Dry Etching Equipment Market Report 2026

The dry etching equipment market size has grown strongly in recent years. It will grow from $11.94 billion in 2025 to $12.92 billion in 2026 at a compound annual growth rate (CAGR) of 8.2%. The growth in the historic period can be attributed to scaling of semiconductor nodes, growth of integrated circuit manufacturing, demand for precision patterning, expansion of foundry capacity, advancement in plasma etching technologies.

The dry etching equipment market size is expected to see strong growth in the next few years. It will grow to $17.49 billion in 2030 at a compound annual growth rate (CAGR) of 7.9%. The growth in the forecast period can be attributed to growth of advanced logic and memory chips, expansion of EV semiconductor demand, adoption of 3 nm and below nodes, rising investment in chip manufacturing plants, demand for low damage etching processes. Major trends in the forecast period include adoption of atomic layer etching, rising demand for high aspect ratio etching, integration of advanced process control software, expansion of single wafer etching systems, increased focus on yield optimization.

The increasing demand for semiconductor devices is expected to drive the growth of the dry etching equipment market going forward. Semiconductor devices are electronic components that control electrical current using the unique properties of semiconductor materials. The rise in demand for these devices is primarily fueled by the rapid growth of consumer electronics, as products like smartphones, laptops, and smart home devices increasingly rely on advanced chips for enhanced performance and functionality. Dry etching equipment supports semiconductor manufacturing by precisely shaping and patterning microscopic circuits on silicon wafers, enabling miniaturization, improved efficiency, and higher performance in electronic components. For instance, in April 2024, according to SEMI, a China-based semiconductor industry association, global sales of semiconductor manufacturing equipment, including front-end tools such as dry etch systems, reached US$ 106.3 billion in 2023. Therefore, the increasing demand for semiconductor devices is driving the growth of the dry etching equipment market.

Leading players in the dry etching equipment market are developing innovative solutions, including plasma etching-based tools, to improve precision, scalability, and efficiency in semiconductor fabrication. Plasma etching equipment uses ionized gases to remove material from substrates, enabling precise and controlled etching of micro-scale patterns and structures. For example, in November 2024, Japan-based Hitachi High-Technologies Corporation launched the DCR Etch System 9060 Series, designed for precise isotropic (horizontal) etching at the atomic layer level. The system employs plasma etching technology to support the fabrication of advanced three-dimensional semiconductor devices, such as 3D-NAND and 3D-DRAM. It offers high-throughput processing and a compact footprint through a unique wafer-cooling mechanism combined with an infrared lamp that rapidly alternates wafer temperatures, allowing atomic-level control of wafer pattern shapes essential for complex 3D architectures. The system is suitable for both R&D and mass production, helping reduce development cycles, lower costs, and boost productivity in semiconductor manufacturing.

In November 2023, U.S.-based plasma processing equipment provider Plasma-Therm LLC acquired Thin Film Equipment SRL for an undisclosed sum. This acquisition enables Plasma-Therm to expand its European footprint as part of its long-term strategic growth plan and significantly broaden its power device offerings by integrating TFE’s suite of physical vapor deposition (PVD) tools designed for MEMS, power, RFID, and other semiconductor applications. Thin Film Equipment SRL, headquartered in Italy, specializes in semiconductor and MEMS equipment for dry-etch technologies.

Major companies operating in the dry etching equipment market are Panasonic Corporation, Applied Materials Inc., Lam Research Corporation, Tokyo Electron Limited, KLA Corporation, Hitachi High-Technologies Corporation, NAURA Technology Group Co. Ltd., DISCO Corporation, Advanced Energy Industries Inc., ULVAC Inc., Advanced Micro-Fabrication Equipment Inc., Oxford Instruments plc, Shibaura Mechatronics Corporation, GigaLane Co. Ltd., Plasma-Therm LLC, Samco Inc., SENTECH Instruments GmbH, Plasma Etch Inc., Nano-Master Inc., PVA TePla AG.

Asia-Pacific was the largest region in the dry etching equipment market in 2025. Asia-Pacific is expected to be the fastest-growing region in the forecast period. The regions covered in the dry etching equipment market report are Asia-Pacific, South East Asia, Western Europe, Eastern Europe, North America, South America, Middle East, Africa. The countries covered in the dry etching equipment market report are Australia, Brazil, China, France, Germany, India, Indonesia, Japan, Taiwan, Russia, South Korea, UK, USA, Canada, Italy, Spain.

The dry etching equipment market consists of revenues earned by entities by providing services such as installation and commissioning services, maintenance and repair services, process development and optimization services, training and technical support services, and upgrade and retrofit services. The market value includes the value of related goods sold by the service provider or included within the service offering. The dry etching equipment market also includes sales of metal etching systems, dielectric etching systems, and hybrid etching systems. Values in this market are ‘factory gate’ values; that is, the value of goods sold by the manufacturers or creators of the goods, whether to other entities (including downstream manufacturers, wholesalers, distributors, and retailers) or directly to end customers. The value of goods in this market includes related services sold by the creators of the goods.

The market value is defined as the revenues that enterprises gain from the sale of goods and/or services within the specified market and geography through sales, grants, or donations in terms of the currency (in USD unless otherwise specified).

The revenues for a specified geography are consumption values that are revenues generated by organizations in the specified geography within the market, irrespective of where they are produced. It does not include revenues from resales along the supply chain, either further along the supply chain or as part of other products.

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