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Dry Etching Equipment Market Report 2025

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    Report

  • 250 Pages
  • October 2025
  • Region: Global
  • The Business Research Company
  • ID: 6177480
The dry etching equipment market size has grown strongly in recent years. It will grow from $11.02 billion in 2024 to $11.94 billion in 2025 at a compound annual growth rate (CAGR) of 8.4%. The growth observed during the historic period was driven by rising demand for compact electronic devices, increased use of semiconductors in consumer electronics, expanding production of integrated circuits, growing investments in foundry facilities, and wider adoption of automation in fabrication processes.

The dry etching equipment market size is expected to see strong growth in the next few years. It will grow to $16.24 billion in 2029 at a compound annual growth rate (CAGR) of 8%. The projected growth during the forecast period is driven by the expanding use of 3D NAND and FinFET technologies, rising demand for advanced node chips, increasing need for high-performance computing devices, growing investments in memory chip manufacturing, and higher demand for wearable electronics. Key trends expected include advancements in plasma etching processes, innovations in atomic layer etching systems, R&D investment in sub-5nm etching tools, developments in dry etching for heterogeneous integration, and adoption of AI-powered process control systems.

The growing demand for semiconductor devices is expected to propel the dry etching equipment market in the coming years. Semiconductor devices are electronic components that control electrical current by utilizing the unique properties of semiconductor materials. This demand is largely driven by the rapid expansion of the consumer electronics sector, as devices such as smartphones, laptops, and smart home products rely on advanced chips for enhanced performance and functionality. Dry etching equipment supports semiconductor manufacturing by precisely shaping and patterning microscopic circuits on silicon wafers, enabling higher performance, miniaturization, and improved efficiency in electronic components. For example, according to the Japan Electronics and Information Technology Industries Association, Japan’s electronic equipment production reached $5.6 billion (771,457 million yen) in May 2023. The output of consumer electronics increased to $233 million (32,099 million yen), up from $183 million (25,268 million yen) in May 2022. This rising demand for semiconductor devices is therefore driving the growth of the dry etching equipment market.

Leading players in the dry etching equipment market are developing innovative solutions, including plasma etching-based tools, to improve precision, scalability, and efficiency in semiconductor fabrication. Plasma etching equipment uses ionized gases to remove material from substrates, enabling precise and controlled etching of micro-scale patterns and structures. For example, in November 2024, Japan-based Hitachi High-Technologies Corporation launched the DCR Etch System 9060 Series, designed for precise isotropic (horizontal) etching at the atomic layer level. The system employs plasma etching technology to support the fabrication of advanced three-dimensional semiconductor devices, such as 3D-NAND and 3D-DRAM. It offers high-throughput processing and a compact footprint through a unique wafer-cooling mechanism combined with an infrared lamp that rapidly alternates wafer temperatures, allowing atomic-level control of wafer pattern shapes essential for complex 3D architectures. The system is suitable for both R&D and mass production, helping reduce development cycles, lower costs, and boost productivity in semiconductor manufacturing.

In November 2023, U.S.-based plasma processing equipment provider Plasma-Therm LLC acquired Thin Film Equipment SRL for an undisclosed sum. This acquisition enables Plasma-Therm to expand its European footprint as part of its long-term strategic growth plan and significantly broaden its power device offerings by integrating TFE’s suite of physical vapor deposition (PVD) tools designed for MEMS, power, RFID, and other semiconductor applications. Thin Film Equipment SRL, headquartered in Italy, specializes in semiconductor and MEMS equipment for dry-etch technologies.

Major players in the dry etching equipment market are Panasonic Corporation, Applied Materials Inc., Lam Research Corporation, Tokyo Electron Limited, KLA Corporation, Hitachi High-Technologies Corporation, NAURA Technology Group Co. Ltd., DISCO Corporation, Advanced Energy Industries Inc., ULVAC Inc., Advanced Micro-Fabrication Equipment Inc., Oxford Instruments plc, Shibaura Mechatronics Corporation, GigaLane Co. Ltd., Plasma-Therm LLC, Samco Inc., SENTECH Instruments GmbH, Plasma Etch Inc., Nano-Master Inc., PVA TePla AG.

Asia-Pacific was the largest region in the dry etching equipment market in 2024. Asia-Pacific is expected to be the fastest-growing region in the forecast period. The regions covered in dry etching equipment report are Asia-Pacific, Western Europe, Eastern Europe, North America, South America, Middle East and Africa. The countries covered in the dry etching equipment market report are Australia, Brazil, China, France, Germany, India, Indonesia, Japan, Russia, South Korea, UK, USA, Canada, Italy, Spain.

Note that the outlook for this market is being affected by rapid changes in trade relations and tariffs globally. The report will be updated prior to delivery to reflect the latest status, including revised forecasts and quantified impact analysis. The report’s Recommendations and Conclusions sections will be updated to give strategies for entities dealing with the fast-moving international environment.

The swift increase in U.S. tariffs and the ensuing trade tensions in spring 2025 are significantly affecting the machinery sector by increasing costs for steel, hydraulic systems, and precision bearings critical components often imported from tariff-affected regions. Manufacturers of construction, agricultural, and industrial machinery now face squeezed margins, as many long-term contracts prevent immediate price adjustments. The uncertainty has also delayed investment in automation and smart machinery technologies, slowing productivity gains. To adapt, firms are accelerating local supplier development, redesigning products to use alternative materials, and leveraging predictive maintenance to extend equipment lifespans amid higher replacement costs.

Dry etching equipment is a semiconductor manufacturing tool that removes material from a substrate using plasma or reactive gases instead of liquid chemicals. It enables the creation of fine patterns and complex structures on microchips with high precision while minimizing damage to surrounding areas. This equipment plays a key role in advanced device fabrication, including integrated circuits, by providing controlled, anisotropic etching.

The main types of dry etching equipment include inductively coupled plasma (ICP) etching, capacitively coupled plasma etching, reactive ion etching, deep reactive ion etching, and others. ICP etching is a high-density plasma technique that uses inductive coils to generate plasma, allowing precise, anisotropic, and high-aspect-ratio etching of semiconductor materials. Key components of these systems include etch chambers, gas control systems, power supplies, cooling systems, and software/control systems. The equipment is available in various configurations, such as batch etchers, single-wafer etchers, high-volume production etchers, modular etching systems, and advanced automated etch tools. These systems are widely applied in semiconductor fabrication, micro-electro-mechanical systems (MEMS), LED production, and other areas, serving end users across electronics, automotive, aerospace, healthcare, and more.

The dry etching equipment market research report is one of a series of new reports that provides dry etching equipment market statistics, including dry etching equipment industry global market size, regional shares, competitors with a dry etching equipment market share, detailed dry etching equipment market segments, market trends and opportunities, and any further data you may need to thrive in the dry etching equipment industry. This dry etching equipment market research report delivers a complete perspective of everything you need, with an in-depth analysis of the current and future scenario of the industry.

The dry etching equipment market consists of revenues earned by entities by providing services such as installation and commissioning services, maintenance and repair services, process development and optimization services, training and technical support services, and upgrade and retrofit services. The market value includes the value of related goods sold by the service provider or included within the service offering. The dry etching equipment market also includes sales of metal etching systems, dielectric etching systems, and hybrid etching systems. Values in this market are ‘factory gate’ values; that is, the value of goods sold by the manufacturers or creators of the goods, whether to other entities (including downstream manufacturers, wholesalers, distributors, and retailers) or directly to end customers. The value of goods in this market includes related services sold by the creators of the goods.

The market value is defined as the revenues that enterprises gain from the sale of goods and/or services within the specified market and geography through sales, grants, or donations in terms of the currency (in USD unless otherwise specified).

The revenues for a specified geography are consumption values that are revenues generated by organizations in the specified geography within the market, irrespective of where they are produced. It does not include revenues from resales along the supply chain, either further along the supply chain or as part of other products.

This product will be delivered within 3-5 business days.

Table of Contents

1. Executive Summary2. Dry Etching Equipment Market Characteristics3. Dry Etching Equipment Market Trends and Strategies
4. Dry Etching Equipment Market - Macro Economic Scenario Including the Impact of Interest Rates, Inflation, Geopolitics, Trade Wars and Tariffs, and Covid and Recovery on the Market
4.1. Supply Chain Impact from Tariff War & Trade Protectionism
5. Global Dry Etching Equipment Growth Analysis and Strategic Analysis Framework
5.1. Global Dry Etching Equipment PESTEL Analysis (Political, Social, Technological, Environmental and Legal Factors, Drivers and Restraints)
5.2. Analysis of End Use Industries
5.3. Global Dry Etching Equipment Market Growth Rate Analysis
5.4. Global Dry Etching Equipment Historic Market Size and Growth, 2019 - 2024, Value ($ Billion)
5.5. Global Dry Etching Equipment Forecast Market Size and Growth, 2024 - 2029, 2034F, Value ($ Billion)
5.6. Global Dry Etching Equipment Total Addressable Market (TAM)
6. Dry Etching Equipment Market Segmentation
6.1. Global Dry Etching Equipment Market, Segmentation by Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • Inductively Coupled Plasma Etching
  • Capacitive Coupled Plasma Etching
  • Reactive Ion Etching
  • Deep Reactive Ion Etching
  • Other Types
6.2. Global Dry Etching Equipment Market, Segmentation by Component Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • Etch Chambers
  • Gas Control Systems
  • Power Supplies
  • Cooling Systems
  • Software and Control Systems
6.3. Global Dry Etching Equipment Market, Segmentation by Equipment Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • Batch Etchers
  • Single Wafer Etchers
  • High Volume Production Etchers
  • Modular Etching Systems
  • Etch Tools With Advanced Automation
6.4. Global Dry Etching Equipment Market, Segmentation by Application, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • Semiconductor Manufacturing
  • Micro-Electro-Mechanical Systems (MEMS)
  • Light Emitting Diode Production
  • Other Applications
6.5. Global Dry Etching Equipment Market, Segmentation by End-User, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • Electronics
  • Automotive
  • Aerospace
  • Healthcare
  • Other End-Users
6.6. Global Dry Etching Equipment Market, Sub-Segmentation of Inductively Coupled Plasma Etching, by Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • High Density Plasma Systems
  • Low Pressure Plasma Systems
  • Advanced Wafer Etching Systems
6.7. Global Dry Etching Equipment Market, Sub-Segmentation of Capacitive Coupled Plasma Etching, by Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • Parallel Plate Plasma Etching Systems
  • Medium Frequency Plasma Systems
  • Single Wafer Processing Systems
6.8. Global Dry Etching Equipment Market, Sub-Segmentation of Reactive Ion Etching, by Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • Parallel Plate Reactive Ion Etching Systems
  • High Selectivity Etching Systems
  • Low Damage Etching Systems
6.9. Global Dry Etching Equipment Market, Sub-Segmentation of Deep Reactive Ion Etching, by Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • Bosch Process Etching Systems
  • Cryogenic Process Etching Systems
  • High Aspect Ratio Etching Systems
6.10. Global Dry Etching Equipment Market, Sub-Segmentation of Other Types, by Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
  • Microwave Plasma Etching Systems
  • Neutral Beam Etching Systems
  • Atomic Layer Etching Systems
7. Dry Etching Equipment Market Regional and Country Analysis
7.1. Global Dry Etching Equipment Market, Split by Region, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
7.2. Global Dry Etching Equipment Market, Split by Country, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
8. Asia-Pacific Dry Etching Equipment Market
8.1. Asia-Pacific Dry Etching Equipment Market Overview
  • Region Information, Market Information, Background Information, Government Initiatives, Regulations, Regulatory Bodies, Major Associations, Taxes Levied, Corporate Tax Structure, Investments, Major Companies
8.2. Asia-Pacific Dry Etching Equipment Market, Segmentation by Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
8.3. Asia-Pacific Dry Etching Equipment Market, Segmentation by Component Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
8.4. Asia-Pacific Dry Etching Equipment Market, Segmentation by Equipment Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
9. China Dry Etching Equipment Market
9.1. China Dry Etching Equipment Market Overview
9.2. China Dry Etching Equipment Market, Segmentation by Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F,$ Billion
9.3. China Dry Etching Equipment Market, Segmentation by Component Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F,$ Billion
9.4. China Dry Etching Equipment Market, Segmentation by Equipment Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F,$ Billion
10. India Dry Etching Equipment Market
10.1. India Dry Etching Equipment Market, Segmentation by Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
10.2. India Dry Etching Equipment Market, Segmentation by Component Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
10.3. India Dry Etching Equipment Market, Segmentation by Equipment Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
11. Japan Dry Etching Equipment Market
11.1. Japan Dry Etching Equipment Market Overview
11.2. Japan Dry Etching Equipment Market, Segmentation by Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
11.3. Japan Dry Etching Equipment Market, Segmentation by Component Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
11.4. Japan Dry Etching Equipment Market, Segmentation by Equipment Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
12. Australia Dry Etching Equipment Market
12.1. Australia Dry Etching Equipment Market, Segmentation by Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
12.2. Australia Dry Etching Equipment Market, Segmentation by Component Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
12.3. Australia Dry Etching Equipment Market, Segmentation by Equipment Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
13. Indonesia Dry Etching Equipment Market
13.1. Indonesia Dry Etching Equipment Market, Segmentation by Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
13.2. Indonesia Dry Etching Equipment Market, Segmentation by Component Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
13.3. Indonesia Dry Etching Equipment Market, Segmentation by Equipment Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
14. South Korea Dry Etching Equipment Market
14.1. South Korea Dry Etching Equipment Market Overview
14.2. South Korea Dry Etching Equipment Market, Segmentation by Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
14.3. South Korea Dry Etching Equipment Market, Segmentation by Component Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
14.4. South Korea Dry Etching Equipment Market, Segmentation by Equipment Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
15. Western Europe Dry Etching Equipment Market
15.1. Western Europe Dry Etching Equipment Market Overview
15.2. Western Europe Dry Etching Equipment Market, Segmentation by Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
15.3. Western Europe Dry Etching Equipment Market, Segmentation by Component Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
15.4. Western Europe Dry Etching Equipment Market, Segmentation by Equipment Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
16. UK Dry Etching Equipment Market
16.1. UK Dry Etching Equipment Market, Segmentation by Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
16.2. UK Dry Etching Equipment Market, Segmentation by Component Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
16.3. UK Dry Etching Equipment Market, Segmentation by Equipment Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
17. Germany Dry Etching Equipment Market
17.1. Germany Dry Etching Equipment Market, Segmentation by Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
17.2. Germany Dry Etching Equipment Market, Segmentation by Component Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
17.3. Germany Dry Etching Equipment Market, Segmentation by Equipment Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
18. France Dry Etching Equipment Market
18.1. France Dry Etching Equipment Market, Segmentation by Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
18.2. France Dry Etching Equipment Market, Segmentation by Component Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
18.3. France Dry Etching Equipment Market, Segmentation by Equipment Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
19. Italy Dry Etching Equipment Market
19.1. Italy Dry Etching Equipment Market, Segmentation by Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
19.2. Italy Dry Etching Equipment Market, Segmentation by Component Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
19.3. Italy Dry Etching Equipment Market, Segmentation by Equipment Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
20. Spain Dry Etching Equipment Market
20.1. Spain Dry Etching Equipment Market, Segmentation by Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
20.2. Spain Dry Etching Equipment Market, Segmentation by Component Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
20.3. Spain Dry Etching Equipment Market, Segmentation by Equipment Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
21. Eastern Europe Dry Etching Equipment Market
21.1. Eastern Europe Dry Etching Equipment Market Overview
21.2. Eastern Europe Dry Etching Equipment Market, Segmentation by Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
21.3. Eastern Europe Dry Etching Equipment Market, Segmentation by Component Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
21.4. Eastern Europe Dry Etching Equipment Market, Segmentation by Equipment Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
22. Russia Dry Etching Equipment Market
22.1. Russia Dry Etching Equipment Market, Segmentation by Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
22.2. Russia Dry Etching Equipment Market, Segmentation by Component Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
22.3. Russia Dry Etching Equipment Market, Segmentation by Equipment Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
23. North America Dry Etching Equipment Market
23.1. North America Dry Etching Equipment Market Overview
23.2. North America Dry Etching Equipment Market, Segmentation by Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
23.3. North America Dry Etching Equipment Market, Segmentation by Component Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
23.4. North America Dry Etching Equipment Market, Segmentation by Equipment Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
24. USA Dry Etching Equipment Market
24.1. USA Dry Etching Equipment Market Overview
24.2. USA Dry Etching Equipment Market, Segmentation by Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
24.3. USA Dry Etching Equipment Market, Segmentation by Component Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
24.4. USA Dry Etching Equipment Market, Segmentation by Equipment Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
25. Canada Dry Etching Equipment Market
25.1. Canada Dry Etching Equipment Market Overview
25.2. Canada Dry Etching Equipment Market, Segmentation by Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
25.3. Canada Dry Etching Equipment Market, Segmentation by Component Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
25.4. Canada Dry Etching Equipment Market, Segmentation by Equipment Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
26. South America Dry Etching Equipment Market
26.1. South America Dry Etching Equipment Market Overview
26.2. South America Dry Etching Equipment Market, Segmentation by Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
26.3. South America Dry Etching Equipment Market, Segmentation by Component Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
26.4. South America Dry Etching Equipment Market, Segmentation by Equipment Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
27. Brazil Dry Etching Equipment Market
27.1. Brazil Dry Etching Equipment Market, Segmentation by Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
27.2. Brazil Dry Etching Equipment Market, Segmentation by Component Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
27.3. Brazil Dry Etching Equipment Market, Segmentation by Equipment Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
28. Middle East Dry Etching Equipment Market
28.1. Middle East Dry Etching Equipment Market Overview
28.2. Middle East Dry Etching Equipment Market, Segmentation by Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
28.3. Middle East Dry Etching Equipment Market, Segmentation by Component Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
28.4. Middle East Dry Etching Equipment Market, Segmentation by Equipment Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
29. Africa Dry Etching Equipment Market
29.1. Africa Dry Etching Equipment Market Overview
29.2. Africa Dry Etching Equipment Market, Segmentation by Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
29.3. Africa Dry Etching Equipment Market, Segmentation by Component Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
29.4. Africa Dry Etching Equipment Market, Segmentation by Equipment Type, Historic and Forecast, 2019-2024, 2024-2029F, 2034F, $ Billion
30. Dry Etching Equipment Market Competitive Landscape and Company Profiles
30.1. Dry Etching Equipment Market Competitive Landscape
30.2. Dry Etching Equipment Market Company Profiles
30.2.1. Panasonic Corporation Overview, Products and Services, Strategy and Financial Analysis
30.2.2. Applied Materials Inc. Overview, Products and Services, Strategy and Financial Analysis
30.2.3. Lam Research Corporation Overview, Products and Services, Strategy and Financial Analysis
30.2.4. Tokyo Electron Limited Overview, Products and Services, Strategy and Financial Analysis
30.2.5. KLA Corporation Overview, Products and Services, Strategy and Financial Analysis
31. Dry Etching Equipment Market Other Major and Innovative Companies
31.1. Hitachi High-Technologies Corporation
31.2. NAURA Technology Group Co. Ltd.
31.3. DISCO Corporation
31.4. Advanced Energy Industries Inc.
31.5. ULVAC Inc.
31.6. Advanced Micro-Fabrication Equipment Inc.
31.7. Oxford Instruments plc
31.8. Shibaura Mechatronics Corporation
31.9. GigaLane Co. Ltd.
31.10. Plasma-Therm LLC
31.11. Samco Inc.
31.12. SENTECH Instruments GmbH
31.13. Plasma Etch Inc.
31.14. Nano-Master Inc.
31.15. PVA TePla AG
32. Global Dry Etching Equipment Market Competitive Benchmarking and Dashboard33. Key Mergers and Acquisitions in the Dry Etching Equipment Market34. Recent Developments in the Dry Etching Equipment Market
35. Dry Etching Equipment Market High Potential Countries, Segments and Strategies
35.1 Dry Etching Equipment Market in 2029 - Countries Offering Most New Opportunities
35.2 Dry Etching Equipment Market in 2029 - Segments Offering Most New Opportunities
35.3 Dry Etching Equipment Market in 2029 - Growth Strategies
35.3.1 Market Trend-based Strategies
35.3.2 Competitor Strategies
36. Appendix
36.1. Abbreviations
36.2. Currencies
36.3. Historic and Forecast Inflation Rates
36.4. Research Inquiries
36.5. About the Analyst
36.6. Copyright and Disclaimer

Executive Summary

Dry Etching Equipment Global Market Report 2025 provides strategists, marketers and senior management with the critical information they need to assess the market.

This report focuses on dry etching equipment market which is experiencing strong growth. The report gives a guide to the trends which will be shaping the market over the next ten years and beyond.

Reasons to Purchase:

  • Gain a truly global perspective with the most comprehensive report available on this market covering 15 geographies.
  • Assess the impact of key macro factors such as geopolitical conflicts, trade policies and tariffs, post-pandemic supply chain realignment, inflation and interest rate fluctuations, and evolving regulatory landscapes.
  • Create regional and country strategies on the basis of local data and analysis.
  • Identify growth segments for investment.
  • Outperform competitors using forecast data and the drivers and trends shaping the market.
  • Understand customers based on the latest market shares.
  • Benchmark performance against key competitors.
  • Suitable for supporting your internal and external presentations with reliable high quality data and analysis
  • Report will be updated with the latest data and delivered to you along with an Excel data sheet for easy data extraction and analysis.
  • All data from the report will also be delivered in an excel dashboard format.

Description

Where is the largest and fastest growing market for dry etching equipment? How does the market relate to the overall economy, demography and other similar markets? What forces will shape the market going forward, including technological disruption, regulatory shifts, and changing consumer preferences? The dry etching equipment market global report answers all these questions and many more.

The report covers market characteristics, size and growth, segmentation, regional and country breakdowns, competitive landscape, market shares, trends and strategies for this market. It traces the market’s historic and forecast market growth by geography.
  • The market characteristics section of the report defines and explains the market.
  • The market size section gives the market size ($b) covering both the historic growth of the market, and forecasting its development.
  • The forecasts are made after considering the major factors currently impacting the market. These include: the technological advancements such as AI and automation, Russia-Ukraine war, trade tariffs (government-imposed import/export duties), elevated inflation and interest rates.
  • Market segmentations break down the market into sub markets.
  • The regional and country breakdowns section gives an analysis of the market in each geography and the size of the market by geography and compares their historic and forecast growth.
  • The competitive landscape chapter gives a description of the competitive nature of the market, market shares, and a description of the leading companies. Key financial deals which have shaped the market in recent years are identified.
  • The trends and strategies section analyses the shape of the market as it emerges from the crisis and suggests how companies can grow as the market recovers.

Report Scope

Markets Covered:

1) By Type: Inductively Coupled Plasma Etching; Capacitive Coupled Plasma Etching; Reactive Ion Etching; Deep Reactive Ion Etching; Others Types
2) By Component Type: Etch Chambers; Gas Control Systems; Power Supplies; Cooling Systems; Software and Control Systems
3) By Equipment Type: Batch Etchers; Single Wafer Etchers; High Volume Production Etchers; Modular Etching Systems; Etch Tools With Advanced Automation
4) By Application: Semiconductor Manufacturing; Micro-Electro-Mechanical Systems; Light Emitting Diode Production; Other Applications
5) By End-User: Electronics; Automotive; Aerospace; Healthcare; Other End-Users

Subsegments:

1) By Inductively Coupled Plasma Etching: High Density Plasma Systems; Low Pressure Plasma Systems; Advanced Wafer Etching Systems
2) By Capacitive Coupled Plasma Etching: Parallel Plate Plasma Etching Systems; Medium Frequency Plasma Systems; Single Wafer Processing Systems
3) By Reactive Ion Etching: Parallel Plate Reactive Ion Etching Systems; High Selectivity Etching Systems; Low Damage Etching Systems
4) By Deep Reactive Ion Etching: Bosch Process Etching Systems; Cryogenic Process Etching Systems; High Aspect Ratio Etching Systems
5) By Others Types: Microwave Plasma Etching Systems; Neutral Beam Etching Systems; Atomic Layer Etching Systems

Companies Mentioned: Panasonic Corporation; Applied Materials Inc.; Lam Research Corporation; Tokyo Electron Limited; KLA Corporation; Hitachi High-Technologies Corporation; NAURA Technology Group Co. Ltd.; DISCO Corporation; Advanced Energy Industries Inc.; ULVAC Inc.; Advanced Micro-Fabrication Equipment Inc.; Oxford Instruments plc; Shibaura Mechatronics Corporation; GigaLane Co. Ltd.; Plasma-Therm LLC; Samco Inc.; SENTECH Instruments GmbH; Plasma Etch Inc.; Nano-Master Inc.; PVA TePla AG

Countries: Australia; Brazil; China; France; Germany; India; Indonesia; Japan; Russia; South Korea; UK; USA; Canada; Italy; Spain.

Regions: Asia-Pacific; Western Europe; Eastern Europe; North America; South America; Middle East; Africa

Time Series: Five years historic and ten years forecast.

Data: Ratios of market size and growth to related markets, GDP proportions, expenditure per capita.

Data Segmentation: Country and regional historic and forecast data, market share of competitors, market segments.

Sourcing and Referencing: Data and analysis throughout the report is sourced using end notes.

Delivery Format: PDF, Word and Excel Data Dashboard.

Companies Mentioned

The companies featured in this Dry Etching Equipment market report include:
  • Panasonic Corporation
  • Applied Materials Inc.
  • Lam Research Corporation
  • Tokyo Electron Limited
  • KLA Corporation
  • Hitachi High-Technologies Corporation
  • NAURA Technology Group Co. Ltd.
  • DISCO Corporation
  • Advanced Energy Industries Inc.
  • ULVAC Inc.
  • Advanced Micro-Fabrication Equipment Inc.
  • Oxford Instruments plc
  • Shibaura Mechatronics Corporation
  • GigaLane Co. Ltd.
  • Plasma-Therm LLC
  • Samco Inc.
  • SENTECH Instruments GmbH
  • Plasma Etch Inc.
  • Nano-Master Inc.
  • PVA TePla AG

Table Information