Semiconductor Lithography Equipment Market Report 2026

The semiconductor lithography equipment market size has grown strongly in recent years. It will grow from $22.25 billion in 2025 to $23.9 billion in 2026 at a compound annual growth rate (CAGR) of 7.4%. The growth in the historic period can be attributed to shrinking transistor geometries, growth in consumer electronics manufacturing, expansion of memory chip production, advances in photoresist materials, increased semiconductor fab investments.

The semiconductor lithography equipment market size is expected to see strong growth in the next few years. It will grow to $31.77 billion in 2030 at a compound annual growth rate (CAGR) of 7.4%. The growth in the forecast period can be attributed to adoption of sub-3nm process nodes, expansion of foundry capacity worldwide, rising demand for power and RF devices, technological breakthroughs in EUV optics, increasing capital expenditure on next-generation fabs. Major trends in the forecast period include transition toward extreme ultraviolet lithography for advanced nodes, increasing demand for high-precision overlay and alignment systems, rising adoption of multi-patterning techniques in duv lithography, growing investment in maskless and e-beam lithography for prototyping, demand for higher throughput and yield optimization in lithography tools.

The increasing demand for consumer electronics is expected to drive the growth of the semiconductor lithography equipment market in the coming years. Consumer electronics refer to personal-use electronic devices such as smartphones, televisions, laptops, and audio systems. This growing demand is fueled by expanding digital connectivity, as wider internet access and the proliferation of smart technologies lead consumers to adopt more connected devices for communication, entertainment, and productivity. As a result, manufacturers require advanced lithography equipment to meet the high-volume production of smaller, faster, and more efficient semiconductor chips. For example, in October 2023, the Samena Telecommunications Council, a UAE-based telecommunications service provider, reported that mobile phone production reached 1.09 billion units over the last three quarters, reflecting a 0.85% year-on-year increase. Notably, mobile phone output in September rose by 11.8% compared to the same month in the previous year. Therefore, the rising demand for consumer electronics is contributing to the growth of the semiconductor lithography equipment market.

Leading companies in the semiconductor lithography equipment market are concentrating on the development of advanced technologies, such as i-line steppers, to improve resolution. An i-line stepper is a photolithography device that uses 365-nanometer wavelength light from a mercury lamp to project circuit patterns onto silicon wafers. For example, in September 2024, Canon Inc., a Japan-based imaging equipment manufacturer, introduced the FPA-3030i6 semiconductor lithography system. This i-line stepper is capable of processing wafers up to 8 inches (200 mm) in diameter and incorporates a newly developed projection lens noted for its high transmittance and durability. The improved lens design reduces lens aberrations by over 50% compared to previous models, enhancing pattern accuracy, especially under high exposure dose conditions. Its superior transmittance also enables shorter exposure durations, boosting productivity while maintaining precision.

In September 2025, SCREEN Semiconductor Solutions Co. Ltd., a Japan-based semiconductor equipment manufacturer specializing in lithography equipment, entered into an agreement with IBM to jointly develop next-generation cleaning processes for extreme ultraviolet (EUV) lithography. The objective of this partnership is to improve cleaning performance and minimize defects in advanced semiconductor manufacturing nodes. By integrating SCREEN’s proficiency in wafer cleaning systems with IBM’s semiconductor research expertise, the collaboration aims to support more efficient and reliable EUV lithography processes for future chip production. International Business Machines is a US-based technology company engaged in the development of hardware, software, and IT services.

Major companies operating in the semiconductor lithography equipment market are ASML Holding N.V., Nikon Corporation, Canon Inc., Carl Zeiss AG, JEOL Ltd., NuFlare Technology Inc., Vistec Electron Beam GmbH, Raith GmbH, Mycronic AB, SÜSS MicroTec SE, EV Group (EVG), Nanonex Corporation, Neutronix Quintel (NxQ), Obducat AB, NIL Technology ApS, Elionix Inc., Veeco Instruments Inc., Ushio Inc., Nanoscribe GmbH.

Note that the outlook for this market is being affected by rapid changes in trade relations and tariffs globally. The report will be updated prior to delivery to reflect the latest status, including revised forecasts and quantified impact analysis. The report’s Recommendations and Conclusions sections will be updated to give strategies for entities dealing with the fast-moving international environment.

Tariffs have increased costs and disrupted global supply chains for semiconductor lithography equipment by affecting the sourcing of precision components and advanced optical systems. These impacts are most pronounced in euv and advanced photolithography segments and in asia-pacific and north american regions with high fab concentration. Manufacturers are mitigating risks through supplier diversification, regional manufacturing, and localization strategies. In the long term, tariffs are also driving domestic investments and strengthening regional semiconductor ecosystems.

The semiconductor lithography equipment market research report is one of a series of new reports that provides semiconductor lithography equipment market statistics, including semiconductor lithography equipment industry global market size, regional shares, competitors with a semiconductor lithography equipment market share, detailed semiconductor lithography equipment market segments, market trends and opportunities, and any further data you may need to thrive in the semiconductor lithography equipment industry. This semiconductor lithography equipment market research report delivers a complete perspective of everything you need, with an in-depth analysis of the current and future scenario of the industry.

Semiconductor lithography equipment consists of specialized machines used in the microfabrication process to transfer complex circuit patterns onto semiconductor wafers - an essential step in manufacturing integrated circuits (ICs) and microchips. These machines employ various lithographic techniques to project, write, or imprint intricate designs onto a photosensitive resist layer applied to the wafer’s surface.

The primary types of semiconductor lithography equipment include photolithography equipment, e-beam lithography equipment, and nanoimprint lithography equipment. Photolithography equipment utilizes light to transfer geometric patterns from a photomask onto a light-sensitive photoresist on the surface of a semiconductor wafer. It incorporates technologies such as deep ultraviolet lithography (DUV), extreme ultraviolet lithography (EUV), and i-line lithography and is used in applications including integrated circuits (ICs), memory devices, power devices, and radio frequency devices.North America was the largest region in the semiconductor lithography equipment market in2025. Asia-Pacific is expected to be the fastest-growing region in the forecast period. The regions covered in the semiconductor lithography equipment market report are Asia-Pacific, South East Asia, Western Europe, Eastern Europe, North America, South America, Middle East, Africa. The countries covered in the semiconductor lithography equipment market report are Australia, Brazil, China, France, Germany, India, Indonesia, Japan, Taiwan, Russia, South Korea, UK, USA, Canada, Italy, Spain.

The semiconductor lithography equipment market consists of sales of mask aligners, photoresist coating equipment, and developing systems. Values in this market are ‘factory gate’ values, that is the value of goods sold by the manufacturers or creators of the goods, whether to other entities (including downstream manufacturers, wholesalers, distributors and retailers) or directly to end customers. The value of goods in this market includes related services sold by the creators of the goods.

The market value is defined as the revenues that enterprises gain from the sale of goods and/or services within the specified market and geography through sales, grants, or donations in terms of the currency (in USD unless otherwise specified).

The revenues for a specified geography are consumption values that are revenues generated by organizations in the specified geography within the market, irrespective of where they are produced. It does not include revenues from resales along the supply chain, either further along the supply chain or as part of other products.

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