Extreme Ultraviolet Lithography Market Global Report 2026

The extreme ultraviolet lithography market size has grown rapidly in recent years. It will grow from $14.72 billion in 2025 to $16.77 billion in 2026 at a compound annual growth rate (CAGR) of 13.9%. The growth during the historic period can be attributed to increasing production of extreme ultraviolet lithography tools, rising demand for high-resolution semiconductor manufacturing, expansion of laser-produced and gas discharge light sources, growing adoption across IDM and foundry operations, and integration of advanced mask and mirror handling systems.

The extreme ultraviolet lithography market size is expected to see rapid growth in the next few years. It will grow to $27.79 billion in 2030 at a compound annual growth rate (CAGR) of 13.5%. The growth during the forecast period can be attributed to increasing use of AI- and IoT-enabled EUV systems, rising adoption of digital process monitoring, growth in automated wafer handling solutions, expansion of high-resolution patterning capabilities, and increasing deployment across semiconductor fabs. Major trends in the forecast period include integration of AI-powered EUV lithography systems, deployment of IoT-enabled semiconductor equipment, adoption of digitalized lithography process monitoring, expansion of high-resolution patterning solutions, and implementation of smart wafer handling and alignment systems.

Increasing demand for smartphones is expected to drive the demand for the extreme ultraviolet lithography market. Extreme ultraviolet lithography (EUVL) is an advanced technology used to manufacture more powerful microprocessors than conventional ones for smartphones and personal computers. EUV lithography enables the production of compact electronic chips with lower complexity, reduced costs, and fewer power requirements. For instance, in October 2025, according to Demand Sage Inc., a US-based data reporting and analytics company, the percentage of smartphone users in the United States increased to 76.5%, representing a 3.8% rise from the previous year. Therefore, the growing demand for smartphones is expected to drive the growth of the extreme ultraviolet lithography market.

The growing demand from the semiconductor industry is expected to propel the growth of the extreme ultraviolet lithography market going forward. The semiconductor industry refers to the economic sector primarily engaged in the design, development, manufacturing, and distribution of semiconductor devices, also known as integrated circuits or microchips. Extreme ultraviolet lithography is used in the semiconductor industry to facilitate the production of smaller, more powerful, and energy-efficient chips while enhancing semiconductor performance. For instance, in February 2025, according to the Semiconductor Industry Association, a US-based industry association, global semiconductor sales reached $627.6 billion in 2024, an increase of 19.1% compared with 2023. Therefore, the growing demand from the semiconductor industry is driving the growth of the extreme ultraviolet lithography market.

Major companies operating in the extreme ultraviolet lithography market are focusing on expanding technology production, including high-volume manufacturing using Intel 4 technology in Leixlip, Ireland, to meet the growing demand for smaller and more powerful chips. Intel's high-volume manufacturing using Intel 4 technology represents a significant milestone for the company. The Intel 4 process is a 7 nm process that utilizes extreme ultraviolet (EUV) lithography. For instance, in September 2023, Intel Corporation, a US-based semiconductor corporation, announced the commencement of high-volume manufacturing using Intel 4 technology in Leixlip, Ireland. This enables Intel to deliver a wide range of future products, including the upcoming Intel Core Ultra processors (code-named Meteor Lake) and future-generation Intel Xeon processors. Meteor Lake is expected to be Intel's first consumer processor to feature a hybrid architecture, integrating high-performance cores with low-power cores. This will enable Intel to provide enhanced performance and efficiency across a broad range of workloads.

Major companies operating in the extreme ultraviolet lithography market are ASML Holding, Intel Corporation, Samsung Electronics, Taiwan Semiconductor Manufacturing Company (TSMC), Micron Technology Inc., SK Hynix Inc., Infineon Technologies AG, Renesas Electronics Corporation, Semiconductor Manufacturing International Corporation, Nikon Corporation, Canon Inc., Applied Materials Inc., Lam Research Corporation, KLA Corporation, Tokyo Electron Limited, Aixtron SE, Rudolph Technologies, Onto Innovation Inc., Ultratech Inc., Veeco Instruments Inc.

Asia-Pacific was the largest region in the extreme ultraviolet lithography market in 2025. North America was the second largest region in the electrical and electronics market during the forecast period. The regions covered in the extreme ultraviolet lithography market report are Asia-Pacific, South East Asia, Western Europe, Eastern Europe, North America, South America, Middle East, Africa.

The countries covered in the extreme ultraviolet lithography market report are Australia, Brazil, China, France, Germany, India, Indonesia, Japan, Taiwan, Russia, South Korea, UK, USA, Canada, Italy, Spain.

The extreme ultraviolet lithography market includes revenues earned by entities by providing electron optical lithography services, optical lithography, X-Ray lithography services. The market value includes the value of related goods sold by the service provider or included within the service offering. Only goods and services traded between entities or sold to end consumers are included.

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