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Rapid Thermal Processing (RTP) is a semiconductor manufacturing process used to heat and cool wafers quickly. It is used to activate dopants, anneal materials, and form oxides. RTP is a key step in the fabrication of integrated circuits, as it allows for precise control of the thermal budget and temperature uniformity. RTP is also used to form contacts, interconnects, and other structures.
RTP is a critical part of the semiconductor manufacturing process, as it allows for the rapid and precise control of the thermal budget. This allows for the formation of high-quality structures and materials, which are essential for the production of integrated circuits.
Some companies in the Rapid Thermal Processing market include Applied Materials, Lam Research, Tokyo Electron, KLA Corporation, and ASM International. Show Less Read more