Extreme Ultraviolet Lithography Market Report 2026

The extreme ultraviolet lithography market size has grown exponentially in recent years. It will grow from $6.02 billion in 2025 to $7.44 billion in 2026 at a compound annual growth rate (CAGR) of 23.7%. The growth in the historic period can be attributed to rise in manufacturing of extreme ultraviolet lithography tools, increase in high-resolution semiconductor production, expansion in laser-produced and gas discharge light sources, adoption in IDM and foundry operations, integration in mask and mirror handling systems.

The extreme ultraviolet lithography market size is expected to see exponential growth in the next few years. It will grow to $17.46 billion in 2030 at a compound annual growth rate (CAGR) of 23.8%. The growth in the forecast period can be attributed to increase in AI and IoT-enabled EUV systems, rising adoption of digital process monitoring, growth in automated wafer handling solutions, expansion in high-resolution patterning capabilities, increasing deployment in semiconductor fabs. Major trends in the forecast period include integration of AI-powered euv lithography systems, deployment of IoT-enabled semiconductor equipment, adoption of digitalized lithography process monitoring, expansion of high-resolution patterning solutions, implementation of smart wafer handling and alignment systems.

The rising demand for smartphones is expected to fuel growth in the extreme ultraviolet (EUV) lithography market. EUV lithography is an advanced technology used to manufacture more powerful microprocessors for smartphones and personal computers compared to traditional methods. This technology enables the production of compact electronic chips with lower complexity, reduced costs, and decreased power consumption. For example, in October 2025, Demand Sage Inc., a U.S.-based data reporting and analytics company, reported that the share of smartphone users in the United States had risen to 76.5%, a 3.8% increase from the previous year. As a result, the growing adoption of smartphones is driving the expansion of the EUV lithography market.

The increasing demand within the semiconductor industry is expected to drive the growth of the extreme ultraviolet (EUV) lithography market in the coming years. The semiconductor industry encompasses the design, development, manufacturing, and distribution of semiconductor devices, also known as integrated circuits or microchips. EUV lithography plays a crucial role in this sector by enabling the production of smaller, more powerful, and energy-efficient chips, thereby enhancing overall semiconductor performance. For example, in February 2025, the Semiconductor Industry Association, a U.S.-based industry body in Washington, reported that global semiconductor sales reached $627.6 billion in 2024, marking a 19.1% increase compared to 2023. Consequently, the rising demand in the semiconductor sector is driving the expansion of the EUV lithography market.

Leading companies in the extreme ultraviolet (EUV) lithography market are concentrating on expanding technology production, such as high-volume manufacturing with Intel 4 technology in Leixlip, Ireland, to address the increasing demand for smaller and more powerful chips. Intel’s high-volume manufacturing using the Intel 4 process, a 7nm technology leveraging EUV lithography, marks a significant achievement for the company. For example, in September 2023, Intel Corporation, a U.S.-based semiconductor firm, announced the commencement of high-volume production using Intel 4 technology in Leixlip. This advancement supports Intel in delivering a broad range of future products, including the upcoming Intel Core Ultra processors (code-named Meteor Lake) and next-generation Intel Xeon processors. Meteor Lake is expected to be Intel’s first consumer processor featuring a hybrid architecture that combines high-performance cores with low-power cores, enabling enhanced performance and efficiency across diverse workloads.

Major companies operating in the extreme ultraviolet lithography market are ASML Holding, Intel Corporation, Samsung Electronics, Taiwan Semiconductor Manufacturing Company (TSMC), Micron Technology Inc., SK Hynix Inc., Infineon Technologies AG, Renesas Electronics Corporation, Semiconductor Manufacturing International Corporation, Nikon Corporation, Canon Inc., Applied Materials Inc., Lam Research Corporation, KLA Corporation, Tokyo Electron Limited, Aixtron SE, Rudolph Technologies, Onto Innovation Inc., Ultratech Inc., Veeco Instruments Inc.

Note that the outlook for this market is being affected by rapid changes in trade relations and tariffs globally. The report will be updated prior to delivery to reflect the latest status, including revised forecasts and quantified impact analysis. The report’s Recommendations and Conclusions sections will be updated to give strategies for entities dealing with the fast-moving international environment.

Tariffs have posed challenges to the extreme ultraviolet lithography market by increasing the costs of imported EUV systems, masks, mirrors, and light sources. Key affected end-users include integrated device manufacturers (IDMs) and semiconductor foundries across North America, Europe, and Asia-Pacific. While tariffs have elevated acquisition costs and caused supply chain disruptions, they have also incentivized manufacturers to invest in local production, diversify sourcing strategies, and innovate in high-resolution lithography technologies, ultimately strengthening domestic semiconductor manufacturing capabilities.

The extreme ultraviolet lithography market research report is one of a series of new reports that provides extreme ultraviolet lithography market statistics, including extreme ultraviolet lithography industry global market size, regional shares, competitors with an extreme ultraviolet lithography market share, detailed extreme ultraviolet lithography market segments, market trends and opportunities, and any further data you may need to thrive in the extreme ultraviolet lithography industry. This extreme ultraviolet lithography market research report delivers a complete perspective of everything you need, with an in-depth analysis of the current and future scenarios of the industry.

Companies in the extreme ultraviolet lithography sector are involved in the production of extreme ultraviolet lithography systems, which leverage the smallest wavelength to fabricate circuits with small features, achieving higher resolution in the output.

The extreme ultraviolet lithography market, as discussed in this report, is segmented based on equipment, including light sources, mirrors, masks, and others. Furthermore, the market is categorized by light sources into laser-produced plasma, gas discharge, vacuum sparks. The end-user segmentation comprises integrated device manufacturers (IDM), foundry, and others.Asia-Pacific was the largest region in the extreme ultraviolet lithography market in 2025. North America was the second largest region in the electrical and electronics market during the forecast period. The regions covered in the extreme ultraviolet lithography market report are Asia-Pacific, South East Asia, Western Europe, Eastern Europe, North America, South America, Middle East, Africa. The countries covered in the extreme ultraviolet lithography market report are Australia, Brazil, China, France, Germany, India, Indonesia, Japan, Taiwan, Russia, South Korea, UK, USA, Canada, Italy, Spain.

The extreme ultraviolet lithography market includes revenues earned by entities by providing electron optical lithography services, optical lithography, X-Ray lithography services. The market value includes the value of related goods sold by the service provider or included within the service offering. Only goods and services traded between entities or sold to end consumers are included.

The market value is defined as the revenues that enterprises gain from the sale of goods and/or services within the specified market and geography through sales, grants, or donations in terms of the currency (in USD unless otherwise specified).

The revenues for a specified geography are consumption values that are revenues generated by organizations in the specified geography within the market, irrespective of where they are produced. It does not include revenues from resales along the supply chain, either further along the supply chain or as part of other products.

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