Optical Critical Dimension (OCD) Measurement Equipment Market Report 2026

The optical critical dimension (ocd) measurement equipment market size has grown rapidly in recent years. It will grow from $1.24 billion in 2025 to $1.38 billion in 2026 at a compound annual growth rate (CAGR) of 11.3%. The growth in the historic period can be attributed to growth in semiconductor manufacturing, demand for yield optimization, miniaturization of chip features, adoption of advanced lithography, need for process control.

The optical critical dimension (ocd) measurement equipment market size is expected to see rapid growth in the next few years. It will grow to $2.11 billion in 2030 at a compound annual growth rate (CAGR) of 11.2%. The growth in the forecast period can be attributed to advanced node chip production, expansion of semiconductor fabs, demand for higher accuracy metrology, AI enabled process monitoring, growth in nanoscale manufacturing. Major trends in the forecast period include increasing demand for advanced semiconductor metrology, rising adoption of non destructive measurement techniques, integration of ocd in process control systems, growing use in advanced node manufacturing, expansion of inline inspection solutions.

The growth of semiconductor manufacturing is expected to drive the expansion of the optical critical dimension (OCD) measurement equipment market. Semiconductors, which have conductivity between that of a conductor and an insulator, are widely used in electronic devices to control electrical flow. The demand for semiconductors is rising due to the increasing need for advanced electronics such as smartphones, electric vehicles, and AI-enabled devices. OCD measurement equipment ensures accurate measurement and control of microscopic circuit dimensions, supporting high precision and yield in chip production. For example, in the first quarter of 2024, global semiconductor sales reached $137.7 billion, a 15.2% increase compared to the same period in 2023, according to the Semiconductor Industry Association (SIA).

Increasing consumer demand for electronics is contributing to the growth of the OCD measurement equipment market. Consumer electronics include devices such as smartphones, tablets, laptops, and home entertainment systems. Their growing adoption in daily life has driven manufacturers to focus on precise microchip patterning to improve device performance and reliability. Optical critical dimension measurement equipment plays a key role in this process. In February 2024, production of consumer electronic equipment in Japan reached $201.91 million (¥31,685 million), up from $149.27 million (¥23,425 million) in January 2023, according to the Electronics and Information Technology Industries Association.

Companies in the OCD measurement equipment sector are advancing optical metrology technologies to achieve precise manufacturing control. OCD metrology systems utilize optical techniques to measure and analyze the dimensions and structural details of semiconductor and microfabricated components. In July 2023, Onto Innovation Inc., a US-based process control solutions company, launched the Atlas S optical critical dimension metrology system. It integrates next-generation computing with machine learning models, combining Mueller matrix-based analysis with the company’s AI Diffract modeling engine. This innovation provides a flexible and powerful metrology solution to meet current and future industry requirements.

Major companies operating in the optical critical dimension (ocd) measurement equipment market are Applied Materials Inc., ASML Holding N.V., Tokyo Electron Limited, ZEISS Group, KLA Corporation, Hitachi High‑Tech Corporation, Nikon Corporation, SCREEN Holdings Co. Ltd., Bruker Corporation, Horiba Ltd., Hamamatsu Photonics K.K., Jenoptik AG, Camtek Ltd., J.A. Woollam Company, Raintree Scientific Instruments Shanghai Corporation, Suzhou TZTEK Technology Co. Ltd., Shanghai Precision Measurement, Shenzhen Angstrom Excellence, Nova Ltd., Nanometrics Inc., Rudolph Technologies, Onto Innovation Inc., Filmetrics Inc.

North America was the largest region in the optical critical dimension (OCD) measurement equipment market in 2025. Asia-Pacific is expected to be the fastest-growing region in the forecast period. The regions covered in the optical critical dimension (ocd) measurement equipment market report are Asia-Pacific, South East Asia, Western Europe, Eastern Europe, North America, South America, Middle East, Africa. The countries covered in the optical critical dimension (ocd) measurement equipment market report are Australia, Brazil, China, France, Germany, India, Indonesia, Japan, Taiwan, Russia, South Korea, UK, USA, Canada, Italy, Spain.

The optical critical dimension (OCD) measurement equipment market consists of sales of film thickness measurement systems, process control metrology equipment, angle-resolved scatterometers, and spectral imaging systems. Values in this market are ‘factory gate’ values, that is, the value of goods sold by the manufacturers or creators of the goods, whether to other entities (including downstream manufacturers, wholesalers, distributors, and retailers) or directly to end customers. The value of goods in this market includes related services sold by the creators of the goods.

The market value is defined as the revenues that enterprises gain from the sale of goods and/or services within the specified market and geography through sales, grants, or donations in terms of the currency (in USD unless otherwise specified).

The revenues for a specified geography are consumption values that are revenues generated by organizations in the specified geography within the market, irrespective of where they are produced. It does not include revenues from resales along the supply chain, either further along the supply chain or as part of other products.

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