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Semiconductor Metrology and Inspection Equipment Market: Global Industry Analysis, Trends, Market Size, and Forecasts up to 2032

  • Report

  • 300 Pages
  • August 2025
  • Region: Global
  • Infinium Global Research
  • ID: 6169876
UP TO OFF until Aug 31st 2026
The report on the global semiconductor metrology and inspection equipment market provides qualitative and quantitative analysis for the period from 2022-2032. The global semiconductor metrology and inspection equipment market was valued at USD 8.41 billion in 2023 and is expected to reach USD 15.32 billion in 2032, with a CAGR of 6.92% during the forecast period 2024-2032. The study on semiconductor metrology and inspection equipment market covers the analysis of the leading geographies such as North America, Europe, Asia Pacific, and RoW for the period of 2022-2032.

The report on semiconductor metrology and inspection equipment market is a comprehensive study and presentation of drivers, restraints, opportunities, demand factors, market size, forecasts, and trends in the global semiconductor metrology and inspection equipment market over the period of 2022-2032. Moreover, the report is a collective presentation of primary and secondary research findings.

Porter's five forces model in the report provides insights into the competitive rivalry, supplier and buyer positions in the market and opportunities for the new entrants in the global semiconductor metrology and inspection equipment market over the period of 2022-2032. Further, the publisher's Growth Matrix gave in the report brings an insight into the investment areas that existing or new market players can consider.

Report Findings

1. Drivers

  • The decreasing feature sizes and advancements in process nodes are driving the semiconductor metrology and inspection equipment market growth.
  • The increasing use of extreme ultraviolet (EUV) lithography in advanced semiconductor manufacturing is stimulating market growth.

2. Restraints

  • Supply chain disruptions and shortages of critical components can hamper the growth of the market.

3. Opportunities

  • The increasing demand for high-performance, reliable semiconductor devices in AI, automotive electronics, and 5G applications offers significant growth opportunities for the market.

Research Methodology

A) Primary Research

The primary research involves extensive interviews and analysis of the opinions provided by the primary respondents. The primary research starts with identifying and approaching the primary respondents, the primary respondents are approached include
1. Key Opinion Leaders
2. Internal and External subject matter experts
3. Professionals and participants from the industry

The primary research respondents typically include

1. Executives working with leading companies in the market under review
2. Product/brand/marketing managers
3. CXO level executives
4. Regional/zonal/ country managers
5. Vice President level executives.

B) Secondary Research

Secondary research involves extensive exploring through the secondary sources of information available in both the public domain and paid sources. Each research study is based on over 500 hours of secondary research accompanied by primary research. The information obtained through the secondary sources is validated through the crosscheck on various data sources.

The secondary sources of the data typically include

1. Company reports and publications
2. Government/institutional publications
3. Trade and associations journals
4. Databases such as WTO, OECD, World Bank, and among others.
5. Websites and publications by research agencies

Segment Covered

The global semiconductor metrology and inspection equipment market is segmented on the basis of technology, dimension, process node, and fab type.

The Global Semiconductor Metrology and Inspection Equipment Market by Technology

  • Inspection Equipment
  • Wafer Inspection
  • Defect Inspection
  • Mask / Photomask Inspection
  • Bump & Package Inspection
  • Others
  • Metrology Equipment
  • Critical Dimension (CD) Metrology
  • Thin Film Metrology
  • Overlay Metrology
  • Wafer Shape & Surface Metrology
  • Others

The Global Semiconductor Metrology and Inspection Equipment Market by Dimension

  • 2D Metrology / Inspection
  • 3D Metrology / Inspection
  • Hybrid 2D/3D Systems

The Global Semiconductor Metrology and Inspection Equipment Market by Process Node

  • ≤ 7 nm
  • 8-14 nm
  • 15-28 nm
  • 28 nm

The Global Semiconductor Metrology and Inspection Equipment Market by Fab Type

  • Foundry
  • Memory
  • Logic
  • Integrated Device Manufacturer (IDM)

Company Profiles

The companies covered in the report include

  • Applied Materials, Inc.
  • Nova Ltd.
  • Hitachi High-Tech Corporation
  • Lasertec Corporation
  • Thermo Fisher Scientific Inc.
  • ASML Holding N.V.
  • Onto Innovation Inc.
  • KLA Corporation
  • SCREEN Semiconductor Solutions Co., Ltd.
  • Camtek

What does this report deliver?

1. Comprehensive analysis of the global as well as regional markets of the semiconductor metrology and inspection equipment market.
2. Complete coverage of all the segments in the semiconductor metrology and inspection equipment market to analyze the trends, developments in the global market and forecast of market size up to 2032.
3. Comprehensive analysis of the companies operating in the global semiconductor metrology and inspection equipment market. The company profile includes analysis of product portfolio, revenue, SWOT analysis and latest developments of the company.
4. The publisher's Growth Matrix presents an analysis of the product segments and geographies that market players should focus to invest, consolidate, expand and/or diversify.

Table of Contents

Chapter 1. Preface
1.1. Report Description
1.2. Research Methods
1.3. Research Approaches
Chapter 2. Executive Summary
2.1. Semiconductor Metrology and Inspection Equipment Market Highlights
2.2. Semiconductor Metrology and Inspection Equipment Market Projection
2.3. Semiconductor Metrology and Inspection Equipment Market Regional Highlights
Chapter 3. Global Semiconductor Metrology and Inspection Equipment Market Overview
3.1. Introduction
3.2. Market Dynamics
3.2.1. Drivers
3.2.2. Restraints
3.2.3. Opportunities
3.3. Porter's Five Forces Analysis
3.4. Growth Matrix Analysis
3.4.1. Growth Matrix Analysis by Technology
3.4.2. Growth Matrix Analysis by Dimension
3.4.3. Growth Matrix Analysis by Process Node
3.4.4. Growth Matrix Analysis by Fab Type
3.4.5. Growth Matrix Analysis by Region
3.5. Value Chain Analysis of Semiconductor Metrology and Inspection Equipment Market
Chapter 4. Semiconductor Metrology and Inspection Equipment Market Macro Indicator Analysis
Chapter 5. Company Profiles and Competitive Landscape
5.1. Competitive Landscape in the Global Semiconductor Metrology and Inspection Equipment Market
5.2. Companies Profiles
5.2.1. Applied Materials, Inc.
5.2.2. Nova Ltd.
5.2.3. Hitachi High-Tech Corporation
5.2.4. Lasertec Corporation
5.2.5. Thermo Fisher Scientific Inc.
5.2.6. ASML Holding N.V.
5.2.7. Onto Innovation Inc.
5.2.8. KLA Corporation
5.2.9. SCREEN Semiconductor Solutions Co., Ltd.
5.2.10. Camtek
Chapter 6. Global Semiconductor Metrology and Inspection Equipment Market by Technology
6.1. Inspection Equipment
6.1.1. Wafer Inspection
6.1.2. Defect Inspection
6.1.3. Mask / Photomask Inspection
6.1.4. Bump & Package Inspection
6.1.5. Others
6.2. Metrology Equipment
6.2.1. Critical Dimension (CD) Metrology
6.2.2. Thin Film Metrology
6.2.3. Overlay Metrology
6.2.4. Wafer Shape & Surface Metrology
6.2.5. Others
Chapter 7. Global Semiconductor Metrology and Inspection Equipment Market by Dimension
7.1. 2D Metrology / Inspection
7.2. 3D Metrology / Inspection
7.3. Hybrid 2D/3D Systems
Chapter 8. Global Semiconductor Metrology and Inspection Equipment Market by Process Node
8.1. = 7 nm
8.2. 8-14 nm
8.3. 15-28 nm
8.4. 28 nm
Chapter 9. Global Semiconductor Metrology and Inspection Equipment Market by Fab Type
9.1. Foundry
9.2. Memory
9.3. Logic
9.4. Integrated Device Manufacturer (IDM)
Chapter 10. Global Semiconductor Metrology and Inspection Equipment Market by Region 2024-2032
10.1. North America
10.1.1. North America Semiconductor Metrology and Inspection Equipment Market by Technology
10.1.2. North America Semiconductor Metrology and Inspection Equipment Market by Dimension
10.1.3. North America Semiconductor Metrology and Inspection Equipment Market by Process Node
10.1.4. North America Semiconductor Metrology and Inspection Equipment Market by Fab Type
10.1.5. North America Semiconductor Metrology and Inspection Equipment Market by Country
10.1.5.1. The U.S. Semiconductor Metrology and Inspection Equipment Market
10.1.5.1.1. The U.S. Semiconductor Metrology and Inspection Equipment Market by Technology
10.1.5.1.2. The U.S. Semiconductor Metrology and Inspection Equipment Market by Dimension
10.1.5.1.3. The U.S. Semiconductor Metrology and Inspection Equipment Market by Process Node
10.1.5.1.4. The U.S. Semiconductor Metrology and Inspection Equipment Market by Fab Type
10.1.5.2. Canada Semiconductor Metrology and Inspection Equipment Market
10.1.5.2.1. Canada Semiconductor Metrology and Inspection Equipment Market by Technology
10.1.5.2.2. Canada Semiconductor Metrology and Inspection Equipment Market by Dimension
10.1.5.2.3. Canada Semiconductor Metrology and Inspection Equipment Market by Process Node
10.1.5.2.4. Canada Semiconductor Metrology and Inspection Equipment Market by Fab Type
10.1.5.3. Mexico Semiconductor Metrology and Inspection Equipment Market
10.1.5.3.1. Mexico Semiconductor Metrology and Inspection Equipment Market by Technology
10.1.5.3.2. Mexico Semiconductor Metrology and Inspection Equipment Market by Dimension
10.1.5.3.3. Mexico Semiconductor Metrology and Inspection Equipment Market by Process Node
10.1.5.3.4. Mexico Semiconductor Metrology and Inspection Equipment Market by Fab Type
10.2. Europe
10.2.1. Europe Semiconductor Metrology and Inspection Equipment Market by Technology
10.2.2. Europe Semiconductor Metrology and Inspection Equipment Market by Dimension
10.2.3. Europe Semiconductor Metrology and Inspection Equipment Market by Process Node
10.2.4. Europe Semiconductor Metrology and Inspection Equipment Market by Fab Type
10.2.5. Europe Semiconductor Metrology and Inspection Equipment Market by Country
10.2.5.1. Germany Semiconductor Metrology and Inspection Equipment Market
10.2.5.1.1. Germany Semiconductor Metrology and Inspection Equipment Market by Technology
10.2.5.1.2. Germany Semiconductor Metrology and Inspection Equipment Market by Dimension
10.2.5.1.3. Germany Semiconductor Metrology and Inspection Equipment Market by Process Node
10.2.5.1.4. Germany Semiconductor Metrology and Inspection Equipment Market by Fab Type
10.2.5.2. United Kingdom Semiconductor Metrology and Inspection Equipment Market
10.2.5.2.1. United Kingdom Semiconductor Metrology and Inspection Equipment Market by Technology
10.2.5.2.2. United Kingdom Semiconductor Metrology and Inspection Equipment Market by Dimension
10.2.5.2.3. United Kingdom Semiconductor Metrology and Inspection Equipment Market by Process Node
10.2.5.2.4. United Kingdom Semiconductor Metrology and Inspection Equipment Market by Fab Type
10.2.5.3. France Semiconductor Metrology and Inspection Equipment Market
10.2.5.3.1. France Semiconductor Metrology and Inspection Equipment Market by Technology
10.2.5.3.2. France Semiconductor Metrology and Inspection Equipment Market by Dimension
10.2.5.3.3. France Semiconductor Metrology and Inspection Equipment Market by Process Node
10.2.5.3.4. France Semiconductor Metrology and Inspection Equipment Market by Fab Type
10.2.5.4. Rest of Europe Semiconductor Metrology and Inspection Equipment Market
10.2.5.4.1. Rest of Europe Semiconductor Metrology and Inspection Equipment Market by Technology
10.2.5.4.2. Rest of Europe Semiconductor Metrology and Inspection Equipment Market by Dimension
10.2.5.4.3. Rest of Europe Semiconductor Metrology and Inspection Equipment Market by Process Node
10.2.5.4.4. Rest of Europe Semiconductor Metrology and Inspection Equipment Market by Fab Type
10.3. Asia Pacific
10.3.1. Asia Pacific Semiconductor Metrology and Inspection Equipment Market by Technology
10.3.2. Asia Pacific Semiconductor Metrology and Inspection Equipment Market by Dimension
10.3.3. Asia Pacific Semiconductor Metrology and Inspection Equipment Market by Process Node
10.3.4. Asia Pacific Semiconductor Metrology and Inspection Equipment Market by Fab Type
10.3.5. Asia Pacific Semiconductor Metrology and Inspection Equipment Market by Country
10.3.5.1. China Semiconductor Metrology and Inspection Equipment Market
10.3.5.1.1. China Semiconductor Metrology and Inspection Equipment Market by Technology
10.3.5.1.2. China Semiconductor Metrology and Inspection Equipment Market by Dimension
10.3.5.1.3. China Semiconductor Metrology and Inspection Equipment Market by Process Node
10.3.5.1.4. China Semiconductor Metrology and Inspection Equipment Market by Fab Type
10.3.5.2. Japan Semiconductor Metrology and Inspection Equipment Market
10.3.5.2.1. Japan Semiconductor Metrology and Inspection Equipment Market by Technology
10.3.5.2.2. Japan Semiconductor Metrology and Inspection Equipment Market by Dimension
10.3.5.2.3. Japan Semiconductor Metrology and Inspection Equipment Market by Process Node
10.3.5.2.4. Japan Semiconductor Metrology and Inspection Equipment Market by Fab Type
10.3.5.3. India Semiconductor Metrology and Inspection Equipment Market
10.3.5.3.1. India Semiconductor Metrology and Inspection Equipment Market by Technology
10.3.5.3.2. India Semiconductor Metrology and Inspection Equipment Market by Dimension
10.3.5.3.3. India Semiconductor Metrology and Inspection Equipment Market by Process Node
10.3.5.3.4. India Semiconductor Metrology and Inspection Equipment Market by Fab Type
10.3.5.4. Rest of Asia-Pacific Semiconductor Metrology and Inspection Equipment Market
10.3.5.4.1. Rest of Asia-Pacific Semiconductor Metrology and Inspection Equipment Market by Technology
10.3.5.4.2. Rest of Asia-Pacific Semiconductor Metrology and Inspection Equipment Market by Dimension
10.3.5.4.3. Rest of Asia-Pacific Semiconductor Metrology and Inspection Equipment Market by Process Node
10.3.5.4.4. Rest of Asia-Pacific Semiconductor Metrology and Inspection Equipment Market by Fab Type
10.4. RoW
10.4.1. RoW Semiconductor Metrology and Inspection Equipment Market by Technology
10.4.2. RoW Semiconductor Metrology and Inspection Equipment Market by Dimension
10.4.3. RoW Semiconductor Metrology and Inspection Equipment Market by Process Node
10.4.4. RoW Semiconductor Metrology and Inspection Equipment Market by Fab Type
10.4.5. RoW Semiconductor Metrology and Inspection Equipment Market by Sub-region
10.4.5.1. Latin America Semiconductor Metrology and Inspection Equipment Market
10.4.5.1.1. Latin America Semiconductor Metrology and Inspection Equipment Market by Technology
10.4.5.1.2. Latin America Semiconductor Metrology and Inspection Equipment Market by Dimension
10.4.5.1.3. Latin America Semiconductor Metrology and Inspection Equipment Market by Process Node
10.4.5.1.4. Latin America Semiconductor Metrology and Inspection Equipment Market by Fab Type
10.4.5.2. Middle East Semiconductor Metrology and Inspection Equipment Market
10.4.5.2.1. Middle East Semiconductor Metrology and Inspection Equipment Market by Technology
10.4.5.2.2. Middle East Semiconductor Metrology and Inspection Equipment Market by Dimension
10.4.5.2.3. Middle East Semiconductor Metrology and Inspection Equipment Market by Process Node
10.4.5.2.4. Middle East Semiconductor Metrology and Inspection Equipment Market by Fab Type
10.4.5.3. Africa Semiconductor Metrology and Inspection Equipment Market
10.4.5.3.1. Africa Semiconductor Metrology and Inspection Equipment Market by Technology
10.4.5.3.2. Africa Semiconductor Metrology and Inspection Equipment Market by Dimension
10.4.5.3.3. Africa Semiconductor Metrology and Inspection Equipment Market by Process Node
10.4.5.3.4. Africa Semiconductor Metrology and Inspection Equipment Market by Fab Type

Table Information