Chemical Mechanical Planarization (CMP) Slurry and Pads Market Report 2026

The chemical mechanical planarization (cmp) slurry and pads market size has grown strongly in recent years. It will grow from $2.92 billion in 2025 to $3.14 billion in 2026 at a compound annual growth rate (CAGR) of 7.5%. The growth in the historic period can be attributed to semiconductor miniaturization, wafer fabrication growth, planarization process adoption, memory chip demand, electronics industry expansion.

The chemical mechanical planarization (cmp) slurry and pads market size is expected to see strong growth in the next few years. It will grow to $4.17 billion in 2030 at a compound annual growth rate (CAGR) of 7.3%. The growth in the forecast period can be attributed to AI chip production growth, advanced node fabrication, EV semiconductor demand, foundry capacity expansion, material innovation in slurries. Major trends in the forecast period include rising demand for advanced semiconductor nodes, growing adoption of high precision CMP slurries, expansion of memory and logic chip manufacturing, increased focus on defect free planarization, development of application specific CMP pads.

The growing demand for semiconductors is expected to drive the expansion of the chemical mechanical planarization (CMP) slurry and pads market. Semiconductors, which have conductivity between conductors and insulators, are used to control electrical current in devices such as transistors, diodes, and integrated circuits. Demand is rising rapidly as electric vehicles increasingly rely on advanced chips to manage battery performance, enable autonomous driving features, and support complex in-car electronics. CMP slurry and pads facilitate semiconductor production by creating uniform and smooth wafer surfaces, improving manufacturing precision and device performance. For example, according to the Semiconductor Industry Association, global semiconductor sales reached $49.1 billion in May 2024, a 19.3% increase from $41.2 billion in May 2023 and a 4.1% rise from $47.2 billion in April 2024. This rising semiconductor demand is driving growth in the CMP slurry and pads market.

Companies in the CMP slurry and pads market are investing in reusable pad technologies to improve efficiency, reduce costs, and minimize environmental impact. These innovations restore worn polishing pads for repeated use, lowering waste while maintaining performance in semiconductor manufacturing. In January 2024, SK Hynix, a South Korean semiconductor company, developed a reusable CMP pad technology that refurbishes worn pads, reducing waste and manufacturing costs. This innovation also bypasses existing patents, supports ESG goals, and enhances supply chain resilience by decreasing dependence on imported consumables. Phased adoption of the technology began in 2024, supporting SK Hynix’s sustainability targets of using 25% recycled or renewable materials by 2025 and over 30% by 2030, improving both environmental impact and operational efficiency.

In January 2023, Amtech Systems Inc., a US-based manufacturer of semiconductor consumables and equipment, acquired Entrepix Inc. for an undisclosed amount. The acquisition is expected to expand Amtech’s presence in front-end wafer processing, particularly for smaller wafers and silicon carbide, while strengthening its competitive position through enhanced substrate processing solutions and cross-selling opportunities. Entrepix, based in the US, specializes in chemical mechanical polishing and provides CMP services, including consumables such as slurries and polishing pads.

Major companies operating in the chemical mechanical planarization (cmp) slurry and pads market are CMC Materials, Fujifilm Holdings Corporation, DuPont de Nemours, Inc., 3M Company, Entegris, Inc., Pureon AG, Dongjin Semichem Co., Ltd., SK Enpulse Co., Ltd., Fujimi Corporation, Saint-Gobain, Shin-Etsu Chemical Co., Ltd., Hitachi Chemical, BASF SE, The Dow Chemical Company, JSR Corporation, KPX Chemical Co., Ltd., Hubei Dinglong Chemical Co., Ltd., FNS Tech Co., Ltd., Praise Victor Industrial Co., Ltd., Evonik Industries, Wafer-Tek Corporation.

Asia-Pacific was the largest region in the chemical mechanical planarization (CMP) slurry and pads market in 2025, and it is expected to be the fastest-growing region in the forecast period. The regions covered in the chemical mechanical planarization (cmp) slurry and pads market report are Asia-Pacific, South East Asia, Western Europe, Eastern Europe, North America, South America, Middle East, Africa. The countries covered in the chemical mechanical planarization (cmp) slurry and pads market report are Australia, Brazil, China, France, Germany, India, Indonesia, Japan, Taiwan, Russia, South Korea, UK, USA, Canada, Italy, Spain.

The chemical mechanical planarization (CMP) slurry and pads market consists of sales of oxide slurries, tungsten slurries, copper slurries, hard pads, soft pads, and composite pads. Values in this market are ‘factory gate’ values, that is, the value of goods sold by the manufacturers or creators of the goods, whether to other entities (including downstream manufacturers, wholesalers, distributors, and retailers) or directly to end customers. The value of goods in this market includes related services sold by the creators of the goods.

The market value is defined as the revenues that enterprises gain from the sale of goods and/or services within the specified market and geography through sales, grants, or donations in terms of the currency (in USD unless otherwise specified).

The revenues for a specified geography are consumption values that are revenues generated by organizations in the specified geography within the market, irrespective of where they are produced. It does not include revenues from resales along the supply chain, either further along the supply chain or as part of other products.

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