABLE 55. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY LOGIC, 2018-2024 (USD MILLION)
TABLE 56. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY LOGIC, 2025-2030 (USD MILLION)
TABLE 57. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MEMORY, BY REGION, 2018-2024 (USD MILLION)
TABLE 58. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MEMORY, BY REGION, 2025-2030 (USD MILLION)
TABLE 59. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY DRAM, BY REGION, 2018-2024 (USD MILLION)
TABLE 60. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY DRAM, BY REGION, 2025-2030 (USD MILLION)
TABLE 61. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY NAND FLASH, BY REGION, 2018-2024 (USD MILLION)
TABLE 62. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY NAND FLASH, BY REGION, 2025-2030 (USD MILLION)
TABLE 63. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MEMORY, 2018-2024 (USD MILLION)
TABLE 64. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MEMORY, 2025-2030 (USD MILLION)
TABLE 65. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TECHNOLOGY, 2018-2024 (USD MILLION)
TABLE 66. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TECHNOLOGY, 2025-2030 (USD MILLION)
TABLE 67. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY BRIGHT FIELD, BY REGION, 2018-2024 (USD MILLION)
TABLE 68. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY BRIGHT FIELD, BY REGION, 2025-2030 (USD MILLION)
TABLE 69. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY DARK FIELD, BY REGION, 2018-2024 (USD MILLION)
TABLE 70. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY DARK FIELD, BY REGION, 2025-2030 (USD MILLION)
TABLE 71. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INSPECTION MODE, 2018-2024 (USD MILLION)
TABLE 72. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INSPECTION MODE, 2025-2030 (USD MILLION)
TABLE 73. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INLINE, BY REGION, 2018-2024 (USD MILLION)
TABLE 74. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INLINE, BY REGION, 2025-2030 (USD MILLION)
TABLE 75. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY IN-LINE RETICLE, BY REGION, 2018-2024 (USD MILLION)
TABLE 76. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY IN-LINE RETICLE, BY REGION, 2025-2030 (USD MILLION)
TABLE 77. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY IN-LINE WAFER, BY REGION, 2018-2024 (USD MILLION)
TABLE 78. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY IN-LINE WAFER, BY REGION, 2025-2030 (USD MILLION)
TABLE 79. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INLINE, 2018-2024 (USD MILLION)
TABLE 80. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INLINE, 2025-2030 (USD MILLION)
TABLE 81. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY OFFLINE, BY REGION, 2018-2024 (USD MILLION)
TABLE 82. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY OFFLINE, BY REGION, 2025-2030 (USD MILLION)
TABLE 83. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY POST-PROCESS, BY REGION, 2018-2024 (USD MILLION)
TABLE 84. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY POST-PROCESS, BY REGION, 2025-2030 (USD MILLION)
TABLE 85. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY PRE-PROCESS, BY REGION, 2018-2024 (USD MILLION)
TABLE 86. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY PRE-PROCESS, BY REGION, 2025-2030 (USD MILLION)
TABLE 87. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY OFFLINE, 2018-2024 (USD MILLION)
TABLE 88. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY OFFLINE, 2025-2030 (USD MILLION)
TABLE 89. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MASK TYPE, 2018-2024 (USD MILLION)
TABLE 90. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MASK TYPE, 2025-2030 (USD MILLION)
TABLE 91. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY BLANK, BY REGION, 2018-2024 (USD MILLION)
TABLE 92. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY BLANK, BY REGION, 2025-2030 (USD MILLION)
TABLE 93. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY PATTERNED, BY REGION, 2018-2024 (USD MILLION)
TABLE 94. GLOBAL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY PATTERNED, BY REGION, 2025-2030 (USD MILLION)
TABLE 95. AMERICAS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY PRODUCT, 2018-2024 (USD MILLION)
TABLE 96. AMERICAS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY PRODUCT, 2025-2030 (USD MILLION)
TABLE 97. AMERICAS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SERVICES, 2018-2024 (USD MILLION)
TABLE 98. AMERICAS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SERVICES, 2025-2030 (USD MILLION)
TABLE 99. AMERICAS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MAINTENANCE, 2018-2024 (USD MILLION)
TABLE 100. AMERICAS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MAINTENANCE, 2025-2030 (USD MILLION)
TABLE 101. AMERICAS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SOFTWARE, 2018-2024 (USD MILLION)
TABLE 102. AMERICAS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SOFTWARE, 2025-2030 (USD MILLION)
TABLE 103. AMERICAS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TOOL TYPE, 2018-2024 (USD MILLION)
TABLE 104. AMERICAS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TOOL TYPE, 2025-2030 (USD MILLION)
TABLE 105. AMERICAS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY APPLICATION, 2018-2024 (USD MILLION)
TABLE 106. AMERICAS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY APPLICATION, 2025-2030 (USD MILLION)
TABLE 107. AMERICAS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY LOGIC, 2018-2024 (USD MILLION)
TABLE 108. AMERICAS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY LOGIC, 2025-2030 (USD MILLION)
TABLE 109. AMERICAS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MEMORY, 2018-2024 (USD MILLION)
TABLE 110. AMERICAS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MEMORY, 2025-2030 (USD MILLION)
TABLE 111. AMERICAS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TECHNOLOGY, 2018-2024 (USD MILLION)
TABLE 112. AMERICAS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TECHNOLOGY, 2025-2030 (USD MILLION)
TABLE 113. AMERICAS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INSPECTION MODE, 2018-2024 (USD MILLION)
TABLE 114. AMERICAS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INSPECTION MODE, 2025-2030 (USD MILLION)
TABLE 115. AMERICAS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INLINE, 2018-2024 (USD MILLION)
TABLE 116. AMERICAS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INLINE, 2025-2030 (USD MILLION)
TABLE 117. AMERICAS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY OFFLINE, 2018-2024 (USD MILLION)
TABLE 118. AMERICAS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY OFFLINE, 2025-2030 (USD MILLION)
TABLE 119. AMERICAS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MASK TYPE, 2018-2024 (USD MILLION)
TABLE 120. AMERICAS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MASK TYPE, 2025-2030 (USD MILLION)
TABLE 121. AMERICAS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY COUNTRY, 2018-2024 (USD MILLION)
TABLE 122. AMERICAS EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY COUNTRY, 2025-2030 (USD MILLION)
TABLE 123. UNITED STATES EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY PRODUCT, 2018-2024 (USD MILLION)
TABLE 124. UNITED STATES EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY PRODUCT, 2025-2030 (USD MILLION)
TABLE 125. UNITED STATES EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SERVICES, 2018-2024 (USD MILLION)
TABLE 126. UNITED STATES EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SERVICES, 2025-2030 (USD MILLION)
TABLE 127. UNITED STATES EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MAINTENANCE, 2018-2024 (USD MILLION)
TABLE 128. UNITED STATES EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MAINTENANCE, 2025-2030 (USD MILLION)
TABLE 129. UNITED STATES EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SOFTWARE, 2018-2024 (USD MILLION)
TABLE 130. UNITED STATES EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SOFTWARE, 2025-2030 (USD MILLION)
TABLE 131. UNITED STATES EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TOOL TYPE, 2018-2024 (USD MILLION)
TABLE 132. UNITED STATES EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TOOL TYPE, 2025-2030 (USD MILLION)
TABLE 133. UNITED STATES EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY APPLICATION, 2018-2024 (USD MILLION)
TABLE 134. UNITED STATES EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY APPLICATION, 2025-2030 (USD MILLION)
TABLE 135. UNITED STATES EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY LOGIC, 2018-2024 (USD MILLION)
TABLE 136. UNITED STATES EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY LOGIC, 2025-2030 (USD MILLION)
TABLE 137. UNITED STATES EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MEMORY, 2018-2024 (USD MILLION)
TABLE 138. UNITED STATES EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MEMORY, 2025-2030 (USD MILLION)
TABLE 139. UNITED STATES EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TECHNOLOGY, 2018-2024 (USD MILLION)
TABLE 140. UNITED STATES EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TECHNOLOGY, 2025-2030 (USD MILLION)
TABLE 141. UNITED STATES EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INSPECTION MODE, 2018-2024 (USD MILLION)
TABLE 142. UNITED STATES EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INSPECTION MODE, 2025-2030 (USD MILLION)
TABLE 143. UNITED STATES EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INLINE, 2018-2024 (USD MILLION)
TABLE 144. UNITED STATES EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INLINE, 2025-2030 (USD MILLION)
TABLE 145. UNITED STATES EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY OFFLINE, 2018-2024 (USD MILLION)
TABLE 146. UNITED STATES EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY OFFLINE, 2025-2030 (USD MILLION)
TABLE 147. UNITED STATES EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MASK TYPE, 2018-2024 (USD MILLION)
TABLE 148. UNITED STATES EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MASK TYPE, 2025-2030 (USD MILLION)
TABLE 149. UNITED STATES EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY STATE, 2018-2024 (USD MILLION)
TABLE 150. UNITED STATES EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY STATE, 2025-2030 (USD MILLION)
TABLE 151. CANADA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY PRODUCT, 2018-2024 (USD MILLION)
TABLE 152. CANADA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY PRODUCT, 2025-2030 (USD MILLION)
TABLE 153. CANADA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SERVICES, 2018-2024 (USD MILLION)
TABLE 154. CANADA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SERVICES, 2025-2030 (USD MILLION)
TABLE 155. CANADA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MAINTENANCE, 2018-2024 (USD MILLION)
TABLE 156. CANADA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MAINTENANCE, 2025-2030 (USD MILLION)
TABLE 157. CANADA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SOFTWARE, 2018-2024 (USD MILLION)
TABLE 158. CANADA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SOFTWARE, 2025-2030 (USD MILLION)
TABLE 159. CANADA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TOOL TYPE, 2018-2024 (USD MILLION)
TABLE 160. CANADA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TOOL TYPE, 2025-2030 (USD MILLION)
TABLE 161. CANADA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY APPLICATION, 2018-2024 (USD MILLION)
TABLE 162. CANADA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY APPLICATION, 2025-2030 (USD MILLION)
TABLE 163. CANADA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY LOGIC, 2018-2024 (USD MILLION)
TABLE 164. CANADA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY LOGIC, 2025-2030 (USD MILLION)
TABLE 165. CANADA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MEMORY, 2018-2024 (USD MILLION)
TABLE 166. CANADA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MEMORY, 2025-2030 (USD MILLION)
TABLE 167. CANADA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TECHNOLOGY, 2018-2024 (USD MILLION)
TABLE 168. CANADA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TECHNOLOGY, 2025-2030 (USD MILLION)
TABLE 169. CANADA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INSPECTION MODE, 2018-2024 (USD MILLION)
TABLE 170. CANADA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INSPECTION MODE, 2025-2030 (USD MILLION)
TABLE 171. CANADA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INLINE, 2018-2024 (USD MILLION)
TABLE 172. CANADA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INLINE, 2025-2030 (USD MILLION)
TABLE 173. CANADA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY OFFLINE, 2018-2024 (USD MILLION)
TABLE 174. CANADA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY OFFLINE, 2025-2030 (USD MILLION)
TABLE 175. CANADA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MASK TYPE, 2018-2024 (USD MILLION)
TABLE 176. CANADA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MASK TYPE, 2025-2030 (USD MILLION)
TABLE 177. MEXICO EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY PRODUCT, 2018-2024 (USD MILLION)
TABLE 178. MEXICO EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY PRODUCT, 2025-2030 (USD MILLION)
TABLE 179. MEXICO EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SERVICES, 2018-2024 (USD MILLION)
TABLE 180. MEXICO EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SERVICES, 2025-2030 (USD MILLION)
TABLE 181. MEXICO EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MAINTENANCE, 2018-2024 (USD MILLION)
TABLE 182. MEXICO EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MAINTENANCE, 2025-2030 (USD MILLION)
TABLE 183. MEXICO EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SOFTWARE, 2018-2024 (USD MILLION)
TABLE 184. MEXICO EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SOFTWARE, 2025-2030 (USD MILLION)
TABLE 185. MEXICO EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TOOL TYPE, 2018-2024 (USD MILLION)
TABLE 186. MEXICO EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TOOL TYPE, 2025-2030 (USD MILLION)
TABLE 187. MEXICO EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY APPLICATION, 2018-2024 (USD MILLION)
TABLE 188. MEXICO EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY APPLICATION, 2025-2030 (USD MILLION)
TABLE 189. MEXICO EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY LOGIC, 2018-2024 (USD MILLION)
TABLE 190. MEXICO EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY LOGIC, 2025-2030 (USD MILLION)
TABLE 191. MEXICO EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MEMORY, 2018-2024 (USD MILLION)
TABLE 192. MEXICO EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MEMORY, 2025-2030 (USD MILLION)
TABLE 193. MEXICO EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TECHNOLOGY, 2018-2024 (USD MILLION)
TABLE 194. MEXICO EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TECHNOLOGY, 2025-2030 (USD MILLION)
TABLE 195. MEXICO EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INSPECTION MODE, 2018-2024 (USD MILLION)
TABLE 196. MEXICO EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INSPECTION MODE, 2025-2030 (USD MILLION)
TABLE 197. MEXICO EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INLINE, 2018-2024 (USD MILLION)
TABLE 198. MEXICO EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INLINE, 2025-2030 (USD MILLION)
TABLE 199. MEXICO EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY OFFLINE, 2018-2024 (USD MILLION)
TABLE 200. MEXICO EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY OFFLINE, 2025-2030 (USD MILLION)
TABLE 201. MEXICO EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MASK TYPE, 2018-2024 (USD MILLION)
TABLE 202. MEXICO EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MASK TYPE, 2025-2030 (USD MILLION)
TABLE 203. BRAZIL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY PRODUCT, 2018-2024 (USD MILLION)
TABLE 204. BRAZIL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY PRODUCT, 2025-2030 (USD MILLION)
TABLE 205. BRAZIL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SERVICES, 2018-2024 (USD MILLION)
TABLE 206. BRAZIL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SERVICES, 2025-2030 (USD MILLION)
TABLE 207. BRAZIL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MAINTENANCE, 2018-2024 (USD MILLION)
TABLE 208. BRAZIL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MAINTENANCE, 2025-2030 (USD MILLION)
TABLE 209. BRAZIL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SOFTWARE, 2018-2024 (USD MILLION)
TABLE 210. BRAZIL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SOFTWARE, 2025-2030 (USD MILLION)
TABLE 211. BRAZIL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TOOL TYPE, 2018-2024 (USD MILLION)
TABLE 212. BRAZIL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TOOL TYPE, 2025-2030 (USD MILLION)
TABLE 213. BRAZIL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY APPLICATION, 2018-2024 (USD MILLION)
TABLE 214. BRAZIL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY APPLICATION, 2025-2030 (USD MILLION)
TABLE 215. BRAZIL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY LOGIC, 2018-2024 (USD MILLION)
TABLE 216. BRAZIL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY LOGIC, 2025-2030 (USD MILLION)
TABLE 217. BRAZIL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MEMORY, 2018-2024 (USD MILLION)
TABLE 218. BRAZIL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MEMORY, 2025-2030 (USD MILLION)
TABLE 219. BRAZIL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TECHNOLOGY, 2018-2024 (USD MILLION)
TABLE 220. BRAZIL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TECHNOLOGY, 2025-2030 (USD MILLION)
TABLE 221. BRAZIL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INSPECTION MODE, 2018-2024 (USD MILLION)
TABLE 222. BRAZIL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INSPECTION MODE, 2025-2030 (USD MILLION)
TABLE 223. BRAZIL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INLINE, 2018-2024 (USD MILLION)
TABLE 224. BRAZIL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INLINE, 2025-2030 (USD MILLION)
TABLE 225. BRAZIL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY OFFLINE, 2018-2024 (USD MILLION)
TABLE 226. BRAZIL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY OFFLINE, 2025-2030 (USD MILLION)
TABLE 227. BRAZIL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MASK TYPE, 2018-2024 (USD MILLION)
TABLE 228. BRAZIL EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MASK TYPE, 2025-2030 (USD MILLION)
TABLE 229. ARGENTINA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY PRODUCT, 2018-2024 (USD MILLION)
TABLE 230. ARGENTINA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY PRODUCT, 2025-2030 (USD MILLION)
TABLE 231. ARGENTINA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SERVICES, 2018-2024 (USD MILLION)
TABLE 232. ARGENTINA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SERVICES, 2025-2030 (USD MILLION)
TABLE 233. ARGENTINA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MAINTENANCE, 2018-2024 (USD MILLION)
TABLE 234. ARGENTINA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MAINTENANCE, 2025-2030 (USD MILLION)
TABLE 235. ARGENTINA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SOFTWARE, 2018-2024 (USD MILLION)
TABLE 236. ARGENTINA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SOFTWARE, 2025-2030 (USD MILLION)
TABLE 237. ARGENTINA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TOOL TYPE, 2018-2024 (USD MILLION)
TABLE 238. ARGENTINA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TOOL TYPE, 2025-2030 (USD MILLION)
TABLE 239. ARGENTINA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY APPLICATION, 2018-2024 (USD MILLION)
TABLE 240. ARGENTINA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY APPLICATION, 2025-2030 (USD MILLION)
TABLE 241. ARGENTINA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY LOGIC, 2018-2024 (USD MILLION)
TABLE 242. ARGENTINA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY LOGIC, 2025-2030 (USD MILLION)
TABLE 243. ARGENTINA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MEMORY, 2018-2024 (USD MILLION)
TABLE 244. ARGENTINA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MEMORY, 2025-2030 (USD MILLION)
TABLE 245. ARGENTINA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TECHNOLOGY, 2018-2024 (USD MILLION)
TABLE 246. ARGENTINA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TECHNOLOGY, 2025-2030 (USD MILLION)
TABLE 247. ARGENTINA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INSPECTION MODE, 2018-2024 (USD MILLION)
TABLE 248. ARGENTINA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INSPECTION MODE, 2025-2030 (USD MILLION)
TABLE 249. ARGENTINA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INLINE, 2018-2024 (USD MILLION)
TABLE 250. ARGENTINA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INLINE, 2025-2030 (USD MILLION)
TABLE 251. ARGENTINA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY OFFLINE, 2018-2024 (USD MILLION)
TABLE 252. ARGENTINA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY OFFLINE, 2025-2030 (USD MILLION)
TABLE 253. ARGENTINA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MASK TYPE, 2018-2024 (USD MILLION)
TABLE 254. ARGENTINA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MASK TYPE, 2025-2030 (USD MILLION)
TABLE 255. EUROPE, MIDDLE EAST & AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY PRODUCT, 2018-2024 (USD MILLION)
TABLE 256. EUROPE, MIDDLE EAST & AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY PRODUCT, 2025-2030 (USD MILLION)
TABLE 257. EUROPE, MIDDLE EAST & AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SERVICES, 2018-2024 (USD MILLION)
TABLE 258. EUROPE, MIDDLE EAST & AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SERVICES, 2025-2030 (USD MILLION)
TABLE 259. EUROPE, MIDDLE EAST & AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MAINTENANCE, 2018-2024 (USD MILLION)
TABLE 260. EUROPE, MIDDLE EAST & AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MAINTENANCE, 2025-2030 (USD MILLION)
TABLE 261. EUROPE, MIDDLE EAST & AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SOFTWARE, 2018-2024 (USD MILLION)
TABLE 262. EUROPE, MIDDLE EAST & AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SOFTWARE, 2025-2030 (USD MILLION)
TABLE 263. EUROPE, MIDDLE EAST & AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TOOL TYPE, 2018-2024 (USD MILLION)
TABLE 264. EUROPE, MIDDLE EAST & AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TOOL TYPE, 2025-2030 (USD MILLION)
TABLE 265. EUROPE, MIDDLE EAST & AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY APPLICATION, 2018-2024 (USD MILLION)
TABLE 266. EUROPE, MIDDLE EAST & AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY APPLICATION, 2025-2030 (USD MILLION)
TABLE 267. EUROPE, MIDDLE EAST & AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY LOGIC, 2018-2024 (USD MILLION)
TABLE 268. EUROPE, MIDDLE EAST & AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY LOGIC, 2025-2030 (USD MILLION)
TABLE 269. EUROPE, MIDDLE EAST & AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MEMORY, 2018-2024 (USD MILLION)
TABLE 270. EUROPE, MIDDLE EAST & AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MEMORY, 2025-2030 (USD MILLION)
TABLE 271. EUROPE, MIDDLE EAST & AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TECHNOLOGY, 2018-2024 (USD MILLION)
TABLE 272. EUROPE, MIDDLE EAST & AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TECHNOLOGY, 2025-2030 (USD MILLION)
TABLE 273. EUROPE, MIDDLE EAST & AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INSPECTION MODE, 2018-2024 (USD MILLION)
TABLE 274. EUROPE, MIDDLE EAST & AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INSPECTION MODE, 2025-2030 (USD MILLION)
TABLE 275. EUROPE, MIDDLE EAST & AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INLINE, 2018-2024 (USD MILLION)
TABLE 276. EUROPE, MIDDLE EAST & AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY INLINE, 2025-2030 (USD MILLION)
TABLE 277. EUROPE, MIDDLE EAST & AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY OFFLINE, 2018-2024 (USD MILLION)
TABLE 278. EUROPE, MIDDLE EAST & AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY OFFLINE, 2025-2030 (USD MILLION)
TABLE 279. EUROPE, MIDDLE EAST & AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MASK TYPE, 2018-2024 (USD MILLION)
TABLE 280. EUROPE, MIDDLE EAST & AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MASK TYPE, 2025-2030 (USD MILLION)
TABLE 281. EUROPE, MIDDLE EAST & AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY COUNTRY, 2018-2024 (USD MILLION)
TABLE 282. EUROPE, MIDDLE EAST & AFRICA EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY COUNTRY, 2025-2030 (USD MILLION)
TABLE 283. UNITED KINGDOM EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY PRODUCT, 2018-2024 (USD MILLION)
TABLE 284. UNITED KINGDOM EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY PRODUCT, 2025-2030 (USD MILLION)
TABLE 285. UNITED KINGDOM EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SERVICES, 2018-2024 (USD MILLION)
TABLE 286. UNITED KINGDOM EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SERVICES, 2025-2030 (USD MILLION)
TABLE 287. UNITED KINGDOM EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MAINTENANCE, 2018-2024 (USD MILLION)
TABLE 288. UNITED KINGDOM EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MAINTENANCE, 2025-2030 (USD MILLION)
TABLE 289. UNITED KINGDOM EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SOFTWARE, 2018-2024 (USD MILLION)
TABLE 290. UNITED KINGDOM EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY SOFTWARE, 2025-2030 (USD MILLION)
TABLE 291. UNITED KINGDOM EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TOOL TYPE, 2018-2024 (USD MILLION)
TABLE 292. UNITED KINGDOM EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TOOL TYPE, 2025-2030 (USD MILLION)
TABLE 293. UNITED KINGDOM EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY APPLICATION, 2018-2024 (USD MILLION)
TABLE 294. UNITED KINGDOM EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY APPLICATION, 2025-2030 (USD MILLION)
TABLE 295. UNITED KINGDOM EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY LOGIC, 2018-2024 (USD MILLION)
TABLE 296. UNITED KINGDOM EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY LOGIC, 2025-2030 (USD MILLION)
TABLE 297. UNITED KINGDOM EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MEMORY, 2018-2024 (USD MILLION)
TABLE 298. UNITED KINGDOM EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY MEMORY, 2025-2030 (USD MILLION)
TABLE 299. UNITED KINGDOM EUV MASK DEFECT DETECTION EQUIPMENT MARKET SIZE, BY TECHNOLO

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Companies Mentioned

The companies profiled in this EUV Mask Defect Detection Equipment market report include:
  • KLA Corporation
  • Applied Materials, Inc.
  • Onto Innovation Inc.
  • ASML Holding N.V.
  • Nikon Corporation
  • Hitachi High-Technologies Corporation
  • Canon Inc.
  • JEOL Ltd.
  • Carl Zeiss SMT GmbH
  • Vistec Electron Beam GmbH

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