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Extreme Ultraviolet Lithography Market - Global Forecast 2025-2032

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    Report

  • 188 Pages
  • November 2025
  • Region: Global
  • 360iResearch™
  • ID: 5715692
UP TO OFF until Jan 01st 2026
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The Extreme Ultraviolet Lithography (EUV) Market is transforming semiconductor manufacturing as organizations seek strategies to adapt to technological advances and shifting competitive dynamics. Senior executives require precise insights to align technology adoption with future growth and operational resilience.

Market Snapshot: Extreme Ultraviolet Lithography Market Growth

The Extreme Ultraviolet Lithography Market is advancing rapidly, propelled by major investments from top semiconductor manufacturers aiming to elevate chip performance and product competitiveness. The market reached USD 9.87 billion in 2024 and is forecast to expand to USD 10.83 billion in 2025, with longer-term projections pointing toward a value of USD 21.04 billion by 2032, resulting in a compound annual growth rate of 9.92%. Growth is fueled by the transition to next-generation chip designs, heightened efficiency requirements, and the expansion of electronics use cases. Integrating EUV lithography across production facilities boosts manufacturing flexibility and bolsters the ability to pivot in a fast-evolving industry.

Scope & Segmentation: Comprehensive EUV Market Analysis

This executive summary presents focused analysis to guide investment and strategic integration across every critical segment and operational context within the EUV lithography value chain:

  • Equipment Type: Evaluates the roles of both advanced High-Na and established Low-Na EUV scanners, each designed for specific wafer node requirements and adaptable production scheduling across multiple technology generations.
  • Application: Assesses EUV implementation in logic device production, such as microprocessors and SoC platforms, and explores memory technology enhancements for improved throughput and robust device functionality.
  • Wafer Size: Explores the impact of differing wafer formats (200mm, 300mm, 450mm) on the direction of R&D, scaling potential, and rapid prototype innovation in semiconductor process development.
  • End User: Analyzes adoption strategies among leading foundries and device manufacturers including TSMC, Intel, Samsung, Micron, and Globalfoundries, highlighting best practices for next-generation lithography adoption.
  • Resist Material: Reviews the performance of Chemically Amplified Resists (both negative and positive tone) and Metal-Oxide Resists with a focus on pattern accuracy, process reliability, and design scalability in advanced chip manufacturing.
  • Region: Covers the Americas, EMEA, and Asia-Pacific, examining market opportunities, entry barriers, evolving regulatory frameworks, and localized drivers that influence EUV lithography deployment and regional market development.
  • Key Companies: Assesses the strategies of major industry participants such as ASML Holding N.V., Carl Zeiss SMT GmbH, Cymer LLC, Gigaphoton Inc., Trumpf GmbH + Co. KG, Ushio Inc., Hamamatsu Photonics K.K., Tokyo Ohka Kogyo Co., Ltd., Dai Nippon Printing Co., Ltd., and Toppan Printing Co., Ltd., with emphasis on collaborations that advance the sector’s expansion and technological adoption.

Key Takeaways: Strategic Insights for Senior Decision-Makers

  • Collaboration between technology solution providers and materials suppliers is deepening, extending the capabilities and reach of EUV lithography technologies worldwide.
  • Deployment of the latest High-Na scanner technologies allows for agile chip design changes and accelerates the pace of product innovation, ensuring alignment with both current and future semiconductor needs.
  • Process improvements in EUV infrastructure optimize chip patterning efficiency, streamlining operations and reducing potential bottlenecks during product launches.
  • Flexible wafer sizing strategies enable rapid transition between high-volume manufacturing and early-stage prototyping, supporting rapid access to novel business opportunities and innovative markets.
  • Adapting to evolving technical trends and regulatory shifts helps organizations stay ahead in compliance and optimize operational frameworks for market entry and expansion.
  • Advancements in photoresist material characteristics drive consistent pattern formation, enhancing the supply chain reliability and reinforcing end-to-end product quality throughout the fabrication process.

Tariff Impact: Supply Chain and Sourcing Strategies in 2025

Changing U.S. tariffs on semiconductor equipment are prompting companies to diversify their sourcing and establish more resilient supply networks. Key strategies include nearshoring and nurturing global alliances, ensuring compliance while preparing for anticipated shifts in market dynamics and regulatory environments in 2025.

Methodology & Data Sources

All findings in this EUV lithography market report are derived through industry expert interviews, patent landscape analysis, and review of the latest technical publications. This approach employs triangulation and independent peer validation to ensure data quality and actionable outcomes for forward-looking decision-making.

Why This Report Matters

  • Empowers C-suite executives to align EUV lithography investments with the broader strategic trends of the semiconductor industry.
  • Enables enhanced business continuity by offering insight into advanced supply chain solutions and in-depth regulatory updates.
  • Supports confident resource allocation and supplier engagement, thanks to data-driven insights validated through a rigorous research methodology.

Conclusion

Leveraging Extreme Ultraviolet Lithography equips organizations to quickly respond to new challenges in semiconductor manufacturing, sustaining a competitive edge amid ongoing industry transformation and global innovation.

 

Additional Product Information:

  • Purchase of this report includes 1 year online access with quarterly updates.
  • This report can be updated on request. Please contact our Customer Experience team using the Ask a Question widget on our website.

Table of Contents

1. Preface
1.1. Objectives of the Study
1.2. Market Segmentation & Coverage
1.3. Years Considered for the Study
1.4. Currency & Pricing
1.5. Language
1.6. Stakeholders
2. Research Methodology
3. Executive Summary
4. Market Overview
5. Market Insights
5.1. Next-generation high-NA EUV scanner integration challenges and expected capacity expansions by 2025
5.2. Advanced multilayer mirror coating uniformity improvements driving higher EUV throughput and yield consistency
5.3. Deployment of real-time in-situ metrology and feedback control systems for EUV lithography process optimization
5.4. Collaborative supply chain risk mitigation strategies for critical EUV source components amid global constraints
5.5. Integration of pellicle technology innovations to reduce defectivity and extend mask lifetime in EUV production
6. Cumulative Impact of United States Tariffs 2025
7. Cumulative Impact of Artificial Intelligence 2025
8. Extreme Ultraviolet Lithography Market, by Equipment Type
8.1. High-Na EUV Scanner
8.2. Low-Na EUV Scanner
9. Extreme Ultraviolet Lithography Market, by Application
9.1. Logic Devices
9.1.1. Microprocessors
9.1.2. Soc
9.2. Memory Devices
9.2.1. Dram
9.2.2. Nand
10. Extreme Ultraviolet Lithography Market, by Wafer Size
10.1. 200Mm
10.2. 300Mm
10.3. 450Mm
10.3.1. Prototype
11. Extreme Ultraviolet Lithography Market, by End User
11.1. Foundry
11.1.1. Globalfoundries
11.1.2. Samsung
11.1.3. Tsmc
11.2. Idm
11.2.1. Intel
11.2.2. Micron
12. Extreme Ultraviolet Lithography Market, by Resist Material
12.1. Chemically Amplified Resist
12.1.1. Negative Car
12.1.2. Positive Car
12.2. Metal-Oxide Resist
12.2.1. Hafnium-Based
12.2.2. Zirconium-Based
13. Extreme Ultraviolet Lithography Market, by Region
13.1. Americas
13.1.1. North America
13.1.2. Latin America
13.2. Europe, Middle East & Africa
13.2.1. Europe
13.2.2. Middle East
13.2.3. Africa
13.3. Asia-Pacific
14. Extreme Ultraviolet Lithography Market, by Group
14.1. ASEAN
14.2. GCC
14.3. European Union
14.4. BRICS
14.5. G7
14.6. NATO
15. Extreme Ultraviolet Lithography Market, by Country
15.1. United States
15.2. Canada
15.3. Mexico
15.4. Brazil
15.5. United Kingdom
15.6. Germany
15.7. France
15.8. Russia
15.9. Italy
15.10. Spain
15.11. China
15.12. India
15.13. Japan
15.14. Australia
15.15. South Korea
16. Competitive Landscape
16.1. Market Share Analysis, 2024
16.2. FPNV Positioning Matrix, 2024
16.3. Competitive Analysis
16.3.1. ASML Holding N.V.
16.3.2. Carl Zeiss SMT GmbH
16.3.3. Cymer, LLC
16.3.4. Gigaphoton Inc.
16.3.5. Trumpf GmbH + Co. KG
16.3.6. Ushio Inc.
16.3.7. Hamamatsu Photonics K.K.
16.3.8. Tokyo Ohka Kogyo Co., Ltd.
16.3.9. Dai Nippon Printing Co., Ltd.
16.3.10. Toppan Printing Co., Ltd.

Companies Mentioned

The companies profiled in this Extreme Ultraviolet Lithography market report include:
  • ASML Holding N.V.
  • Carl Zeiss SMT GmbH
  • Cymer, LLC
  • Gigaphoton Inc.
  • Trumpf GmbH + Co. KG
  • Ushio Inc.
  • Hamamatsu Photonics K.K.
  • Tokyo Ohka Kogyo Co., Ltd.
  • Dai Nippon Printing Co., Ltd.
  • Toppan Printing Co., Ltd.

Table Information