Optical Critical Dimension (OCD) Measurement Equipment Market Report 2025

The optical critical dimension (OCD) measurement equipment market size has grown rapidly in recent years. It will grow from $1.11 billion in 2024 to $1.24 billion in 2025 at a compound annual growth rate (CAGR) of 11.6%. The expansion observed during the historical period was driven by growing semiconductor production, higher demand for miniaturized electronic components, increased emphasis on process control in manufacturing, wider adoption of advanced metrology tools, and rising investments in semiconductor foundries.

The optical critical dimension (OCD) measurement equipment market size is expected to see rapid growth in the next few years. It will grow to $1.9 billion in 2029 at a compound annual growth rate (CAGR) of 11.3%. The projected growth during the forecast period is expected to be driven by rising demand for advanced-node semiconductors, greater adoption of 3D NAND and FinFET technologies, increasing complexity in chip design, expanded R&D efforts for process optimization, and the growing integration of AI and machine learning in metrology. Key trends anticipated include improvements in OCD algorithms for enhanced accuracy, adoption of advanced hybrid metrology systems, development of AI-powered measurement solutions, innovations in nondestructive testing methods, and advancements in real-time process monitoring tools.

The growth of semiconductor manufacturing is expected to drive the expansion of the optical critical dimension (OCD) measurement equipment market. Semiconductors, which have conductivity between that of a conductor and an insulator, are widely used in electronic devices to control electrical flow. The demand for semiconductors is rising due to the increasing need for advanced electronics such as smartphones, electric vehicles, and AI-enabled devices. OCD measurement equipment ensures accurate measurement and control of microscopic circuit dimensions, supporting high precision and yield in chip production. For example, in the first quarter of 2024, global semiconductor sales reached $137.7 billion, a 15.2% increase compared to the same period in 2023, according to the Semiconductor Industry Association (SIA).

Increasing consumer demand for electronics is contributing to the growth of the OCD measurement equipment market. Consumer electronics include devices such as smartphones, tablets, laptops, and home entertainment systems. Their growing adoption in daily life has driven manufacturers to focus on precise microchip patterning to improve device performance and reliability. Optical critical dimension measurement equipment plays a key role in this process. In February 2024, production of consumer electronic equipment in Japan reached $201.91 million (¥31,685 million), up from $149.27 million (¥23,425 million) in January 2023, according to the Electronics and Information Technology Industries Association.

Companies in the OCD measurement equipment sector are advancing optical metrology technologies to achieve precise manufacturing control. OCD metrology systems utilize optical techniques to measure and analyze the dimensions and structural details of semiconductor and microfabricated components. In July 2023, Onto Innovation Inc., a US-based process control solutions company, launched the Atlas S optical critical dimension metrology system. It integrates next-generation computing with machine learning models, combining Mueller matrix-based analysis with the company’s AI Diffract modeling engine. This innovation provides a flexible and powerful metrology solution to meet current and future industry requirements.

Major players in the optical critical dimension (OCD) measurement equipment market are Applied Materials Inc., ASML Holding N.V., Tokyo Electron Limited, ZEISS Group, KLA Corporation, Hitachi High Tech Corporation, Nikon Corporation, SCREEN Holdings Co. Ltd., SCHOTT AG, Bruker Corporation, Horiba Ltd., Hamamatsu Photonics K.K., Jenoptik AG, Nova Ltd., Camtek Ltd., J.A. Woollam Company, Raintree Scientific Instruments (Shanghai) Corporation, Suzhou TZTEK Technology Co. Ltd., Shanghai Precision Measurement, and Shenzhen Angstrom Excellence.

North America was the largest region in the optical critical dimension (OCD) measurement equipment market in 2024. Asia-Pacific is expected to be the fastest-growing region in the forecast period. The regions covered in optical critical dimension (OCD) measurement equipment report are Asia-Pacific, Western Europe, Eastern Europe, North America, South America, Middle East and Africa. The countries covered in the optical critical dimension (OCD) measurement equipment market report are Australia, Brazil, China, France, Germany, India, Indonesia, Japan, Russia, South Korea, UK, USA, Canada, Italy, Spain.

Note that the outlook for this market is being affected by rapid changes in trade relations and tariffs globally. The report will be updated prior to delivery to reflect the latest status, including revised forecasts and quantified impact analysis. The report’s Recommendations and Conclusions sections will be updated to give strategies for entities dealing with the fast-moving international environment.

The swift increase in U.S. tariffs and the ensuing trade tensions in spring 2025 are significantly affecting the machinery sector by increasing costs for steel, hydraulic systems, and precision bearings critical components often imported from tariff-affected regions. Manufacturers of construction, agricultural, and industrial machinery now face squeezed margins, as many long-term contracts prevent immediate price adjustments. The uncertainty has also delayed investment in automation and smart machinery technologies, slowing productivity gains. To adapt, firms are accelerating local supplier development, redesigning products to use alternative materials, and leveraging predictive maintenance to extend equipment lifespans amid higher replacement costs.

Optical critical dimension (OCD) measurement equipment consists of sophisticated metrology tools that employ light-based, non-destructive methods such as scatterometry to accurately measure the critical dimensions of nanoscale semiconductor features. These tools help ensure manufacturing precision, identify deviations in lithography and etching processes, and support yield and reliability in semiconductor production.

The primary categories of OCD measurement equipment are standalone and integrated systems. Standalone OCD measurement devices are independent metrology systems designed to measure nanoscale features on semiconductor wafers without being part of other fabrication equipment or production lines. They utilize technologies such as reflectometry, ellipsometry, interferometry, and scanning probe microscopy (SPM), offering capabilities such as single-dimensional, multi-dimensional, and depth-profile measurements. These systems are applied in semiconductor fabrication, IC design, photomask inspection, and nanoscale metrology, serving end users such as foundries, integrated device manufacturers, and research institutions.

The optical critical dimension (OCD) measurement equipment market research report is one of a series of new reports that provides optical critical dimension (OCD) measurement equipment market statistics, including the optical critical dimension (OCD) measurement equipment industry global market size, regional shares, competitors with the optical critical dimension (OCD) measurement equipment market share, detailed optical critical dimension (OCD) measurement equipment market segments, market trends, and opportunities, and any further data you may need to thrive in the optical critical dimension (OCD) measurement equipment industry. This optical critical dimension (OCD) measurement equipment market research report delivers a complete perspective of everything you need, with an in-depth analysis of the current and future scenarios of the industry.

The optical critical dimension (OCD) measurement equipment market consists of sales of film thickness measurement systems, process control metrology equipment, angle-resolved scatterometers, and spectral imaging systems. Values in this market are ‘factory gate’ values, that is, the value of goods sold by the manufacturers or creators of the goods, whether to other entities (including downstream manufacturers, wholesalers, distributors, and retailers) or directly to end customers. The value of goods in this market includes related services sold by the creators of the goods.

The market value is defined as the revenues that enterprises gain from the sale of goods and/or services within the specified market and geography through sales, grants, or donations in terms of the currency (in USD unless otherwise specified).

The revenues for a specified geography are consumption values that are revenues generated by organizations in the specified geography within the market, irrespective of where they are produced. It does not include revenues from resales along the supply chain, either further along the supply chain or as part of other products.

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