Chemical Dry Etching Equipment Market Global Report 2026

The chemical dry etching equipment market size has grown strongly in recent years. It will grow from $2.22 billion in 2025 to $2.39 billion in 2026 at a compound annual growth rate (CAGR) of 7.6%. The growth in the historic period can be attributed to increasing semiconductor manufacturing capacity, rising demand for advanced electronic devices, growing production of miniaturized semiconductor components, increasing adoption of high-density integrated circuits, and rising demand for precise wafer pattern transfer.

The chemical dry etching equipment market size is expected to see strong growth in the next few years. It will grow to $3.15 billion in 2030 at a compound annual growth rate (CAGR) of 7.2%. The growth in the forecast period can be attributed to increasing demand for advanced semiconductor nodes, rising production of high-performance computing chips, growing demand for compound semiconductor devices, increasing need for finer circuit geometries, and rising investment in semiconductor fabrication facilities. Major trends in the forecast period include increasing adoption of high-precision dry etching processes, rising demand for improved etching uniformity, growing use of selective etching techniques, increasing demand for low-damage substrate processing, and rising adoption of advanced etching process control.

The growth in automotive electronics and electric vehicles is expected to drive the growth of the chemical dry etching equipment market in the coming years. Automotive electronics and electric vehicles refer to electronic systems, components, and electrically powered vehicles that enhance vehicle performance, safety, connectivity, and energy efficiency. The growth in automotive electronics and electric vehicles is driven by increasing demand for advanced safety, connectivity, and energy-efficient technologies, as modern vehicles require sophisticated electronic systems to improve performance, reduce emissions, and enhance the driving experience. Automotive electronics and electric vehicle demand drives the growth of chemical dry etching equipment by enabling the precise fabrication of semiconductor devices, sensors, power electronics, and microelectromechanical systems used in advanced driver assistance systems, battery management systems, electric powertrains, and in-vehicle electronics. For instance, in January 2024, according to a report published by Kelley Blue Book, a US-based Cox Automotive company, a record 1.2 million car buyers in the United States chose electric vehicles in 2023, accounting for 7.6% of the entire U.S. vehicle market, up from 5.9% in 2022. Therefore, the growth in automotive electronics and electric vehicles (EVs) is driving the growth of the chemical dry etching equipment market.

Major companies operating in the chemical dry etching equipment market are focusing on developing advanced plasma etching systems to enhance etching precision, process uniformity, and manufacturing efficiency for advanced semiconductor and display applications. Plasma etching systems use reactive gases and plasma to selectively remove materials from substrates with high precision, enabling the production of fine circuit patterns and display structures. For instance, in August 2023, Tokyo Electron Ltd., a Japan-based semiconductor manufacturing equipment company, launched the Betelex 2700 PICP EX Plus plasma etch module for 8.7th generation flat panel display production. The system incorporates enhanced plasma distribution and temperature control technologies that improve etch uniformity, increase production yield, reduce operating costs, and support high-precision OLED display manufacturing.

In February 2025, Accuron Technologies Limited, a Singapore-based technology investment and engineering company, acquired Trymax Holding B.V. for an undisclosed amount. Through this acquisition, Accuron Technologies aimed to broaden its semiconductor equipment portfolio and strengthen its position in the European semiconductor equipment industry by incorporating Trymax’s plasma-based semiconductor manufacturing technologies into its existing portfolio. Trymax Holding B.V. is a Netherlands-based company that provides dry etching equipment, with a specific focus on plasma-based isotropic etching and light or shallow etching applications.

Major companies operating in the chemical dry etching equipment market are Applied Materials Inc., Lam Research Corporation, Tokyo Electron Limited, Hitachi High-Tech Corporation, Nordson MARCH Inc., ULVAC Inc., Advanced Micro-Fabrication Equipment Inc. China, Oxford Instruments Plasma Technology Limited, Shibaura Mechatronics Corporation, Wonik IPS Co. Ltd., GigaLane Co. Ltd., SENTECH Instruments GmbH, Plasma-Therm LLC, PSK Inc., Samco Inc., SEMES Co. Ltd., Trion Technology Inc., Plasma Etch Inc., Piotech Inc., NAURA Technology Group Co. Ltd.

Asia-Pacific was the dominant region in the chemical dry etching equipment market in 2025. Asia-Pacific is expected to be the rapidly growing region in the forecast period. The regions covered in the chemical dry etching equipment market report are Asia-Pacific, South East Asia, Western Europe, Eastern Europe, North America, South America, Middle East, Africa.

The countries covered in the chemical dry etching equipment market report are Australia, Brazil, China, France, Germany, India, Indonesia, Japan, Taiwan, Russia, South Korea, UK, USA, Canada, Italy, Spain.

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